A distributor element comprising: at least three plates, each plate comprising openings, each of the levels between adjacent plates having walls extending from one side of one plate onto an adjacent side of an adjacent plate to define a channel, the channels fluid-tightly connecting all of the openings between adjacent plates, in each of the levels between the walls, one or more hollow spaces being formed, each of the plates comprising at least one aperture not being fluid-tightly connected with the openings of an adjacent plate by a channel, in each level between the at least one aperture of the adjacent plate at least two fluid paths extend in the one or more hollow spaces, all of the at least two fluid paths of each level having a substantially same length, and a number of fluid paths increasing at least for 75% of the plates from level to level.

A distributor element comprising: at least two fractal plates each defining a level below an adjacent fractal plate, an uppermost fractal plate comprising a first number of first openings, each of the first openings surrounded at a lower side by one of a plurality of first walls and, in the first level between the first walls, one or more first hollow spaces defining one or more first fluid paths, a second fractal plate comprising a second number of second openings, each of the second openings surrounded at a lower side by one of a plurality of second walls and, in the second level between the second walls, one or more second hollow spaces defining one or more second fluid paths, the second number being higher than the first number, and each of the first fluid paths and each of the second fluid paths having substantially a same length.

A flow distribution system for distributing and dividing the flows of at least two separate fluids, the distribution system comprising: a three-dimensional nested structure of at least two fluid transporting fractals comprising at least a first fluid transporting fractal and a second fluid transporting fractal, each fluid transporting fractal having a respective fluid inlet which bifurcates to a plurality of fluid outlets, each fluid transporting fractal being configured to facilitate a flow therethrough independent from a flow in the other fluid transporting fractal, each fluid transporting fractal extending along and about a central axis between fluid inlet and a plurality of fluid outlets; wherein each fluid transporting fractals comprises of a series of recursive bifurcation units assembled in a selected number of stages, each bifurcation unit comprising a Y-shaped bifurcated element which is fluidly connected to two successive bifurcation units, each successive bifurcation unit being rotated relative to the central axis by an angle of between 60 and 120 degrees relative to the previous stage; each fluid transporting fractal is intertwined with the other fluid transporting fractal; each fluid transporting fractal is positioned offset from the other fluid transporting fractal about the central axis and are arranged such that each fluid outlet from one of the fluid transporting fractals is located adjoining a fluid outlet of the other fluid transporting fractal, and each fluid transporting fractal is centered about a flow axis which is laterally inclined from greater than 0 to 20 degrees from the central axis and longitudinally inclined from greater than 0 to 20 degrees from the central axis.

A flow distribution system for distributing and dividing the flows of at least two separate fluids, the distribution system comprising: a three-dimensional nested structure of at least two fluid transporting fractals comprising at least a first fluid transporting fractal and a second fluid transporting fractal, each fluid transporting fractal having a respective fluid inlet which bifurcates to a plurality of fluid outlets, each fluid transporting fractal being configured to facilitate a flow therethrough independent from a flow in the other fluid transporting fractal, each fluid transporting fractal extending along and about a central axis between fluid inlet and a plurality of fluid outlets; wherein each fluid transporting fractals comprises of a series of recursive bifurcation units assembled in a selected number of stages, each bifurcation unit comprising a Y-shaped bifurcated element which is fluidly connected to two successive bifurcation units, each successive bifurcation unit being rotated relative to the central axis by an angle of between 60 and 120 degrees relative to the previous stage; each fluid transporting fractal is intertwined with the other fluid transporting fractal; each fluid transporting fractal is positioned offset from the other fluid transporting fractal about the central axis and are arranged such that each fluid outlet from one of the fluid transporting fractals is located adjoining a fluid outlet of the other fluid transporting fractal, and each fluid transporting fractal is centered about a flow axis which is laterally inclined from greater than 0 to 20 degrees from the central axis and longitudinally inclined from greater than 0 to 20 degrees from the central axis.

A multi-layered micro-channel mixer includes a base plate and a cover plate. Two inlet fluid reservoirs, two inlet channels, two groups of fluid distribution channel networks, two groups of process fluid channels, an impinging stream mixing chamber, a fluid mixing intensification channel and an outlet buffer reservoir are provided on the base plate. Two fluids are fed into the two inlet fluid reservoirs, respectively. The fluids then flow into the process fluid channels via the inlet channels and the multi-stage fluid distribution channel networks, respectively. Then the two fluid streams ejected from the opposing process fluid channels impinges upon each other in the impinging stream mixing chamber. The mixed fluid is subjected to vortex or secondary flow generated by the baffles or the internals in the impinging stream mixing chamber and fluid mixing intensification channel, and finally the mixed fluid is discharged through the outlet buffer reservoir.

Systems and methods for mixing at least two mixing components, including a first mixing component independent fractal for transporting the first mixing component, a second mixing component independent fractal for transporting the second mixing component, wherein each of the first mixing component independent fractal and the second mixing component independent fractal comprise at least a first iteration of a fractal shape and a last iteration of the fractal shape, a contact channel in fluid communication with each of the last iterations for the first mixing component independent fractal and the second mixing component independent fractal, and a passive mixing structure located in at least a portion of the contact channel.

A channel manifold is presented, and which includes a dimensionally stable channel plate having top, bottom and side surfaces and a channel formed in a surface thereof, wherein the channel splits into a plurality of subsidiary channels along the surface of the channel plate and has an entrance port and a plurality of exit ports such that a fluid fed into the entrance port is expelled through the plurality of exit ports.

A nozzle for spouting a liquid phase, in which one liquid phase in a two-liquid phase system can be stably jetted as highly dispersible droplets while suppressing coalescence of droplets, and accumulation of fine solid components in the nozzle hardly occurs. The nozzle has a structure in which capillary tubes or pores are assembled. Further, the capillary tubes or the pores are formed using a suitable material having a low affinity for organic or a low affinity for water, or a material subjected to appropriate surface treatment.

A physical quantity measurement device includes a passage flow channel, a branch flow channel, and a physical quantity detection unit. An inflow region extending from the inflow port and a lateral region laterally arranged to the inflow region are included in at least one of the passage flow channel and the branch flow channel. The physical quantity detection unit is disposed in the lateral region. A guiding surface that guides away from the lateral region in the lateral direction foreign matter is included in at least one of an inner peripheral surface of the passage flow channel and an inner peripheral surface of the branch flow channel at a position upstream of the lateral region.

An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. The pumping ring is positioned in the body over both the first and second vacuum pump openings. The pumping ring includes a substantially ring shaped body having a top surface, a bottom surface, and an opening. The top surface has one or more through holes formed therein, arranged in a pattern concentric with the first vacuum pump opening. The bottom surface has a fluid passage formed therein, interconnecting each of the one or more through holes. The opening is formed in the substantially ring shaped body, substantially aligned with the vacuum pump opening. The symmetric flow valve is positioned in the body over the pumping ring and movable between a raised position and a lowered position.