The present invention relates to the CO.sub.2 and O.sub.2 remover. The CO.sub.2 and O.sub.2 remover comprises 65 to 85 weight percent (wt. %) of a nickel oxide (NiO), 5 to 20 wt. % of a magnesium oxide (MgO), wherein the weight ratio of the nickel oxide and the magnesium oxide (NiO/MgO) is 4 to 11, and wherein the wt. % is based on the weight of the CO.sub.2 and O.sub.2 remover.

The present invention aims to improve the separation selectivity for light gases such as hydrogen and helium. The gas separation membrane according to the present invention includes a porous support layer and a separation functional layer containing a cross-linked polyamide and laid on the porous support layer, wherein: the separation functional layer has a protuberance structure containing a plurality of protrusions and recesses; randomly selected 20 of the protrusions on the surface of the separation functional layer indented under a load of 3 nN and observed in pure water at 25° C. by atomic force microscopy give an average deformation of 5.0 nm or more and 10.0 nm or less; and they give a standard deviation of the deformation of 5.0 nm or less.

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

The present disclosure provides a method for producing a gas separation article, said gas separation article comprising: a gas separation membrane, optionally a support, and optionally an additional support, said method comprising the steps of: a) providing a matrix, said matrix having a viscosity from 1 centipoise to 40000 centipoise, said matrix comprising or consisting of one or more monomers, oligomers and/or polymers, and optionally a solvent, b) contacting the matrix of step a) with a support comprising at least one side, said at least one side facing said matrix, thereby forming (i) a matrix side contacting the support and (ii) a matrix side opposite the side contacting the support, c) optionally contacting the matrix side opposite the side contacting the support with an additional support, d) subjecting said matrix contacted with said support to one or more electric fields that is/are substantially parallel to a plane in which the support extends, or substantially perpendicular to a plane in which the support extends e) fixating the one or more monomers, oligomers and/or polymers of the matrix subjected to one or more electric fields in step d) thereby forming a solid gas separation membrane, and f) optionally removing the support and/or the additional support.

The present disclosure also gas separation article obtainable by the aforementioned method as well as use of said gas separation article for separation of gases in a gas mixture.

Described herein are amorphous fluorinated copolymers produced by the polymerization of one or more fluorinated ring monomers and one or more fluorinated comonomers containing multiple ether oxygens. The copolymers are suitable in many high-technology applications, such as optical fibers, anti-reflection coatings, protective coatings, and gas separation membranes. In one aspect, the copolymers are useful is in the field of membrane-based gas separation processes. In one aspect, amorphous copolymer is produced by polymerizing (a) one or more fluorinated ring monomers in the amount of 1 mol % to 99.5 mol %, wherein the fluorinated ring monomer is at least a five membered ring and (b) a comonomer in the amount of from 0.5 mol % to 99 mol %, wherein the comonomer comprises a fluorinated compound with two or more ether oxygens.

Disclosed is a method for purifying a main gas, in particular helium, from a source gas stream comprising the main gas, a main impurity, in particular nitrogen, and optionally another, secondary impurity, in particular oxygen, the method comprising a step of partial condensation of the gas stream in order to extract therefrom impurities in liquid form, in particular the main impurity, and to produce a gas stream enriched with main gas, characterized in that the method comprises, before the partial condensation step, a step of injecting into the gas stream a compound in which the main impurity of the gas to be treated is soluble and having a saturation vapor pressure lower than the saturation vapor pressure of the main impurity.

A separation and purification coupled process with a high helium yield and diversified products is provided. The process is as follows. Firstly, a low-concentration helium-containing gas after being pressurized and pre-treated enters a two-stage and two-section membrane separation unit to produce a helium product with a medium concentration by concentrating stage by stage through the membrane separation unit. A part of the helium with medium concentration enters an adsorption unit for further concentration to produce a helium product above grade A.

Described are gas-processing systems that include a pre-heater, that are useful for processing a flow of gas flowing the gas to contact media (e.g., purification media, catalyst, adsorbent), and related methods.

A humidification and selective permeation module in which humidification of a gaseous feed stream and selective permeation of components in the gaseous feed stream using a facilitated-transport membrane occurs within the same unit operation is disclosed. A process for separation of components in a gaseous feed stream using the humidification and permeation module combines continuous humidification of the feed stream and selective permeation using the facilitated-transport membrane.

Provided are composite articles having a membrane and a porous substrate, where the porous substrate has the membrane disposed thereon. The membrane has two layers, where the first layer has the second layer disposed thereon, and each layer has a plurality of polymer chains with a plurality of silicon-oxygen groups and a plurality of silicon-carbon groups. The first layer has a silicon to oxygen ratio of about 4:1 to about 1:1.25 and a silicon to carbon ratio of about 1:2 to about 1:10, and the second layer has a silicon to oxygen ratio of about 1:1 to about 1:2 and a silicon to carbon ratio of about 2:1 to about 10:1. At least a portion of the polymer chains of the second layer am crosslinked. The composite articles may be used in gas separation methods. Also provided are methods of making the composite articles and devices utilizing the composite articles.