A control method of controlling a chuck device in a drive system for driving the chuck device, comprising opening or closing fingers by opening a switching valve at a first degree of valve opening to supply the fluid to a first cylinder chamber of the chuck device and to discharge the fluid from a second cylinder chamber of the chuck device so that a piston moves in one direction, and stopping the fingers in an intermediate position between a fully open position and a fully closed position by opening the switching valve at a second degree of valve opening to stop supplying the fluid to the first cylinder chamber and to stop discharging the fluid from the second cylinder chamber when the axial position of the piston reaches a target position set in advance while the fingers are being opened or closed.

A drive system for driving a chuck device includes a controller and a switching valve, which is a 5-port servo valve, switching the state of supply of compressed air to the chuck device based on a valve command signal from the controller. During switching of first and second fingers from a closed position to an open position, when the axial position of a piston reaches a switch point, which is a predetermined distance short of a target position corresponding to a freely selected intermediate position of the first and second fingers, the switching valve is opened at a third opening for a predetermined period and then switched to be opened at a fourth opening so that supply and discharge of compressed air are stopped. As a result, the first and second fingers stop in the intermediate position.

A drive system for driving a chuck device including a piston and a pair of fingers to be opened and closed according to the displacement of the piston, includes a controller, a detection sensor to detect an axial position of the piston, and three-port servo valves to switch a state of supply of the fluid to the chuck device. A degree of valve opening is controllable based on a control signal input from the controller, and an amount of displacement of the piston and an amount of opening and closing of the fingers are controlled by changing the degree of valve opening. One of the 3-port servo valves is connected to a first cylinder chamber of the chuck device, and another of the 3-port servo valves is connected to a second cylinder chamber of the chuck device.

A chuck apparatus includes a pair of grip members driven by a piston via a pair of levers, and the levers are rotatably supported by a body via lever shafts. A lever shaft protrudes from the attachment surface of the body to the transport device, and positioning with respect to the transport device is performed by using the protruding portion.

An air chuck includes: a finger support part including a pair of fingers and a pair of lock shafts; a chuck main body part including an operation mechanism operable to open and close the fingers; and linking mechanisms that detachably link the finger support part to the chuck main body part. Each of the linking mechanisms causes the corresponding lock shaft to shift to a non-lock position so as to render the pair of fingers capable of being opened and closed when the finger support part is linked to the chuck main body part. Each of the linking mechanisms causes the corresponding lock shaft to shift to a lock position and locks the pair of fingers so as to render the pair of fingers incapable of being opened and closed when the finger support part is detached from the chuck main body part.

A chuck mechanism operates a piston in a cylinder tube by using action of compressed air and opens and closes, by using a rod coupled to the piston, a pair of fingers, thereby gripping work W. The locking mechanism locks the fingers at work grip positions. The locking mechanism includes a first locking member, a second locking member, and a drive device. The first locking member is displaced when the pair of fingers are opened or closed. The second locking member retains the first locking member so as to lock the fingers at the work grip positions. The drive device relatively displaces the first locking member and the second locking member to locking positions and non-locking positions.

A drive system for driving a chuck device includes a controller and a switching valve, which is a 5-port servo valve, switching the state of supply of compressed air to the chuck device based on a valve command signal from the controller. During switching of first and second fingers from a closed position to an open position, when the axial position of a piston reaches a switch point, which is a predetermined distance short of a target position corresponding to a freely selected intermediate position of the first and second fingers, the switching valve is opened at a third opening for a predetermined period and then switched to be opened at a fourth opening so that supply and discharge of compressed air are stopped. As a result, the first and second fingers stop in the intermediate position.

A chuck mechanism operates a piston in a cylinder tube by using action of compressed air and opens and closes, by using a rod coupled to the piston, a pair of fingers, thereby gripping work W. The locking mechanism locks the fingers at work grip positions. The locking mechanism includes a first locking member, a second locking member, and a drive device. The first locking member is displaced when the pair of fingers are opened or closed. The second locking member retains the first locking member so as to lock the fingers at the work grip positions. The drive device relatively displaces the first locking member and the second locking member to locking positions and non-locking positions.

A chuck apparatus grips a workpiece by a gripping section having a pair of chuck members. The chuck apparatus is equipped with a cover member and pressing members. The cover member includes insertion holes through which fingers of the chuck members are inserted, and seal members that surround the insertion holes and abut against the fingers. The cover member is attached to a body so as to cover base portions of the chuck members, and is elastically deformable so as to follow displacement of the chuck members. The pressing members press the seal members against the fingers.

An air chuck includes: a finger support part including a pair of fingers and a pair of lock shafts; a chuck main body part including an operation mechanism operable to open and close the fingers; and linking mechanisms that detachably link the finger support part to the chuck main body part. Each of the linking mechanisms causes the corresponding lock shaft to shift to a non-lock position so as to render the pair of fingers capable of being opened and closed when the finger support part is linked to the chuck main body part. Each of the linking mechanisms causes the corresponding lock shaft to shift to a lock position and locks the pair of fingers so as to render the pair of fingers incapable of being opened and closed when the finger support part is detached from the chuck main body part.