There is provided a processing apparatus including: a processing part including a plurality of process modules connected to each other in a first room, and a loader module provided in the first room and accommodating a carrier which receives a substrate processed by each of the plurality of process modules; and a plurality of pump units corresponding to the plurality of process modules, respectively, and arranged in a second room adjacent to the first room, wherein an installation area of the plurality of pump units is equal to or smaller than that of the processing part.

The subject matter is the assembly of a containment means with an aseptic working chamber and associated decontamination arrangement. The working chamber is delimited at the bottom by a base, and above the working chamber is a circulating air zone, in which a circulating air filter with a circulating air fan is arranged. The circulating air zone and the working chamber are delimited towards the outside by a housing. At least a first returning air channel leads from the working chamber into the circulating air zone. A returning air filter is fluidically connected to the returning air channel, specifically is arranged facing the circulating air zone. The returning air filter can be arranged at the opening of the returning air channel into the circulating air zone or arranged in the circulating air channel, set back from the opening. The returning air filter and the circulating air filter are in the form of a plate filter or an exchangeable filter cartridge or a replaceable filter insert. A single returning air filter or a series of interacting returning air filters and a single circulating air filter or a series of interacting circulating air filters can be installed. Containment means in which larger volumes of air are to be processed also have a second returning air channel at or in which a returning air filter is also installed.

The subject matter is the assembly of a containment means with an aseptic working chamber and associated decontamination arrangement. The working chamber is delimited at the bottom by a base, and above the working chamber is a circulating air zone, in which a circulating air filter with a circulating air fan is arranged. The circulating air zone and the working chamber are delimited towards the outside by a housing. At least a first returning air channel leads from the working chamber into the circulating air zone. A returning air filter is fluidically connected to the returning air channel, specifically is arranged facing the circulating air zone. The returning air filter can be arranged at the opening of the returning air channel into the circulating air zone or arranged in the circulating air channel, set back from the opening. The returning air filter and the circulating air filter are in the form of a plate filter or an exchangeable filter cartridge or a replaceable filter insert. A single returning air filter or a series of interacting returning air filters and a single circulating air filter or a series of interacting circulating air filters can be installed. Containment means in which larger volumes of air are to be processed also have a second returning air channel at or in which a returning air filter is also installed.

An Ionization unit (7) for cleaning air in a room (1) with a ceiling (3) and a floor (5), comprising an ionizer (19) configured to electrically charge particles in the air; and a support unit (13) configured to enable the ionization unit (7) to be positioned at a distance of at least 50 centimeters above the floor (5) of the room (1), wherein the support unit (13) allows the ionization unit (7) to travel within the room (1) while being distanced from the floor (5).

A system for dispensing a liquid in a closed chamber includes at least one rapid transfer port in at least one wall of the closed chamber. In addition, a liquid is dispensed in a closed chamber that includes at least one rapid transfer port in at least one wall of the closed chamber.

Provided is a safety cabinet that reduces a temperature change between a storage environment temperature and a temperature in the safety cabinet to reduce damage to cultured microorganisms, cultured cells, or the like. The safety cabinet that includes a front panel and an operation opening in front of an operation space and an operation stage below the operation space and supplies purified air into the operation space from above, in which the operation stage is provided with a temperature-regulatable portion of which a temperature is regulatable.

The present invention provides a work hood that allows for free rotation in a work box to provide a wide work area and easy decontamination of a sealing portion present at the boundary between the work hood and the work box. A rotation support for rotatably supporting the entire half suit is provided. The rotation support includes a base portion, a rotating portion, a bearing portion, a sealing member, and a communication hole. The base portion is airtightly and annularly provided around an opening, and the rotating portion is provided around the base portion through the bearing portion, with a hem portion of the half suit being fixed to the rotating portion. The sealing member is annularly provided in an annular space formed by the base portion and the rotating portion so as to separate the work box and the external environment. The communication hole is provided so as to lead to the external environmental side from the annular small space side formed by the sealing member together with the base portion, the rotating portion, and the bearing portion, and is connected to a supply means for supplying a decontamination gas and the like to the inside of the small space and to a suction means for sucking clean air and the like from the inside of the small space.

The present invention provides a work hood that allows for free rotation in a work box to provide a wide work area and easy decontamination of a sealing portion present at the boundary between the work hood and the work box. A rotation support for rotatably supporting the entire half suit is provided. The rotation support includes a base portion, a rotating portion, a bearing portion, a sealing member, and a communication hole. The base portion is airtightly and annularly provided around an opening, and the rotating portion is provided around the base portion through the bearing portion, with a hem portion of the half suit being fixed to the rotating portion. The sealing member is annularly provided in an annular space formed by the base portion and the rotating portion so as to separate the work box and the external environment. The communication hole is provided so as to lead to the external environmental side from the annular small space side formed by the sealing member together with the base portion, the rotating portion, and the bearing portion, and is connected to a supply means for supplying a decontamination gas and the like to the inside of the small space and to a suction means for sucking clean air and the like from the inside of the small space.

An object of the present invention is to provide a safety cabinet capable of controlling the purity during usage. In order to realize the object, the safety cabinet is configured to include an operation space including an operation stage; a front panel formed in a front surface of the operation space; an operation opening provided in a lower portion of the front panel; a suction port that is provided in the vicinity of the operation opening on a front side of the operation stage to lead downward; an air circulation path through which air suctioned from the suction port flows along a lower portion, a back surface, and an upper portion of the operation space; a particle counter; an operation space-air intake port provided in the operation space to take air into the particle counter; and an introduction pipe that introduces the air into the particle counter from the operation space-air intake port.

A biosafety cabinet includes an operation, an operation space, a front plate, an operation opening, a vibration damping mechanism and an exhaust. The vibration damping mechanism is a mechanism that floats an operation object, which is disposed in the operation space, from the operation stage. The vibration damping mechanism includes a table which supports the operation object, and a magnet which is disposed in the operation stage. The vibration damping mechanism is a mechanism that floats the operation object from the operation stage by using a magnetic force.