Polymeric reaction products of certain substituted tetraarylmethane monomers are useful as underlayers in semiconductor manufacturing processes.

A polymer includes a first moiety represented by Chemical Formula 1, and a second moiety including a substituted or unsubstituted C6 to C60 cyclic group, a substituted or unsubstituted C6 to C60 hetero cyclic group, or a combination thereof: ##STR00001##
In Chemical Formula 1, X is phosphorus (P), nitrogen (N), boron (B), or PO, Y1 and Y2 are independently hydrogen or a moiety including at least one substituted or unsubstituted benzene ring, provided that at least one of Y1 and Y2 is the moiety including at least one substituted or unsubstituted benzene ring, Y3 is another moiety including at least one substituted or unsubstituted benzene ring, and * is a linking point.

A polymer includes a first moiety represented by Chemical Formula 1, and a second moiety including a substituted or unsubstituted C6 to C60 cyclic group, a substituted or unsubstituted C6 to C60 hetero cyclic group, or a combination thereof: ##STR00001##
In Chemical Formula 1, X is phosphorus (P), nitrogen (N), boron (B), or PO, Y1 and Y2 are independently hydrogen or a moiety including at least one substituted or unsubstituted benzene ring, provided that at least one of Y1 and Y2 is the moiety including at least one substituted or unsubstituted benzene ring, Y3 is another moiety including at least one substituted or unsubstituted benzene ring, and * is a linking point.

This disclosure describes new compositions and methods related to photoresponsive poly(hexahydrotriazines) and related polymers.

Main chain polyamines comprise amine and ammonium groups along the polymer backbone. Main chain polyamines can be used as pharmaceutical agents and in pharmaceutical compositions. The main chain polyamines are particularly useful in the treatment or prevention of mucositis and infection, specifically oral mucositis and surgical site infection.

Main chain polyamines comprise amine and ammonium groups along the polymer backbone. Main chain polyamines can be used as pharmaceutical agents and in pharmaceutical compositions. The main chain polyamines are particularly useful in the treatment or prevention of mucositis and infection, specifically oral mucositis and surgical site infection.

The present inventive concepts relate to a polymer for a hard mask, a hard mask composition including a polymer for a hard mask as described herein, and a method for forming a pattern of a semiconductor device using a hard mask composition as described herein. The polymer includes a structure represented by the following chemical formula 1. ##STR00001## In chemical formula 1, A, Q, L, R.sub.1, R.sub.2, R.sub.3, and n are the same as defined in the specification.

The present inventive concepts relate to a polymer for a hard mask, a hard mask composition including a polymer for a hard mask as described herein, and a method for forming a pattern of a semiconductor device using a hard mask composition as described herein. The polymer includes a structure represented by the following chemical formula 1. ##STR00001## In chemical formula 1, A, Q, L, R.sub.1, R.sub.2, R.sub.3, and n are the same as defined in the specification.

This invention relates to a process to make a reaction product UA of at least one multifunctional aldehyde A with at least one cyclic urea U, by mixing the at least one multifunctional aldehyde A with the at least one cyclic urea U in the presence of at least one alcohol R.sup.1OH, and optionally, at least one solvent that has no reactive groups which may react with aldehyde groups, CONH groups, or hydroxyl groups, to effect an addition reaction to obtain a solution of a product UA, where R.sup.1 is selected from the group consisting of linear, branched or cyclic alkyl groups having from one to twelve carbon atoms, to the reaction product obtained by this process, and to a method of use thereof as crosslinker for coating compositions.

This invention relates to a process to make a reaction product UA of at least one multifunctional aldehyde A with at least one cyclic urea U, by mixing the at least one multifunctional aldehyde A with the at least one cyclic urea U in the presence of at least one alcohol R.sup.1OH, and optionally, at least one solvent that has no reactive groups which may react with aldehyde groups, CONH groups, or hydroxyl groups, to effect an addition reaction to obtain a solution of a product UA, where R.sup.1 is selected from the group consisting of linear, branched or cyclic alkyl groups having from one to twelve carbon atoms, to the reaction product obtained by this process, and to a method of use thereof as crosslinker for coating compositions.