Patent classifications
C11D7/28
CLEANING AGENT COMPOSITION FOR SUBSTRATE FOR SEMICONDUCTOR DEVICES AND METHOD FOR CLEANING SUBSTRATE FOR SEMICONDUCTOR DEVICES USING THE SAME
The present disclosure relates to a cleaning agent composition for a substrate for a semiconductor device and a method for cleaning a substrate for a semiconductor device using the same. The cleaning agent composition contains a silicon-based compound represented by Formula 1 and an aprotic organic solvent with a dielectric constant of 10 or less, which can form a surface protective film capable of preventing collapse of the pattern even in a wet cleaning process of fine patterns with high aspect ratios, thereby providing a method for manufacturing a semiconductor device with an improved semiconductor manufacturing yield.
Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
Cleaning compositions and processes for cleaning post-plasma etch residue from a microelectronic device having said residue thereon. The composition achieves highly efficacious cleaning of the residue material, including titanium-containing, copper-containing, tungsten-containing, and/or cobalt-containing post-etch residue from the microelectronic device while simultaneously not damaging the interlevel dielectric, metal interconnect material, and/or capping layers also present thereon.
Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
Cleaning compositions and processes for cleaning post-plasma etch residue from a microelectronic device having said residue thereon. The composition achieves highly efficacious cleaning of the residue material, including titanium-containing, copper-containing, tungsten-containing, and/or cobalt-containing post-etch residue from the microelectronic device while simultaneously not damaging the interlevel dielectric, metal interconnect material, and/or capping layers also present thereon.
COMPOSITION AND METHOD FOR REMOVING A COATING FROM A SURFACE
A composition includes methyl acetate, dimethyl carbonate, acetone, or a combination thereof, dimethyl sulfoxide, methyl glyoxal, propylene carbonate, gamma butyrolactone, ethylene carbonate, 2-chloro-1-propanol, or a combination thereof, and optionally thiophene, 1,3-dioxolane, thioacetic acid, or a combination thereof. The respective amounts of each solvent are further described herein, and the total amounts of methyl acetate, dimethyl carbonate, acetone, dimethyl sulfoxide, methyl glyoxal, propylene carbonate, thiophene, 1,3-dioxolane, and thioacetic acid sum to at least 90 volume percent of the total volume of the composition. The composition can be particularly useful for removal of a coating from a surface. Accordingly, a method of removing a coating from a surface is also disclosed.
Protein Deposition Method For Detecting Protein Removal Effect, Protein Culture Solution and Protein Cleaning and Testing Instrument
A method of protein deposition for detecting a protein removal effect, a protein culture solution, and a protein cleaning and testing instrument, including preparing a protein culture solution: mixing a protein and a deionized water to obtain a diluted protein solution and adjusting a PH value of the diluted protein solution, to obtain the protein culture solution; and culturing the corneal contact lens using the protein culture solution: placing the corneal contact lens and the protein culture solution in a culture container for sealed culture within a culture temperature range for a time duration, to obtain a protein deposited corneal contact lens. The method is more suitable to be used as a testing sample of a protein removal effect testing experiment, reducing the difficulty in testing and judging of the degree of fouling of the corneal contact lens and the cleaning effect of the protein removal effect testing experiment.
Protein Deposition Method For Detecting Protein Removal Effect, Protein Culture Solution and Protein Cleaning and Testing Instrument
A method of protein deposition for detecting a protein removal effect, a protein culture solution, and a protein cleaning and testing instrument, including preparing a protein culture solution: mixing a protein and a deionized water to obtain a diluted protein solution and adjusting a PH value of the diluted protein solution, to obtain the protein culture solution; and culturing the corneal contact lens using the protein culture solution: placing the corneal contact lens and the protein culture solution in a culture container for sealed culture within a culture temperature range for a time duration, to obtain a protein deposited corneal contact lens. The method is more suitable to be used as a testing sample of a protein removal effect testing experiment, reducing the difficulty in testing and judging of the degree of fouling of the corneal contact lens and the cleaning effect of the protein removal effect testing experiment.
Printing press cleaning compositions
Disclose herein is a composition comprising a hydrocarbon solvent; an aromatic solvent; a methylated siloxane; and a surfactant. Also disclosed is a method of preparing an emulsion for cleaning purposes comprising mixing a solution at a rate of greater than 500 rpm for at least two hours, wherein the solution comprises a hydrocarbon solvent, an aromatic solvent, a methylated siloxane, and a surfactant. In addition, disclosed herein is a method of cleaning rollers, plates, or blankets of a printing machine with a cleaning mixture, the method comprising contacting the rollers or blankets with the cleaning mixture, wherein the cleaning mixture comprises a hydrocarbon solvent, an aromatic solvent, a methylated siloxane, and a surfactant.
Printing press cleaning compositions
Disclose herein is a composition comprising a hydrocarbon solvent; an aromatic solvent; a methylated siloxane; and a surfactant. Also disclosed is a method of preparing an emulsion for cleaning purposes comprising mixing a solution at a rate of greater than 500 rpm for at least two hours, wherein the solution comprises a hydrocarbon solvent, an aromatic solvent, a methylated siloxane, and a surfactant. In addition, disclosed herein is a method of cleaning rollers, plates, or blankets of a printing machine with a cleaning mixture, the method comprising contacting the rollers or blankets with the cleaning mixture, wherein the cleaning mixture comprises a hydrocarbon solvent, an aromatic solvent, a methylated siloxane, and a surfactant.
Amine-containing acyclic hydrofluoroethers and methods of using the same
An acyclic fluorinated compound of formula (I) is amine-containing acyclic hydrofluoroethers. The acyclic fluorinated compound is useful as heat transfer, solvent cleaning, fire extinguishing agents and electrolyte solvents and additives. ##STR00001##
Amine-containing acyclic hydrofluoroethers and methods of using the same
An acyclic fluorinated compound of formula (I) is amine-containing acyclic hydrofluoroethers. The acyclic fluorinated compound is useful as heat transfer, solvent cleaning, fire extinguishing agents and electrolyte solvents and additives. ##STR00001##