A cleaning device for spray cleaning of a sensor surface includes a spray-body having a spray-nozzle and a body-housing. A liquid fluid connection to a liquid inlet and a pressurized air fluid connection to a pressurized air inlet are such that suction pressure is induced at the liquid fluid connection upon providing pressurized airflow from the pressurized air inlet to the spray-nozzle. A hydraulic flow path is connected to the liquid fluid connection. A hydraulic valve is adapted for selective control of supplying liquid fluid to the liquid fluid inlet. A pneumatic flow path is connected to the pressurized air fluid connection. A pneumatic valve is in a pressurized air fluid duct adapted for selective control of supplying pressurized air fluid from a pressurizer to the pressurized air fluid inlet. The spray-nozzle sprays the liquid fluid and the pressurized air fluid as a mixture in an aerosol jet.

An apparatus for processing a substrate includes a mixing nozzle having a mixing space that is shaped as an inverted cone, the mixing nozzle including a first inlet, a second inlet and an outlet installed at the mixing space; a first chemical supply unit connected to the first inlet; a second chemical supply unit connected to the second inlet; and a supply tank connected to the outlet, wherein the first chemical supply unit is configured to supply a first chemical solution to the mixing space through the first inlet, the second chemical supply unit is configured to supply a second chemical solution to the mixing space through the second inlet, and the supply tank is supplied with, through the outlet, a solution mixture that is formed of the first chemical solution and the second chemical solution after being mixed in the mixing space.

A system and method of injecting a gas enriched and/or emulsified first liquid into a second liquid is disclosed. The injection can cause generation of a high density of bubbles having a mean diameter of a selected size. The mean diameter of the bubbles can be selected and varied based on the characteristics of the injection system.

An ozone water production device (1) includes: flow rate controllers (4, 5) that each control a flow rate of gas which is a raw material; a flow rate meter (12) that measures a flow rate of water which is a raw material; a booster pump (13) that controls pressure of the water; an ozone water generating unit (8) that generates ozone water by mixing ozone gas and the water; and a pressure sensor (17) that measures pressure of the ozone water which is to be supplied to a use point (19). The booster pump (13) controls the pressure of the water such that the pressure of the ozone water measured by the pressure sensor (17) is constant. The flow rate controllers (4, 5) each control the flow rate of the gas in accordance with the flow rate of the water measured by the flow rate meter (12).

A method of controlling the flow of different flow paths of fluid is provided. The method includes rotating a valve to a first position, receiving a first concentrate in the first position, discharging the first concentrate through one of two outlets, rotating the valve to a second position, receiving a second concentrate in the second position, and discharging the second concentrate through one of the two outlets.

A functional water producing apparatus in an embodiment includes: a water pressure regulator configured to regulate the water pressure of the ultrapure water, the water pressure regulator having a pressure regulating valve configured to regulate a water pressure of the ultrapure water to an almost constant pressure and a feed water pump configured to pressurize the ultrapure water; a dissolving device configured to dissolve functional gas imparting a specific function in the ultrapure water regulated the water pressure by the water pressure regulator; and a control device configured to control the feed water pump to regulate the water pressure of the functional water to a predetermined constant pressure based on a water pressure or a flow rate of the functional water flowing out of the dissolving device.

A diluted solution production method of the present invention is a diluted solution production method of producing a diluted solution of a second liquid by adding the second liquid to a first liquid, the method including feeding the first liquid to a first pipe; and controlling pressure in a tank that stores the second liquid to add, through the second pipe that connects the tank to the first pipe, the second liquid to the first liquid in the first pipe. Adding the second liquid includes measuring a flow rate of the first liquid or the diluted solution that flows through the first pipe; measuring a component concentration of the diluted solution; and controlling the pressure in the tank, based on the measured values of the flow rate and the component concentration, so as to adjust the component concentration of the diluted solution to a specified value.

The device is a gas-liquid mixing device having a venturi structure in which a throat portion and an enlarged diameter portion are provided in a main passage through which a liquid passes, the gas-liquid mixing device including a collision chamber provided on an outer periphery of the enlarged diameter portion, and a stirring chamber provided downstream of the enlarged diameter portion. A collision flow path communicating with the collision chamber and causing a gas-liquid to collide with an outer peripheral wall, a straight flow path through which the gas-liquid passing through a central portion of the enlarged diameter portion travels straight, and an outer ring flow path through which the gas-liquid flows from the collision chamber to the stirring chamber are formed downstream of the enlarged diameter portion. The gas-liquids from the outer ring flow path and the straight flow path are stirred in the stirring chamber.

A wipe dispenser for use in metering out consistent doses of a composition onto a disposable wipe includes a mixing and dispensing assembly. The assembly has a vessel holding a first liquid for the composition and a first pump to convey the first liquid. A bottle having a second pump to convey a second liquid of the composition is stored within the bottle. A funnel arrangement is in downstream communication with the first pump and second pump. The funnel arrangement includes a mixing chamber for mixing the first and second liquids and a dispensing funnel in communication with and downstream of the mixing chamber. A wipe can be pulled through the dispensing funnel and wetted with a mixture of the first liquid and second liquid from the mixing chamber. A push bar attached to the funnel arrangement can selectively apply the force to actuate the first pump and second pump.

A system and method of injecting a gas enriched and/or emulsified first liquid into a second liquid is disclosed. The injection can cause generation of a high density of bubbles having a mean diameter of a selected size. The mean diameter of the bubbles can be selected and varied based on the characteristics of the injection system.