An adaptive precision chuck for a precision/ultraprecision machining system is described. The chuck (200) defining a mount for receiving a workpiece (300) wherein, when in use, the centre of the mount is configured to be substantially concentric with an axis of rotation (214) of the machining system, the chuck (200) further including jaws (201) about the mount and a plurality of compliant flexures (203-206) configured, upon application of rotational forces by the machining system to the chuck about the axis of rotation (214), to engage the jaws (210) upon a workpiece (300) in the mount.

In a component for connecting a shaft to a clamping holder that can receive a rotor, the clamping holder is able to be inserted into a cup-shaped housing and is able to be fixed there by fasteners. On the housing base of the housing is a connector for connecting the housing to the shaft in a torque-proof manner. The fasteners are arranged with their base surface on the outer lateral surface of the housing, and can be brought into engagement with the clamping holder by bores present in the housing. The fasteners have at least one recess in the base surface, such that they rest with their base surface on the outer lateral surface only in some regions.

In a chuck (1) by means of which workpieces (2) are supported individually and centered for machining by a machine tool, the chuck comprising: a chuck body (3), four clamping jaws (5, 6, 7, 8) which are radially movably mounted on the chuck body (3) and are each arranged in pairs in an X or Y plane, and a drive piston (9) which is mounted in the chuck body (3) so as to be axially movable and which is drivably coupled to the four clamping jaws (5, 6, 7, 8) via a helical surface or helical gearing (10) worked on the drive piston (9) and the respective clamping jaws (5, 6, 7, 8), and feeds these synchronously in the direction of the workpiece (2) to be clamped or moves them away from the latter, a position-accurate, i.e. centered alignment for a large number of differently designed workpieces (2) can be achieved with a high repetition accuracy for subsequent clamping operations. This is achieved in that a rocker (11) is provided between the drive piston (9) and two adjacent clamping jaws (5, 7 or 6, 8), the rocker (11) has a center of symmetry (12) into which a bolt (13) which is pivotably mounted on the drive piston (9) and about which the rocker (11) can be pivoted as a function of the contact of the clamping jaws (5, 6 or 7, 8) on the workpiece (2) is inserted, and a corresponding transmission pin (14, 15) is provided laterally adjacent to the bolt (13) and coupled drivably to the rocker (11), the respective clamping jaw (5, 6, 7, 10 or 8) being mounted and supported at the end of the transmission pin opposite the rocker (11).

An adaptive precision chuck for a precision/ultraprecision machining system is described. The chuck (200) defining a mount for receiving a workpiece (300) wherein, when in use, the centre of the mount is configured to be substantially concentric with an axis of rotation (214) of the machining system, the chuck (200) further including jaws (210) about the mount and a plurality of compliant flexures (203-206) configured, upon application of rotational forces by the machining system to the chuck about the axis of rotation (214), to engage the jaws (210) upon a workpiece (300) in the mount.

In a chuck (1) by means of which workpieces (2) are supported individually and centered for machining by a machine tool, the chuck comprising: a chuck body (3), four clamping jaws (5, 6, 7, 8) which are radially movably mounted on the chuck body (3) and are each arranged in pairs in an X or Y plane, and a drive piston (9) which is mounted in the chuck body (3) so as to be axially movable and which is drivably coupled to the four clamping jaws (5, 6, 7, 8) via a helical surface or helical gearing (10) worked on the drive piston (9) and the respective clamping jaws (5, 6, 7, 8), and feeds these synchronously in the direction of the workpiece (2) to be clamped or moves them away from the latter, a position-accurate, i.e. centered alignment for a large number of differently designed workpieces (2) can be achieved with a high repetition accuracy for subsequent clamping operations.

This is achieved in that a rocker (11) is provided between the drive piston (9) and two adjacent clamping jaws (5, 7 or 6, 8), the rocker (11) has a center of symmetry (12) into which a bolt (13) which is pivotably mounted on the drive piston (9) and about which the rocker (11) can be pivoted as a function of the contact of the clamping jaws (5, 6 or 7, 8) on the workpiece (2) is inserted, and a corresponding transmission pin (14, 15) is provided laterally adjacent to the bolt (13) and coupled drivably to the rocker (11), the respective clamping jaw (5, 6, 7, 10 or 8) being mounted and supported at the end of the transmission pin opposite the rocker (11).

A tool holding system for a rotary power tool is configured to clamp around a working tool when the working tool is inserted in the tool holding system. The tool holding system includes a sleeve having a frustroconical inner surface portion, a collet having frustoconical outer surface portion complementary to the inner surface portion, a spring mount operably connected to a motor for rotation by the motor, and a spring. The spring includes a first end portion operably connected to the collet to bias the collet toward a first position whereat the outer surface portion engages the inner surface portion, and a second end portion rotationally fixed with respect to the spring mount.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

A tool holding system for a rotary power tool is configured to clamp around a working tool when the working tool is inserted in the tool holding system. The tool holding system includes a sleeve having a frustroconical inner surface portion, a collet having frustoconical outer surface portion complementary to the inner surface portion, a spring mount operably connected to a motor for rotation by the motor, and a spring. The spring includes a first end portion operably connected to the collet to bias the collet toward a first position whereat the outer surface portion engages the inner surface portion, and a second end portion rotationally fixed with respect to the spring mount.