In a deterministic setting for finishing the support surface of a chuck such as a wafer chuck, the treatment tool may have a contacting surface shaped as a ring, annulus, or toroid, or at least such will be the form of contact when the treatment tool is brought into contact with a flat surface. The treatment tool may have about the same hardness as the work piece (e.g., the wafer chuck) that is being finished. In one embodiment, the treatment tool, or at least the flat contacting surface, is made from silicon carbide (SiC), or contains SiC, for example, in the form of a composite material such as reaction-bonded SiC.

A rotating element operating device includes a device body having a perforation, an operating member having a limiting end and an engaging end and being received in or extended out of the device body along the perforation, and a magnetic member set at the device body or the operating member. When the operating member is received in the device body, the magnetic force of the magnetic member pulls the operating member toward the bottom end of the device body so that the engaging end is set at the top end, and the operating member is secured to the device body by the magnetic force of the magnetic member. When the operating member is pulled out of the device body, the limiting end is positioned inside the perforation so that the operating member is prohibited from leaving the device body.

An adapter for holding a tool in a collet chuck, the adapter containing an external taper to accommodate the adapter in the collet chuck. The adapter has a thread for fastening of the tool, and several shape-mated elements are arranged on an outer surface of the external taper for non-rotational holding of the receptacle body during fastening of the tool.

An adapter for holding a tool in a collet chuck, the adapter containing an external taper to accommodate the adapter in the collet chuck. The adapter has a thread for fastening of the tool, and several shape-mated elements are arranged on an outer surface of the external taper for non-rotational holding of the receptacle body during fastening of the tool.

In a deterministic setting for finishing the support surface of a chuck such as a wafer chuck, the treatment tool may have a contacting surface shaped as a ring, annulus, or toroid, or at least such will be the form of contact when the treatment tool is brought into contact with a flat surface. The treatment tool may have about the same hardness as the work piece (e.g., the wafer chuck) that is being finished. In one embodiment, the treatment tool, or at least the flat contacting surface, is made from silicon carbide (SiC), or contains SiC, for example, in the form of a composite material such as reaction-bonded SiC.

The drill extends along an axis of rotation and has a radius (r) as well as a plurality of main cutting surfaces, which each extend in the direction of the axis of rotation from a cutting corner situated on the radius (r), wherein a respective clearance surface adjoins the main cutting surfaces in a circumferential direction (U), forms a clearance angle (, 1, 2) with respect to a horizontal plane (H) oriented perpendicular to an axis of rotation, and transitions along its further progression into a flute. When viewed in a vertical section parallel to the axis of rotation, an outer section of the clearance surface in the region of the cutting corner has a curved progression, and a near-center section in the region of the axis of rotation has a linear progression. A low frictional load on the front face of the drill is achieved as a result.