Ionization systems and methods include moving air into contact with one or more ion generators and then past an ozone removal assembly to remove at least some ozone from the air. The air may be moved by a fan and may be filtered before contacting the one or more ion generators. The amount of one or more of the following of the air may be measured: the amount of ions, particulates, temperature, humidity, and other relevant factors. The ionization amount may be adjusted based on one or more of the measured amounts. The one or more ion generators and ozone removal assembly may be constructed as part of a single unit so they can be removed and replaced easily.

A system for disassociating molecules of a gas based on RF power. Characteristics of the RF power can be tuned to increase disassociation efficiency. The system can include a disassociation chamber configured to enclose a volume of a gas and a radio frequency (RF) power source configured to provide RF power to the disassociation chamber. The RF power source can include a radio-frequency generator configured to generate an electromagnetic (EM) radiation having a frequency between about 20 MHz and about 10 THz, a radio-frequency amplifier configured to amplify the generated EM radiation, and an output channel to direct the amplified EM radiation towards the volume of gas.

A carbon dioxide recovery system is configured to separate carbon dioxide from gas containing the carbon dioxide via an electrochemical reaction and includes an electrochemical cell including a working electrode and a counter electrode. The working electrode includes a CO.sub.2 adsorbent. The CO.sub.2 adsorbent is configured to, when a first voltage is applied between the working electrode and the counter electrode, take in electrons flowing from the counter electrode to the working electrode and adsorb the carbon dioxide by a Coulomb force of the electrons without bonding to the carbon dioxide by sharing an electron orbital with the carbon dioxide. The CO.sub.2 adsorbent is configured to, when a second voltage different from the first voltage is applied between the working electrode and the counter electrode, discharge the electrons from the working electrode to the counter electrode and desorb the carbon dioxide.

An electrochemical cell includes (a) an anode including a first liquid permeable carbon cloth carbon electrode and a first current collector, (b) a cathode including a second liquid permeable carbon cloth electrode and a second current collector, (c) a separator made from an insulating material, and (d) a current source applying an electrical current to said anode and said cathode.

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.

A recyclable ceramic catalyst filter, a filtering system including the same, and a method of managing the filtering system are provided. The ceramic catalyst filter has a monolithic structure including a first surface which blocks a first material; and a second surface which removes a second material that passed through the first surface, where the second surface is activated and operates as a catalyst layer which removes the second material in response to energy supplied to the second surface.

A recyclable ceramic catalyst filter, a filtering system including the same, and a method of managing the filtering system are provided. The ceramic catalyst filter has a monolithic structure including a first surface which blocks a first material; and a second surface which removes a second material that passed through the first surface, where the second surface is activated and operates as a catalyst layer which removes the second material in response to energy supplied to the second surface.

Ionization systems configured with a catalyst-bearing sleeve provide improved filtration while keeping ozone levels within acceptable limits. Modular configurations provide for serviceability and replaceability. System controls monitor particulates, temperature, humidity, and other relevant factors and adjust an ionization level accordingly for optimal performance.

An oxygen pump can produce high-purity high-pressure oxygen. Oxygen ions (O.sup.2−) are electrochemically pumped through a multi-stage electrolysis stack of cells. Each cell includes an oxygen-ion conducting solid-state electrolyte between cathode and anode sides. Oxygen dissociates into the ions at the cathode side. The ions migrate across the electrolyte and recombine at the anode side. An insulator is between adjacent cells to electrically isolate each individual cell. Each cell receives a similar volt potential. Recombined oxygen from a previous stage can diffuse through the insulator to reach the cathode side of the next stage. Each successive stage similarly incrementally pressurizes the oxygen to produce a final elevated pressure.

The present invention achieves a moisture absorbing material which enables efficient dehumidification without supercooling or large heat quantity; and a dehumidifier in which the moisture absorbing material is used. The moisture absorbing material can be a dried product of a polymer gel in which an interpenetrating polymer network structure or a semi-interpenetrating polymer network structure is formed by (a) a stimuli-responsive polymer whose affinity with water changes reversibly in response to an external stimulus and (b) a hydrophilic polymer.