A method and an apparatus for collecting powder samples in real-time in powder bed fusion additive manufacturing may involves an ingester system for in-process collection and characterizations of powder samples. The collection may be performed periodically and uses the results of characterizations for adjustments in the powder bed fusion process. The ingester system of the present disclosure is capable of packaging powder samples collected in real-time into storage containers serving a multitude purposes of audit, process adjustments or actions.

A build system is provided with: a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation system; and a change apparatus that is configured to change a relative position between the energy beam and the target object, wherein the build system differentiates a condition of the build process that is performed at a first area of the target object and a condition of the build process that is performed at a second area of the target object.

A semiconductor fabrication apparatus includes a source chamber being operable to generate charged particles; and a processing chamber integrated with the source chamber and configured to receive the charged particles from the source chamber. The processing chamber includes a wafer stage being operable to secure and move a wafer, and a laser-charged particles interaction module that further includes a laser source to generate a first laser beam; a beam splitter configured to split the first laser beam into a second laser beam and a third laser beam; and a mirror configured to reflect the third laser beam such that the third laser beam is redirected to intersect with the second laser beam to form a laser interference pattern at a path of the charged particles, and wherein the laser interference pattern modulates the charged particles by in a micron-zone mode for processing the wafer using the modulated charged particles.

A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.

A foreign substance capturing apparatus according to an embodiment of the present invention may comprise: a capturing body unit having an inlet port for introducing the air including magnetic foreign substances and an outlet port for discharging the air from which the magnetic foreign substances have been removed; and a magnetic isolation unit connected to the capturing body unit, including a magnetic member for isolating, by an attractive force, the magnetic foreign substances from the air flowing in the capturing body unit, and provided with a non-magnetic member surrounding the magnetic member.

Methods and systems for producing feedstock powders, suitable for use in laser-based additive manufacturing, use laser ablation to vaporize a source material, which may be in bulk solid or solid coarse grain form. The source material is vaporized by a laser (or other focused energy source) in a vaporization chamber that is temperature controlled to provide a vertical thermal gradient. The vertical thermal gradient may be controlled to, in turn, control the nucleation, coagulation, and agglomeration of the vaporized molecules, enabling formation of microparticles that may then be used as feedstock powders in laser-based additive manufacturing. The produced feedstock powder particles may be of uniform composition, of uniform shape (e.g., substantially spherical), and of uniform phase or homogeneously-mixed phases.

Provided is a technique for fabricating a powder material bedded in advance using a DED nozzle. According to one embodiment, there is provided an AM apparatus for manufacturing a fabricated object. The AM apparatus includes a DED nozzle. The DED nozzle includes: a DED nozzle main body; a laser port disposed at a distal end of the DED nozzle main body and for emitting a laser beam, and a laser passage configured to communicate with the laser port and for allowing the laser beam to pass through the DED nozzle main body; and a powder port disposed at the distal end of the DED nozzle main body and for emitting a powder material, and a powder passage configured to communicate with the powder port and for allowing the powder material to pass through the DED nozzle main body. The AM apparatus further includes a cover configured to surround a peripheral area of the laser port and the powder port of the DED nozzle. The cover is configured to have an opened downstream side in an emission direction of the laser beam. The cover includes a gas supply passage for supplying a gas inside the cover. The gas supply passage is configured to be oriented so as to guide the gas toward the DED nozzle main body.

The invention relates to a method for additive manufacture of a workpiece under protective gas, wherein a workpiece is assembled from a sequence of workpiece contours, each of which is manufactured by selective sintering or melting of a powdery or wire-like material by applying an energy beam thereto, wherein a workpiece contour is manufactured under the effect of a protective gas consisting of carbon dioxide and an inert gas. According to the invention, the chemical composition of each workpiece contour is modified according to a specified program by variation of the composition of the protective gas. Heat treatment occurring after manufacture of the workpiece contour provides for defined mechanical and technological quality values of the workpiece contour. A workpiece having zones with defined mechanical and technological quality values is produced in this manner.

A system includes an energy source, a focusing system, and a controller. The energy source is configured to output energy pulses to the focusing system. A chamber surrounds at least a portion of a metallic substrate and contains a liquid in contact with a surface of the metallic substrate. The controller is configured to cause the energy source to output energy pulses and cause the focusing system to focus a focal volume of the energy pulses at or near the surface of the metallic substrate that is in contact with the liquid to create micro-scale or smaller surface texturing on the metallic substrate.

A manipulator device such as a robot arm that is capable of increasing manufacturing throughput for additively manufactured parts, and allows for the manipulation of parts that would be difficult or impossible for a human to move is described. The manipulator can grasp various permanent or temporary additively manufactured manipulation points on a part to enable repositioning or maneuvering of the part.