An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools.

An air purifying system may include at least three air cleaners or purifiers capable of independently operating and a docking station to support the at least three air purifiers. Since the air purifiers may be separated or stacked together on the docking station, the air purifying system may be operated in various states desired by a user.

The device (1) for bringing a gas and a liquid into contact includes an enclosure (E), first means (5) for introducing into the enclosure and circulating therein a gas stream (G), second means (6) for introducing into the enclosure and circulating therein a liquid stream (L) that circulates inside the enclosure (E) in the same direction as the gas stream (G), and means (4A) for mixing the gas stream (G) and the liquid stream (L). These mixing means (4A) are positioned inside the enclosure (E) in the path of the gas stream and liquid stream and are capable of locally deflecting upward, and/or of locally causing to rise, at least one portion of the gas stream and liquid stream, so as to locally create turbulences in the gas stream and in the liquid stream.

A packed tower includes a packed tower housing having an inlet for receiving an effluent stream; an outlet for venting the effluent stream; a packed substrate housed within the packed tower housing between the inlet and the outlet, the packed substrate being configured to entrain at least some of particles from a fluid as the effluent stream flows therethrough; and a fan housed within the packed tower housing, the fan being configured to propel the effluent stream from the inlet towards the outlet and to remove at least some of the particles from the fluid. The fan helps to generate a negative pressure to draw the effluent stream into the packed tower and through the packed substrate, which reduces the back pressure improves the flow of effluent stream through the packed tower and upstream abatement apparatus and helps to improve the removal of particles from within the effluent stream.

The device (1) for bringing a gas and a liquid into contact includes an enclosure (E), first means (5) for introducing into the enclosure and circulating therein a gas stream (G), second means (6) for introducing into the enclosure and circulating therein a liquid stream (L) that circulates inside the enclosure (E) in the same direction as the gas stream (G), and means (4A) for mixing the gas stream (G) and the liquid stream (L). These mixing means (4A) are positioned inside the enclosure (E) in the path of the gas stream and liquid stream and are capable of locally deflecting upward, and/or of locally causing to rise, at least one portion of the gas stream and liquid stream, so as to locally create turbulences in the gas stream and in the liquid stream.

A multi-mechanism wet dust removal apparatus that circulates water and removes ambient dust, and a dust removal method. The multi-mechanism wet dust removal apparatus includes a dust collecting device, a dust settling and air-water separation device, a water circulating device, and a dust discharging device. The dust removal is achieved by dust collecting, dust settling, air-water separation and dust discharging. Water can be recycled and the dust removal method integrates multiple dust removal mechanisms.

An air purifier comprising: a housing provided with air inlets and air outlets and defining an accommodating cavity, wherein the air inlets are located on the side walls of the housing; a water supply module arranged within the accommodating cavity and defining a water storage cavity; a purifying module arranged within the accommodating cavity and located on the water supply module, the purifying module comprising: a purifying assembly rotatably disposed within the accommodating cavity, a water distribution assembly for guiding water in the water supply module to flow upwards and distributing water to the purifying assembly, and a driving device located on the purifying assembly and connected with the purifying assembly; and an air discharge module disposed within the accommodating cavity and located on the purifying module.

A humidity control device includes: a storage unit that stores hygroscopic liquid that contains a hygroscopic substance; a vent that is provided in the storage unit; absorption means by which air and the hygroscopic liquid are brought into contact with each other and moisture contained in the air is absorbed by the hygroscopic liquid; an ultrasonic wave generation unit that irradiates at least a part of the hygroscopic liquid, which has absorbed the moisture, with an ultrasonic wave; and removal means by which an atomized droplet that is generated is removed from the hygroscopic liquid that has absorbed the moisture, in which the storage unit suppresses an outflow of a coarse droplet whose particle size is larger than that of the atomized droplet.

Embodiments of an emission recovery system of the present invention generally include an inverted, substantially U-shaped tubular head, and a substantially straight, vertically oriented tubular body internally equipped with one or more fans and a plurality of liquid spray nozzles fluidly connected to a liquid provision system. Embodiments of a method of using an embodiment of an emission recovery system of the present invention are also provided.

An air purifying system may include at least three air cleaners or purifiers capable of independently operating and a docking station to support the at least three air purifiers. Since the air purifiers may be separated or stacked together on the docking station, the air purifying system may be operated in various states desired by a user.