A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.

Planar phased ultrasound transducer including a first layer including a sheet of piezoelectric material, a piezo frame surrounding an outer perimeter of the sheet of piezoelectric material, and an epoxy material placed between the piezo frame and the sheet of piezoelectric material. The transducer includes a flex frame secured to a back side of the first layer.

A biodegradable and biocompatible piezoelectric nanofiber platform for medical implant applications, including a highly sensitive, wireless, biodegradable force sensor for the monitoring of physiological pressures, and a biodegradable ultrasonic transducer for the delivery of therapeutics or pharmaceuticals across the blood-brain barrier.

A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer (IDT) having first interdigitated electrodes is disposed at different locations along the horizontal axis and on the first side of the piezoelectric thin-film. Each opposing pair of the first interdigitated electrodes is to selectively transduce a particular frequency range of an input electrical signal that varies in frequency over time into an acoustic wave of a laterally vibrating mode based on a pitch between electrodes of the opposing pair. An output IDT that includes second interdigitated electrodes is disposed at different locations along the horizontal axis and on the second side of the piezoelectric thin-film. Each opposing pair of the second interdigitated electrodes is to convert the acoustic wave transduced by the respective opposing pair of the first interdigitated electrodes into a compressed pulse.

An ultrasound probe including: a circuit substrate (23) having a recess in a first region on the lower surface side; a buffer layer (400) composed of an insulating material on a second region different from the first region of circuit substrate (23); and an element array layer (22) including a first piezoelectric element (100) for ultrasound transmission formed in the first region of the circuit substrate (23) without the buffer layer (400), and a second piezoelectric element (200) for ultrasound reception formed in the second region of the circuit substrate (23) on the buffer layer (400). The first piezoelectric element (100) vibrates in a flexural vibration mode on the circuit substrate (23), and the second piezoelectric element (200) vibrates in a thickness vibration mode on the circuit substrate (23).

The present invention relates to a method of preparing a shape-reconfigurable micropatterned polymer haptic material using an electric field technique, and more particularly, to a method of preparing a shape-reconfigurable micro-patterned polymer thin film and a haptic material by controlling the orientation of a liquid-crystalline organic polymer using an electric field control system and inducing the generation of defect structures having a regular microstructure array in a polymer film.

An ultrasonic transducer device comprises a piezoelectric micromachined ultrasonic transducer (PMUT), a transmitter with first and second differential outputs, and a controller. The PMUT includes a membrane layer. A bottom electrode layer, comprising a first bottom electrode and a second bottom electrode, is disposed above the membrane layer. The piezoelectric layer is disposed above the bottom electrode layer. The top electrode layer is disposed above the piezoelectric layer and comprises a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode. The controller, responsive to the PMUT being placed in a transmit mode, is configured to couple the first and second segments of the bottom electrode layer with ground, couple the first output of the transmitter with the segments of the segmented center electrode, and couple the second output with the segments of the segmented outer electrode.

A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.

An ultrasonic induction circuit is provided, a first electrode of an ultrasonic sensor is electrically connected with a first terminal of the ultrasonic sensing circuit, a second electrode is electrically connected with a second terminal of a first potential supply sub-circuit, and the first terminal of the first potential supply sub-circuit is electrically connected with a first potential supply end. A gate of M1 is electrically connected with the second electrode and the second terminal of the compensation sub-circuit. The second electrode is electrically connected with the first terminal of the compensation sub-circuit. The first electrode is coupled to the second potential supply end. The first terminal of the signal output sub-circuit is electrically connected to the second electrode of the first transistor, and the second terminal is electrically connected to the second terminal of the ultrasonic induction circuit.

Planar phased ultrasound transducer including a first layer including a sheet of piezoelectric material, a piezo frame surrounding an outer perimeter of the sheet of piezoelectric material, and an epoxy material placed between the piezo frame and the sheet of piezoelectric material. The transducer includes a flex frame secured to a back side of the first layer.