An isotope separation method, including introducing a first reactant stream (109), containing a natural abundance of at least one desired isotopologue molecule, a second reactant stream (110), and a recycle stream (112) into a photochemical reactor (101), thus producing a raw product stream (115), introducing the raw product stream (115) into a separation device (116), thus producing at least a product stream (117), a gas filter stream (113), and the recycle stream (112), and introducing at least a portion of the gas filter stream (113) into an unconventional (gas) filter (103), wherein the product stream (117) includes the at least one desired isotopologue molecule.

An object of the present invention is to provide a deuterium recovery method and deuterium recovery equipment that can recover and reuse deuterium or deuterium compounds used in semiconductor manufacturing processes. The present invention provides a deuterium recovery method including: generating heavy water in an exhaust gas containing deuterium gas in a semiconductor manufacturing process.

An object of the present invention is to provide a deuterium recovery method and deuterium recovery equipment that can recover and reuse deuterium or deuterium compounds used in semiconductor manufacturing processes. The present invention provides a deuterium recovery method including: generating heavy water in an exhaust gas containing deuterium gas in a semiconductor manufacturing process.

Disclosed in the present invention is a benzocrown ether graft polymer with a lithium isotopic separation effect and a preparation method thereof. The polymer is a benzocrown ether graft polymer formed by the linkage of chemical bonds, which takes the main chain of a polymer containing chloromethyl group, chloroformyl group or hydroxyl group as main chain, and takes a benzocrown ether as pendant group. The preparation process of the polymer comprises the following steps: preparing polymer solution with certain concentration by dissolving a polymer containing chloromethyl group, chloroformyl group or hydroxyl group in a solvent; then blending a catalyst and a benzocrown ether containing carboxyl group or aldehydyl group and dissolving in the polymer solution containing hydroxyl group, or blending an acid-binding agent and a benzocrown ether containing amino group or hydroxyl group and dissolving in the polymer solution containing chloromethyl group or chloroformyl group, reacting at a certain temperature and for a certain time, linking the benzocrown ether to the main chain of polymer by chemical bonds, and precipitating by adding a precipitating agent to obtain the graft polymer. The grafting polymer has excellent characteristic of lithium isotopic separation.

Disclosed in the present invention is a benzocrown ether graft polymer with a lithium isotopic separation effect and a preparation method thereof. The polymer is a benzocrown ether graft polymer formed by the linkage of chemical bonds, which takes the main chain of a polymer containing chloromethyl group, chloroformyl group or hydroxyl group as main chain, and takes a benzocrown ether as pendant group. The preparation process of the polymer comprises the following steps: preparing polymer solution with certain concentration by dissolving a polymer containing chloromethyl group, chloroformyl group or hydroxyl group in a solvent; then blending a catalyst and a benzocrown ether containing carboxyl group or aldehydyl group and dissolving in the polymer solution containing hydroxyl group, or blending an acid-binding agent and a benzocrown ether containing amino group or hydroxyl group and dissolving in the polymer solution containing chloromethyl group or chloroformyl group, reacting at a certain temperature and for a certain time, linking the benzocrown ether to the main chain of polymer by chemical bonds, and precipitating by adding a precipitating agent to obtain the graft polymer. The grafting polymer has excellent characteristic of lithium isotopic separation.

Process and apparatus for the separation of the components having different boiling points of a liquid mixture, characterized in that forming bubbles by a carrier gas in the liquid mixture where the one or more volatile component is getting enriched in the bubbles, then after said bubbles leave the liquid phase the released vapor content of them is collected and condensed and the obtained liquid being enriched in the more volatile component(s) is separated from the carrier gas.

Process and apparatus for the separation of the components having different boiling points of a liquid mixture, characterized in that forming bubbles by a carrier gas in the liquid mixture where the one or more volatile component is getting enriched in the bubbles, then after said bubbles leave the liquid phase the released vapor content of them is collected and condensed and the obtained liquid being enriched in the more volatile component(s) is separated from the carrier gas.