Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a chamber including a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. Methods and systems in accordance with these and other embodiments are also disclosed.

Electronic device processing systems including an equipment front end module (EFEM) with at least one side storage pod are described. The side storage pod has a chamber including a storage container. The storage container includes at least a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. A gas flow component is configured to provide a gas flow between the EFEM body and the storage container. A gas flow temperature component is configured to modify the temperature of the gas flow to a particular temperature.

The present disclose is directed to a method for controlling iodine levels in wet scrubbers, and, in particular, recirculating wet scrubbers by removing the iodine from the scrubbing solution, such as by using ion exchange, absorption, adsorption, precipitation, filtration, solvent extraction, ion pair extraction, and an aqueous two-phase extraction.

Compositions and methods for adsorption of a species (e.g., ammonia, water, a halogen) comprising metal organic frameworks (MOFs) are generally provided. In some embodiments, a MOF comprises a plurality of metal ions, each coordinated with at least one ligand comprising at least two unsaturated N-heterocyclic aromatic groups arranged about an organic core.

The mixing nozzle has a throat section, a diffuser section, a gas nozzle section, a first liquid suction port, a liquid nozzle section, a second liquid suction port, a baffle plate, and a jetting port. The first liquid suction port liquidly absorbs the solution in the water storage pool from a side of the gas nozzle section toward the gas nozzle tip. The liquid nozzle section extends to the downstream side of the gas nozzle section with intervening the first liquid suction port. The second liquid suction port liquidly absorbs the solution in the water storage pool from a side of the liquid nozzle section toward the liquid nozzle tip. The baffle plate is provided such that the mixed flow mixed in the diffuser section collides in front of a downstream end of the diffuser section, and divides and reverses the mixed flow.

A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. Also disclosed is a quantitative analysis method as well as a quantitative analyzer for a gas component contained in a hydrogen fluoride mixed gas, the method characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.

In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

An inorganic material in a form of open-porosity particles, each of the particles comprising a lead vanadate or phosphovanadate of formula Pb.sub.3-xX.sub.x(VO.sub.4)2.sub.-2y(PO.sub.4)2.sub.y,wherein x = 0 or x > 0 but ≤ 0.33; y = 0 or y > 0 but < 1;X = Ba.sup.2+, Ca.sup.2+, Sr.sup.2+ or Cd.sup.2+; and metallic lead or a lead salt. A method for preparing the material, a method for capturing iodine present in a gaseous effluent as well as a method for conditioning iodine present in a gaseous effluent in a form of an iodoapatite.

Methods and materials for the selective capture and storage of preselected materials from gas streams using metal organic framework (MOF) materials are described. In various embodiments preselected target material gases could include noble gasses such as Kr, Xe, Rn, Ar other gasses such as I.sub.2 or other particular isotopes either naturally occurring or man-made, or another preselected gas capture material such as a target material for legal, regulatory or treaty compliance, or a preselected material from a particular process such as a cleaning or etching agent from semiconducting or microelectronic manufacture, or a portion of an anesthetic gas such as nitrous oxide, isoflurane, sevoflurane or a fluorinated ethers.

A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. Also disclosed is a quantitative analysis method as well as a quantitative analyzer for a gas component contained in a hydrogen fluoride mixed gas, the method characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.