Patent classifications
H
ELECTRICITY
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H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H10P
GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
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14/00
Formation of materials, e.g. in the shape of layers or pillars
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H10P14/3824

METHOD FOR MAKING SEMICONDUCTOR DEVICE INCLUDING AN ENRICHED SILICON 28 EPITAXIAL LAYER
20260123299 · 2026-04-30 ·

A method for making a semiconductor device may include growing .sup.28Si on a semiconductor layer, intermixing the .sup.28Si in the semiconductor layer, and thinning the semiconductor layer after intermixing. The method may further include repeating growing, intermixing, and thinning until a concentration of .sup.28Si in the semiconductor layer reaches a target concentration.