Patent classifications
C08F216/10
PHOTOSENSITIVE POLYMER CAPABLE OF MULTI-STEP DEPROTECTION REACTION, PHOTORESIST COMPOSITION INCLUDING THE PHOTOSENSITIVE POLYMER, AND METHOD OF MANUFACTURING THE INTEGRATED CIRCUIT DEVICE
A photosensitive polymer includes a first repeating unit represented by Formula 1 below:
##STR00001##
wherein, in Formula 1, R.sup.1 is a hydrogen atom or a methyl group, R.sup.2 is a substituted or unsubstituted C1 to C30 acid-labile hydrocarbylene group having a tertiary carbon atom, R.sup.3 is a C1 to C10 linear or branched alkyl group, a C3 to C30 tertiary alicyclic group, a C6 to C20 aryl group, a C2 to C20 heteroaryl group, a C7 to C20 arylalkyl group, or a C2 to C20 heteroarylalkyl group, and n is 0 or 1. To manufacture an integrated circuit (IC) device, a change in the polarity of the photosensitive polymer is induced by causing a multi-step deprotection reaction of the first repeating unit.
PHOTOSENSITIVE POLYMER CAPABLE OF MULTI-STEP DEPROTECTION REACTION, PHOTORESIST COMPOSITION INCLUDING THE PHOTOSENSITIVE POLYMER, AND METHOD OF MANUFACTURING THE INTEGRATED CIRCUIT DEVICE
A photosensitive polymer includes a first repeating unit represented by Formula 1 below:
##STR00001##
wherein, in Formula 1, R.sup.1 is a hydrogen atom or a methyl group, R.sup.2 is a substituted or unsubstituted C1 to C30 acid-labile hydrocarbylene group having a tertiary carbon atom, R.sup.3 is a C1 to C10 linear or branched alkyl group, a C3 to C30 tertiary alicyclic group, a C6 to C20 aryl group, a C2 to C20 heteroaryl group, a C7 to C20 arylalkyl group, or a C2 to C20 heteroarylalkyl group, and n is 0 or 1. To manufacture an integrated circuit (IC) device, a change in the polarity of the photosensitive polymer is induced by causing a multi-step deprotection reaction of the first repeating unit.
Radiopaque polymers
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from —OH, —COOH, —SO.sub.3H, —OPO.sub.3H.sub.2, —O—(C.sub.1-4alkyl), —O—(C.sub.1-4alkyl)OH, —O—(C.sub.1-4alkyl)R.sup.2, —O—(C.sub.2H.sub.5O).sub.qR.sup.1—(C═O)—O—C.sub.1-4alkyl and —O—(C═O)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is —COOH, —SO.sub.3H, or —OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.
Radiopaque polymers
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from —OH, —COOH, —SO.sub.3H, —OPO.sub.3H.sub.2, —O—(C.sub.1-4alkyl), —O—(C.sub.1-4alkyl)OH, —O—(C.sub.1-4alkyl)R.sup.2, —O—(C.sub.2H.sub.5O).sub.qR.sup.1—(C═O)—O—C.sub.1-4alkyl and —O—(C═O)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is —COOH, —SO.sub.3H, or —OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.
RADIOPAQUE POLYMERS
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from —OH, —COOH, —SO.sub.3H, —OPO.sub.3H.sub.2, —O—(C.sub.1-4alkyl), —O—(C.sub.1-4alkyl)OH, —O—(C.sub.1-4alkyl)R.sup.2, —O—(C.sub.2H.sub.5O).sub.qR.sup.1 —(C═O)—O— C.sub.1-4alkyl and —O—(C═O)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is —COOH, —SO.sub.3H, or —OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.
RADIOPAQUE POLYMERS
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from —OH, —COOH, —SO.sub.3H, —OPO.sub.3H.sub.2, —O—(C.sub.1-4alkyl), —O—(C.sub.1-4alkyl)OH, —O—(C.sub.1-4alkyl)R.sup.2, —O—(C.sub.2H.sub.5O).sub.qR.sup.1 —(C═O)—O— C.sub.1-4alkyl and —O—(C═O)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is —COOH, —SO.sub.3H, or —OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.
Cyclopentene monomers and methods of polymerization
Cyclopentene monomers and methods of polymerization, including the polymerization of the cyclopentene monomers. The cyclopentene monomers include allylic substituted cyclopentene monomers that may be racemic or enantiopure. The methods of polymerization may permit the resulting polymers to have one or more desirable structural features.
Cyclopentene monomers and methods of polymerization
Cyclopentene monomers and methods of polymerization, including the polymerization of the cyclopentene monomers. The cyclopentene monomers include allylic substituted cyclopentene monomers that may be racemic or enantiopure. The methods of polymerization may permit the resulting polymers to have one or more desirable structural features.
RADIOPAQUE POLYMERS
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from OH, COOH, SO.sub.3H, OPO.sub.3H.sub.2, O(C.sub.1-4alkyl), O(C.sub.1-4alkyl)OH, O(C.sub.1-4alkyl)R.sup.2, O(C.sub.2H.sub.5O).sub.qR.sup.1(CO)OC.sub.1-4alkyl and O(CO)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is COOH, SO.sub.3H, or OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.
RADIOPAQUE POLYMERS
The present disclosure relates to radiopaque PVA polymers where the PVA has a first pendant group and a second pendant group, wherein the first pendant group comprises a first phenyl group bearing 1 to 5 iodine atoms, and the second pendant group comprises either (a) a second phenyl group bearing 1 to 3 substituents selected from the group W and optionally 1 to 4 iodine substituents, the group(s) W and the optional iodines being the sole substituents of the second phenyl group. Each W is selected from OH, COOH, SO.sub.3H, OPO.sub.3H.sub.2, O(C.sub.1-4alkyl), O(C.sub.1-4alkyl)OH, O(C.sub.1-4alkyl)R.sup.2, O(C.sub.2H.sub.5O).sub.qR.sup.1(CO)OC.sub.1-4alkyl and O(CO)C.sub.1-4alkyl; wherein R.sup.1 is H or C.sub.1-4 alkyl; R.sup.2 is COOH, SO.sub.3H, or OPO.sub.3H.sub.2; q is an integer from 1 to 4; wherein the group W may be in the form of a pharmaceutically acceptable salt; or (b) a pyridyl group; which is optionally in the form of a pyridinium ion.