A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.

A method and a plant for capturing CO2 from an incoming flue gas. The flue gas can be exhaust gas from coal and gas fired power plants, cement factories or refineries. The incoming exhaust gas is cooled, mixed with air and compressed, and thereafter introduced into a combustion chamber together with gas and/or liquid fuel. Part of the combustion is achieved by separate burners with cooling/combustion air feed with a volume equal to the volume of CO2 captured. Said burners will elevate the temperature in the combustion chamber allowing combustion of exhaust gas with low oxygen content. CO2 is captured at high partial pressure before expansion by the gas turbine to produce power and generate steam in the heat recovery unit. The gas turbine will operate with high efficiency close to design parameters with respect to inlet temperature, pressure and flow.

A method for recovering C2 components in a methane-containing industrial gas includes the steps of (1) cooling a compressed methane-containing industrial gas and performing gas-liquid separation; (2) absorbing C2 components in the gas phase by using an absorbent to obtain an absorption rich liquid; (3) returning the absorption rich liquid to the compression in step (1) or mixing the absorption rich liquid with the liquid phase obtained in step (1) to obtain a mixed liquid, and depressurizing the mixed liquid or the absorption rich liquid; (4) performing methane desorption on the depressurized stream to obtain a rich absorbent, or performing second gas-liquid separation on the depressurized stream, followed by methane desorption on the second liquid phase to obtain a rich absorbent; and (5) desorbing and separating the rich absorbent to obtain a lean absorbent and an enriched gas, and recycling and reusing the lean absorbent.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A gas trap system for metal organic chemical vapor deposition (MOCVD) exhaust abatement operations is provided. The gas trap system may include a housing including an inlet configured to receive exhaust gas and an outlet. The gas trap system may also include a conical inlet shield positioned within the housing. The conical inlet shield may form a first path between the housing and the conical inlet shield, wherein the first path receives the exhaust gas from the inlet. The conical inlet shield may also cool the exhaust gas and cause the exhaust gas to be uniformly distributed in the first path. The gas trap system may also include a filter configured to receive the exhaust gas from the first path and to filter the exhaust gas, wherein the filtered gas exhaust is provided to the outlet.

Methods and systems for reducing greenhouse gas emissions, including producing a waste gas stream comprising form greater than 0 vol % to less than 20 vol %, inclusive, carbon dioxide, pre-concentrating the waste gas stream to increase a concentration of carbon dioxide, producing a concentrated byproduct stream comprising more than 40 vol %, dissolving carbon dioxide contained in the concentrated byproduct stream in water, producing a dissolved byproduct stream and an undissolved byproduct stream, injecting the dissolved byproduct stream or a portion thereof into a reservoir containing mafic rock, and allowing components of the dissolved byproduct stream to react in situ with components of the mafic rock to precipitate and store components of the byproduct stream in the reservoir.

Methods and systems for reducing greenhouse gas emissions, including producing a waste gas stream comprising form greater than 0 vol % to less than 20 vol %, inclusive, carbon dioxide, pre-concentrating the waste gas stream to increase a concentration of carbon dioxide, producing a concentrated byproduct stream comprising more than 40 vol %, dissolving carbon dioxide contained in the concentrated byproduct stream in water, producing a dissolved byproduct stream and an undissolved byproduct stream, injecting the dissolved byproduct stream or a portion thereof into a reservoir containing mafic rock, and allowing components of the dissolved byproduct stream to react in situ with components of the mafic rock to precipitate and store components of the byproduct stream in the reservoir.

A flue gas can be cooled for carbon capture purposes with the use of a gas-to-gas exchanger, using air as the cooling media, downstream of a heat recovery process, and optionally upstream of a quenching process; the use of an amine chilling process to reduce the required flue gas cooling duties upstream of the CO.sub.2 absorber; the use of a gas-to-gas exchanger, using the absorber overhead as the cooling media, downstream of a heat recovery process, and optionally upstream of the quenching process; and/or the use of a quenching process in which heated water and condensate is cooled by an external cooling loop utilizing treated flue gas condensate in an evaporative cooling process.

Processes and apparatuses for recovering a high purity carbon dioxide stream. A first separation zone that may include a cryogenic fractionation column provides the high-purity CO.sub.2 stream. A vapor stream from the cryogenic fractionation column is passed to a second separation zone to separate the CO.sub.2 from the other components. The second separation zone may include a pressure swing adsorption unit or a solvent separation unit. The second separation zone provides a hydrogen enriched gas stream that may be used in a gas turbine. The second stream from the second separation zone includes carbon dioxide and, after a pressure increase in a compressor, may be recycled to the first separation zone.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.