A pneumatically driven fluid pump apparatus is disclosed which includes a pump casing having an inner wall, a pump cap secured at a first end of the pump casing, and a liquid discharge tube in communication with the pump cap and extending at least partially within an interior area of the pump casing toward a second end of the pump casing, and where fluid is admitted into the pump casing at the second end. The pump cap has an airflow inlet for receiving a pressurized airflow from an external pressurized air source, which helps displace liquid collecting within the pump casing upwardly through the liquid discharge tube. A flow channeling subsystem is in communication with the airflow inlet and directs the pressurized airflow towards the inner wall of the pump casing to create a swirling airflow within the pump casing that extends along at least portions of the inner wall. The swirling airflow entrains fluid within the pump causing the fluid to move in a circumferential swirling fashion toward the second end of the pump casing, which helps to clean the inner wall of the pump casing.

The system includes a robot multi-jet system having a spray section, a drier section, and a catalyst section. The drier section includes a warm air blower, the catalyst section includes a photocatalyst tank, and the spray section includes a plurality of jet extensions. A first jet extension connected to the photocatalyst tank sprays a uniform layer of a photocatalyst through a first set of jets, and a second jet extension that is mechanically connected to the drier section and in fluid communication with the warm air blower is configured to spray a gas onto an inner surface of the glass tube with a second set of jets. Both the drier section and the catalyst section are mounted on wheels to move the system on the inner surface of the glass tube. A motor is electrically connected to a battery mounted within the robot and mounted to the wheels.

A particle removed from a substrate is suppressed from adhering to the substrate again. A substrate cleaning apparatus includes a substrate holder configured to hold the substrate; a gas nozzle configured to jet a cleaning gas to the substrate on the substrate holder; and a nozzle cover provided to surround the gas nozzle. The cleaning gas is jetted to a decompression chamber of the nozzle cover from the gas nozzle, and a gas cluster configured to remove the particle on the substrate in the decompression chamber is generated. A gas for a gas curtain is jetted from an end portion of the nozzle cover toward the substrate, and the gas curtain is formed between the substrate and the end portion of the nozzle cover.

A steam injection nozzle for controlling the flowrate of steam injected into a hydrocarbon containing reservoir comprises a passage extending between an inlet and an outlet, wherein the passage comprises a first, pressure dissipating section and a second, pressure recovery section.

A substrate processing method includes performing a developing processing on a substrate. The developing processing includes supplying a developing liquid on a surface of the substrate to form a liquid film of the developing liquid on the surface of the substrate; maintaining the liquid film on the surface such that development progresses; and performing, during the maintaining of the liquid film, a first processing of supplying a gas to an inner region located at an inner side than a peripheral region on the surface of the substrate and a second processing of supplying an adjusting liquid configured to suppress progress of the development on the peripheral region to adjust a degree of the development between the peripheral region and the inner region. The second processing is started after a start time of the first processing, and the second processing is ended after an end time of the first processing.

Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.

A pneumatically driven fluid pump apparatus is disclosed which includes a pump casing having an inner wall, a pump cap secured at a first end of the pump casing, and a liquid discharge tube in communication with the pump cap and extending at least partially within an interior area of the pump casing toward a second end of the pump casing, and where fluid is admitted into the pump casing at the second end. The pressurized airflow causes a swirling flow of the liquid within the interior area of the pump casing that helps to clean the interior area of the pump casing by liquid scrubbing action to dislodge debris adhered within the interior area of the pump casing and remove the debris up through the liquid discharge tube and out from the fluid pump apparatus during a liquid eject cycle

The present invention provides a clothing treatment apparatus (10) comprising: a heating unit (100) for heating a fluid; a movable spray unit (200) which is installed to be movable in left and right direction, and sprays the heated fluid; a flow path member (300) which is connected to the heating unit (100) and the movable spray unit (200) and supplies the heated fluid to the movable spray unit (200); and a driving unit (400) for moving the movable spray unit (200) in the left and right direction. The present invention also provides the clothing treatment apparatus (10) including the flow path member (300) bent at an angle of a specific range per unit member (310) or unfolded. The present invention also provides the clothing treatment apparatus (10) including a body portion spreading unit (1500) for spreading a body portion of clothing. The body portion spreading unit (1500) comprises: a body portion spreading arm (1510) of which at least a portion is arranged inside the body portion and which rotationally moves about an end portion as a rotary shaft; and a first driving unit (1520) for rotationally moving the body portion spreading arm (1510). Therefore, clothing treatment performance such as crease removal or the like can be improved, and the time taken to treat clothing can be reduced. The spray pressure of the movable spray unit (200) can be maintained constant, an installation space for the flow path member (300) can be minimized, and generation of condensed water in the flow path member (300) can be prevented.

Gas distribution faceplates are disclosed that feature clusters of gas passages extending from inlet gas ports on a first side thereof to outlet gas ports on a second side thereof. The gas passages may each have at least a portion thereof that is at an oblique angle with respect to a nominal centerline of the gas distribution faceplate, thereby allowing the inlet gas ports for a given cluster of gas passages to be tightly grouped together and the outlet gas ports for that cluster of gas passages to be more widely spaced apart. This allows for a large numbers of gas passages to be used, thereby allowing for a reduction of flow rate through each gas passage and an attendant decrease in gas passage erosion rate, while reducing or eliminating the effects of overlapping wear zones around each outlet gas port.

The present disclosure relates to a sensor cleaning device (1) for cleaning an external vehicle sensor device from above, the sensor cleaning device comprising, a liquid inlet (10) for receiving pressurized liquid, a first and a second liquid outlet (11, 12) for emitting pressurized liquid which is received from the liquid inlet (10), a chamber (13) for pressurized liquid fluidly connecting the liquid inlet (10) and the first and second liquid outlets (11, 12), wherein each one of the first and second liquid outlets is having a width and a length, wherein the length extends in a length direction (L1, L2) and the width extends in a width direction (w1, w2), wherein the length direction is perpendicular to the width direction, and wherein the first and second liquid outlets (11, 12) are configured so that pressurized liquid is emitted transversely through a sectional plane defined by the width direction and the length direction, wherein, the length is greater than the width for each first and second liquid outlet so that a first and second line-shaped liquid outlet (11, 12) is formed, and the first and second line-shaped liquid outlets (11, 12) are further configured so that emitted pressurized liquid therefrom during use impinge each other, thereby forming a resulting sheet of liquid (LS).