To provide a probe including a TGC circuit therein. The probe includes a plurality of receive circuits. Each receive circuit includes: an ultrasound transducer; a transmit/receive switch; a variable attenuator; a first capacitor; and an amplifier. The ultrasound transducer converts the receive signal into a ground level electric signal and outputs the ground level electric signal as a first output signal. The transmit/receive switch is connected to a first signal line, and switches depending on whether to output the first output signal output from the ultrasound transducer to the first signal line. The variable attenuator includes a control terminal and two terminals, and changes a resistance value between the two terminals other than the control terminal based on a control signal input to the control terminal. The amplifier has an input terminal connected to the first capacitor and includes at least an amplifier circuit configured to amplify an electric signal of the first signal line and output the amplified electric signal to a second signal line. In the variable attenuator, one of the two terminals other than the control terminal is connected to the first signal line, and the other terminal is connected to the ground via a second capacitor different from the first capacitor.

A vibration control device of a plate-like member 11 includes: a plurality of piezoelectric element actuators 14; at least one piezoelectric element sensor 15; and a control circuit 17 that performs feedback control of operation of the piezoelectric element actuators 14 based on an output voltage of the piezoelectric element sensor 15 so as to suppress vibration of the plate-like member 11. A layout of the piezoelectric element sensor 15 and the piezoelectric element actuators 14 is set such that anti-resonance occurs in an output voltage of the piezoelectric element sensor 15 in a range where the vibration frequency of the plate-like member 11 is equal to or less than a predetermined value. Therefore, generation of noise can be prevented at the frequency. As a result, a gain can be increased at a control target frequency. Therefore, vibration can be suppressed, and noise can be reduced.

A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

A vibration generation device includes: a base configured to transmit vibration to an object; a pendulum supported by the base swingably around a rotation axis; and a driving unit including a magnet, and a coil disposed to face the magnet in a non-contact manner, and configured to swing the pendulum. One member of the magnet and the coil is provided at a position on the pendulum away from the rotation axis. The base includes a support portion supporting the pendulum swingably around the rotation axis. A part of an extension surface of a facing surface of the support portion facing the pendulum is included in a swingable range of the pendulum. The support portion is provided outside the swingable range of the pendulum when viewed along the rotation axis.

Embodiments include a primary short circuit (PSC) coupled to a primary side of a transformer and a dampening element, coupled to a transducer coupled to a secondary side of the transformer, configured to dampen a received signal during a portion of a reverberation period. The PSC and the dampening element may be activated substantially simultaneously. Activation of the PSC circuit mitigates a parallel resonance otherwise arising, in part, in the transducer, but, increases the received signal by a DC shift voltage. The dampening element dampens the DC shift voltage. The received signal may be dampened prior to amplification of the received signal by an amplifier. The dampening facilitates earlier and more precise measurement, during the reverberation period, of at least one operating characteristic for the PAS sensor. Another embodiment prevents the DC shift voltage by selectively activating the PSC within a determined time of a zero-crossing of a given signal.

An ultrasonic apparatus includes an ultrasonic transducer, a transmitting circuit, a receiving circuit, a Q-factor measuring circuit, and a frequency measuring circuit. The ultrasonic transducer is a three-terminal ultrasonic transducer that includes a transmitting electrode, a receiving electrode, and a common electrode. The transmitting circuit outputs a driving signal to the transmitting electrode to cause the ultrasonic transducer to transmit ultrasonic waves. The receiving circuit receives a receive signal from the receiving electrode. The frequency measuring circuit measures a resonant frequency of the ultrasonic transducer from a reverberation signal in the receive signal. The Q-factor measuring circuit measures a Q factor of the ultrasonic transducer from the reverberation signal in the receive signal.

Embodiments include a primary short circuit (PSC) coupled to a primary side of a transformer and a dampening element, coupled to a transducer coupled to a secondary side of the transformer, configured to dampen a received signal during a portion of a reverberation period. The PSC and the dampening element may be activated substantially simultaneously. Activation of the PSC circuit mitigates a parallel resonance otherwise arising, in part, in the transducer, but, increases the received signal by a DC shift voltage. The dampening element dampens the DC shift voltage. The received signal may be dampened prior to amplification of the received signal by an amplifier. The dampening facilitates earlier and more precise measurement, during the reverberation period, of at least one operating characteristic for the PAS sensor. Another embodiment prevents the DC shift voltage by selectively activating the PSC within a determined time of a zero-crossing of a given signal.

The present invention relates to a haptic feedback system and, specifically, to a device and method for controlling an actuator for haptic feedback, the method comprising: an actuator resonance frequency correction driving step of driving an actuator by repeatedly generating and outputting a drive signal including a driving time interval in which driving voltage is applied to the actuator and a guard time interval in which a back electromotive force (BEMF) signal of the actuator is detected, while correcting the length of the driving time interval according to detection time of a zero cross point of the BEMF signal detected within the guard time interval; and an actuator braking step of outputting at least one brake signal in synchronization with a zero cross point of the BEMF signal detected within the guard time interval, in order to remove residual vibration of the actuator.

An ultrasonic sensor is provided in which, after output of an excitation signal from a transmission circuit to a drive electrode is stopped, when a suppression control signal subjected to signal amplification by a band variable calculation amplifier is supplied from a reverberant vibration suppression circuit to the drive electrode, reverberant vibration of a piezoelectric body is reduced or prevented in a reverberation suppression time period. In a reception time period after output of the suppression control signal to the drive electrode is stopped, a signal amplification frequency band of the band variable calculation amplifier is varied by a control circuit, and a signal amplification factor of the band variable calculation amplifier in a frequency band of high-frequency noise that occurs within the band variable calculation amplifier is reduced.