The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing a treating space; and a fluid supply unit supplying a treating fluid to the chamber, and wherein the fluid supply unit includes: a supply tank storing the treating fluid; a supply line connecting the supply tank and the chamber; and a plurality of valves installed at the supply line, and wherein any one valve among the plurality of valves is provided as a safety valve, and wherein the safety valve is opened after confirming that the chamber has been switched to a closed state when supplying the treating fluid from a tank to the chamber.

A dispensing apparatus includes: a storage unit including a first flow path, a second flow path, and a third flow path; and a movable member including a first part, and a second part. The first part and the second part are formed in a long shape, and the second part is formed such that a cross-section crossing the longitudinal direction is smaller than that of the first part.

There is provided a substrate processing apparatus for performing film formation by supplying a processing gas to a substrate, including: a rotary table provided in a processing container; a mounting stand provided to mount the substrate and configured to be revolved by rotating the rotary table; a processing gas supply part configured to supply a processing gas to a region through which the mounting stand passes by the rotation of the rotary table; a rotation shaft rotatably provided in a portion rotating together with the rotary table and configured to support the mounting stand; a driven gear provided on the rotation shaft; a driving gear provided along an entire circumference of a revolution trajectory of the driven gear to face the revolution trajectory of the driven gear and configured to constitute a magnetic gear mechanism with the driven gear; and a rotating mechanism configured to rotate the driving gear.

A bulk adhesive transfer system for transferring adhesive particulate to a melter includes a bulk supply and a transfer device, which may define a hopper of the melter, a mobile bin, and/or a buffer unit. The transfer device is configured to receive unmelted adhesive particulate from the bulk supply and then be selectively docked with the melter to transfer the adhesive particulate to the melter. The bulk adhesive transfer system may also include a knife gate valve device, which includes a plurality of ports that sequentially open and close to control flow of the adhesive particulate towards the melter. The bulk adhesive transfer system simplifies refilling operations for a melter while enabling continuous operation of the melter, even when the transfer device is undocked for removal from the melter.

An apparatus includes a hopper configured to receive a plurality of solder microspheres, and a moveable singulation device positioned proximate to and below the hopper. The moveable singulation device is configured to receive the plurality of solder microspheres from the hopper as the plurality of microspheres exit the hopper. The movable singulation device includes a plurality of holes, with each of the plurality of holes configured to receive a single solder microsphere of the plurality of solder micro spheres. The apparatus further includes a piezoelectric vibration device configured to provide ultrasonic vibrations to the singulation device, thereby preventing agglomeration of the plurality of solder microspheres in the hopper.

A reciprocating glue dispenser dispensing switch includes a switching device main body, a needle holding base, a sliding wear-resistant plate, and a driving device. The switching device main body is equipped with a double liquid inlet, the needle holding base is equipped with a mixed glue outlet, the sliding wear-resistant plate is installed between the switching device main body and the needle holding base, and the sliding wear-resistant plate is equipped with a sliding wear-resistant plate opening. The driving device is utilized to move the sliding wear-resistant plate. A mixed double-liquid glue passes through the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet to dispense a mixed double-liquid glue while the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet are overlapped. In addition, a double liquid dispensing equipment is also disclosed herein.

A liquid delivery system includes a reciprocating drive and a liquid cylinder comprising a liquid piston, operably driven by the reciprocating drive, to pump a liquid along a flow path to a liquid applicator. The liquid delivery system includes a coupler configured to couple the liquid piston to the reciprocating drive. The coupler includes a plurality of collar elements and a biasing member configured to apply a biasing force on the plurality of collar elements to retain the collar elements in a position that forms a collar that couples the liquid piston to the reciprocating drive.

Problem: To provide a liquid-material discharge device that enables easier correction of a changed discharge amount during discharge operation than conventional techniques. Solution: A liquid-material discharge device according to the present invention, which includes a discharging member having a rod-shaped body, a liquid chamber wider than the discharging member, in which a tip portion of the discharging member is disposed, a discharge port communicating with the liquid chamber, a liquid feed path that makes the liquid chamber communicate with a liquid-material reservoir, and a driving device configured to drive the discharging member, includes a discharge amount adjustment member positioned at the liquid feed path, and a member position adjustment mechanism configured to shift a position of the discharge amount adjustment member within the liquid feed path, the discharge amount adjustment member being kept from interrupting communication between the liquid chamber and the liquid-material reservoir.

A substrate processing apparatus according to an embodiment includes a transport block and a plurality of processing blocks. In the transport block, a transport device for transporting a substrate is disposed. The plurality of processing blocks are disposed adjacent to the transport block and process the substrate transported by the transport device. Each processing block includes one liquid processing unit and one drying unit. The liquid processing unit performs a liquid film forming processing so as to form a liquid film on the top surface of the substrate. The drying unit performs a supercritical drying processing in which the substrate is dried by bringing the substrate into contact with the processing fluid in a supercritical state. The liquid processing unit and the drying unit included in the same processing block are disposed on the same side with respect to the movement direction of the transport device of the transport block.

A reciprocating glue dispenser dispensing switch includes a switching device main body, a needle holding base, a sliding wear-resistant plate, and a driving device. The switching device main body is equipped with a double liquid inlet, the needle holding base is equipped with a mixed glue outlet, the sliding wear-resistant plate is installed between the switching device main body and the needle holding base, and the sliding wear-resistant plate is equipped with a sliding wear-resistant plate opening. The driving device is utilized to move the sliding wear-resistant plate. A mixed double-liquid glue passes through the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet to dispense a mixed double-liquid glue while the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet are overlapped. In addition, a double liquid dispensing equipment is also disclosed herein.