A method for producing a nano-porous membrane with one or up to four graphene layers, pores in the membrane having an average pore size in the range of 0.2-50 or 0.3-10 nm, wherein the method involves the following steps: a) generation of a contiguous, essentially non-porous membrane with one or up to four graphene layers; b) distributed point wise defect creation in the non-porous membrane with one or up to four graphene layers by way of irradiation; c) generation and successive growth of the pores at the defects generated in step b) by thermal annealing in the gas phase, e.g. under 02 at a temperature in the range of 250° C. to less than 400° C.

The present invention aims to improve the separation selectivity for light gases such as hydrogen and helium. The gas separation membrane according to the present invention includes a porous support layer and a separation functional layer containing a cross-linked polyamide and laid on the porous support layer, wherein: the separation functional layer has a protuberance structure containing a plurality of protrusions and recesses; randomly selected 20 of the protrusions on the surface of the separation functional layer indented under a load of 3 nN and observed in pure water at 25° C. by atomic force microscopy give an average deformation of 5.0 nm or more and 10.0 nm or less; and they give a standard deviation of the deformation of 5.0 nm or less.

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

The disclosure provides a method for producing a gas separation article, said gas separation article comprising: a gas separation membrane, optionally a support, and optionally an additional support said method comprising the steps of: a) providing a matrix comprising: a matrix material having a viscosity from 1 cP to 40000 cP, particles, said particles being free from functionalized carbon nanotubes, and optionally a solvent, b) contacting the matrix of step a) with a support comprising at least one side, said at least one side facing said matrix, thereby forming (i) a matrix side in contact with the support and (ii) a matrix side opposite the side in contact with the support, c) optionally contacting the matrix side opposite the side contacting the support with an additional support, d) subjecting said matrix being in contact with said support to one or more electric fields whereby the particles form particle groups in a plurality of substantially parallel planes, said particle groups in each of said plurality of substantially parallel planes being aligned substantially parallel with the one or more electric fields, e) fixating the matrix material so as to fixate the particle groups thereby forming a gas separation membrane, and f) optionally removing the support and/or the additional support.

The disclosure also provides a gas separation membrane obtainable by the aforementioned method as well as use thereof for separation of gases in a gas mixture.

A super enriched personal oxygen concentrator system that discards argon as waste, including a personal oxygen concentrator operatively attached to a first bed for absorbing nitrogen and second bed for absorbing oxygen, and an argon waste outlet operatively attached to the first and second beds for eliminating argon from the system. A method of using the system of the present invention, by absorbing nitrogen from compressed air from a POC with a first bed, absorbing oxygen with a second bed, discarding unabsorbed argon from the compressed air as waste, desorbing enriched oxygen product, and providing a 99% oxygen product. A fluid supply warning and communication system, wherein a primary fluid reservoir is connected to the personal oxygen concentrator system. A method of using the fluid supply warning and communication system.

Some embodiments of the disclosure correspond to, for example, a method for controlling a scrubber containing an adsorbent. The scrubber may be configured to cycle between scrubbing at least one pollutant/gas from a stream of gases with the pollutant/gas being adsorbed onto the adsorbent, and regenerating at least some of the adsorbent and thereby purging at least some of the one pollutant and/or first gas from the adsorbent via a regeneration gas flow. The method may include flowing a stream of gases through the scrubber, the scrubber including the adsorbent and adsorbing at least some of the one pollutant/gas from the stream of gases onto the adsorbent during an adsorption phase over a first time period. The method may also include purging at least a portion of the one pollutant/gas from the adsorbent during a regeneration phase over a second time period with a regeneration gas flow, and cycling therebetween.

Described herein are articles for separating gases. The article includes an amorphous fluorinated copolymer containing, one or more types of fluorinated dioxolane ring monomers, and one or more types of fluorinated non-dioxolane ring monomers, optionally with crosslinking between the fluorinated copolymer chains. The copolymers of fluorinated dioxolane ring monomers and fluorinated non-dioxolane ring monomers show a large differential in the permeability of certain gases compared with other gases. The resulting polymer membranes have superior selectivity and reliability performance in certain gas separations compared with previous compositions known to the art. Methods for making and using the article described are also provided,

In view of above problems, an object of the invention is to provide a primary containment vessel venting system having a structure capable of continuously discharging vapor in a primary containment vessel out of the system and continuously reducing pressure of the primary containment vessel without discharging radioactive noble gases to the outside of the containment vessel and without using an enclosing vessel or a power source. In order to achieve the above object, an nuclear power plant of the invention includes a primary containment vessel which includes a reactor pressure vessel, a radioactive substance separation apparatus which is disposed inside the primary containment vessel and through which the radioactive noble gases do not permeate but vapor permeates, a vent pipe which is connected to the radioactive substance separation apparatus, and an exhaust tower which is connected to the vent pipe and discharges a gas, from which a radioactive substance is removed, to the outside.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

The invention relates to a process and apparatus for separation of gas mixtures with reduced maintenance costs. The process and the apparatus consist of a feed stream separation stage (1), and a retentate separation stage (2), of which both are membrane separation stages, wherein the first retentate stream (7) is heated to temperature higher than the temperature of the feed stream (5), before it is introduced to the retentate separation stage (2), and the total capacity of the membranes used in the retentate separation stage (2) is higher than the total capacity of the membranes used in the feed stream stage (1).