Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Disclosed herein is a system for recovering olefins from a vent stream comprising an absorber; and a stripper; where the absorber and the stripper are in a recycle loop; and where the absorber is operative to treat a vent stream with a solvent to remove more than 99 wt % of a halogenated by-product contained in the vent stream and to recover 90 to 95 wt % of olefin molecules present in the vent stream; and where the stripper is operative to remove more than 99 wt % of the halogenated by-products present in the solvent; and where the solvent is recycled to the absorber.

A catalyst for decomposing perfluorinated compounds includes an alumina carrier, at least one metal carried on the alumina carrier and selected from the group consisting of Zn, Ni, W, Zr, Ti, Ga, Nb, Co, Mo, V, Cr, Mn, Fe, and Cu, S carried on the alumina carrier, and rare-earth metals carried on the alumina carrier.

The present invention provides processes for filtering undesired chemicals in streams of contaminated air for supply to confined areas. The processes provide (1) contacting air with a filter comprising by volume from about 5% to about 95% impregnated zirconium hydroxide, from about 5% to about 95% activated impregnated carbon, and optionally, up to about 50% ammonia removal material; and (2) supplying the contacted air to a confined area.

A system for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid comprises a concentration kettle (1), a defoaming pot (2), a gas-liquid separator (3) and a falling film absorption tower (4). A steam exit of the concentration kettle (1) is connected to an entrance of the defoaming pot (2). An exit of the defoaming pot (2) is connected to a feeding port of the gas-liquid separator (3). A gas exit of the gas-liquid separator (3) is connected to the falling film absorption tower (4). A liquid exit of the gas-liquid separator (3) is connected to the concentration kettle (1). A method for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid by using the system is further provided.

The present invention relates to an LED photocatalyst module comprising: a light supplying unit for irradiating light onto a photocatalyst so that the photocatalyst is activated; a photocatalyst purifying unit disposed spaced apart from the light supplying unit and purifying polluted air; and a discharging unit disposed spaced apart from the photocatalyst purifying unit and sucking in the air purified by the photocatalyst purifying unit and discharging the air to the outside, wherein the photocatalyst purifying unit includes a ceramic honeycomb structure in which a plurality of photocatalyst pores, coated with the photocatalyst, are combined in a honeycomb pattern, and the photocatalyst includes a porous metal oxide film and metal particles formed on a surface of the porous metal oxide film.

A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.

A method of separating a composition containing at least one organofluorine compound from at least one inorganic compound by contacts the composition with a semipermeable membrane. Other methods separate a organofluorine compound from a composition containing at least one other organofluorine compound or chlorocarbon. Methods also include isolating a single organofluorine compound from a composition comprising a mixture of organofluorine compounds, chlorocarbons, and/or inorganic compounds.

An electrical switching device is provided for interrupting an electrical connection. The device has a switching chamber and two contact pieces being arranged directly in the switching chamber or in an encapsulated housing arranged in the switching chamber and configured to be gas-tight in relation to the switching chamber. The contact pieces are movable relative to each other to bring about a switching action. A fluid insulation medium is also provided, which is arranged in the switching chamber or in a storage volume which can be connected to the switching chamber. The switching chamber or the storage volume has an outlet for letting out the fluid insulation medium. A filter is provided at or adjacent to the outlet, the filter configured to filter gaseous components of the insulation medium, or the reaction products thereof, conducted through the outlet.

A method and composition of matter for detecting and decontaminating hazardous chemicals, the composition of matter including: a magnetic material for any of chemisorbing, molecularly dissociating, or decomposing a hazardous chemical, wherein the magnetic material changes its magnetic moment upon any of chemisorption, decomposition, and molecular dissociation of the hazardous chemical and the change in magnetic moment is used to detect the presence of the hazardous chemical, and wherein the hazardous chemical includes any of toxic industrial chemicals, chemical warfare agents, and chemical warfare agent related compounds.