A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.

A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.

A process and a plant for purifying a crude gas stream containing sulfur components and hydrocarbons by gas scrubbing using a scrubbing medium which is selective for sulfur components in an absorption column. Heavy hydrocarbons and heavy mercaptans are removed from the crude gas in a lower section of the absorption column and the resulting, loaded scrubbing medium stream is fed separately from the other loaded scrubbing medium streams to a hot regeneration column. A vapor stream enriched in water, hydrocarbons and sulfur components is obtained as overhead product from the hot regeneration column and this stream is cooled to below its dew point and is separated in a gas-liquid-liquid phase separation apparatus. The resulting, organic liquid phase contains heavy hydrocarbons and heavy mercaptans and can thus be discharged from the process or the plant, as a result of which accumulation thereof in the scrubbing medium is prevented.

A process and a plant for purifying a crude gas stream containing sulfur components and hydrocarbons by gas scrubbing using a scrubbing medium which is selective for sulfur components in an absorption column. Heavy hydrocarbons and heavy mercaptans are removed from the crude gas in a lower section of the absorption column and the resulting, loaded scrubbing medium stream is fed separately from the other loaded scrubbing medium streams to a hot regeneration column. A vapor stream enriched in water, hydrocarbons and sulfur components is obtained as overhead product from the hot regeneration column and this stream is cooled to below its dew point and is separated in a gas-liquid-liquid phase separation apparatus. The resulting, organic liquid phase contains heavy hydrocarbons and heavy mercaptans and can thus be discharged from the process or the plant, as a result of which accumulation thereof in the scrubbing medium is prevented.

Integrated plants and associated processes for producing ammonia and sulfuric acid have been developed comprising air separation and water electrolysis subsystems and which make surprisingly efficient use of the products from these subsystems (i.e. oxygen and nitrogen from the former and hydrogen and oxygen from the latter). The invention is particularly suitable for use as part of an integrated fertilizer production plant.

Integrated plants and associated processes for producing ammonia and sulfuric acid have been developed comprising air separation and water electrolysis subsystems and which make surprisingly efficient use of the products from these subsystems (i.e. oxygen and nitrogen from the former and hydrogen and oxygen from the latter). The invention is particularly suitable for use as part of an integrated fertilizer production plant.

The present disclosure relates to a novel improved method for continuous crystallization of highly crystalline clathrate hydrates. The novel improved method utilizes a novel hydrator capable of overcoming heat and mass transfer limitations that usually constrain crystallization rate and thus reduces process productivity. The disclosed method and hydrator are for production of crystalline clathrates in general, CO.sub.2 capture, capture of other clathrate forming compounds, CO.sub.2 storage and transportation, storage and transportation of any clathrate forming compound in a solid lattice, gas separation or water desalination or purification purposes.

The invention relates to a gas scrubbing process and a corresponding plant for removal of acidic gas constituents from crude synthesis gas which make it possible by treatment of shifted and of unshifted crude synthesis gas in the gas scrubbing process and by combination of the thus-obtained partial product streams to produce a plurality of gas products having different compositions. In addition, the invention ensures that the flash gases obtained during decompression of the laden scrubbing medium are utilized materially and/or energetically in advantageous fashion.

The invention relates to a gas scrubbing process and a corresponding plant for removal of acidic gas constituents from crude synthesis gas which make it possible by treatment of shifted and of unshifted crude synthesis gas in the gas scrubbing process and by combination of the thus-obtained partial product streams to produce a plurality of gas products having different compositions. In addition, the invention ensures that the flash gases obtained during decompression of the laden scrubbing medium are utilized materially and/or energetically in advantageous fashion.

The present disclosure relates to an absorber column apparatus for removing a selected component of a gas. The apparatus may have a first zone, a second zone and a third zone, wherein the first and third zones form a first domain through which a first fluid laden with a select gaseous component to be removed therefrom flows along concurrently with a second fluid. The second fluid at least substantially removes the select gaseous component from the first fluid to create a third fluid. The first fluid leaves the absorber column as a fourth fluid with the select gaseous component at least substantially removed therefrom. The second zone forms an active packing zone including a structure which forms an independent second domain in thermal communication with the first domain. The second receives a quantity of the third fluid and channels it through the second zone to help cool at least one of the first and second fluids.