A fluid balancer includes: a shaft; a cylinder; a base member which includes a through hole through which a shaft is inserted; a spacer which is provided between the shaft and the base member, and includes a plurality of grooves which are formed in a surface opposed to the shaft in the circumferential direction of the shaft at intervals and extend along the axial direction of the shaft and elastic support portion which supports the spacer with respect to the base member.

A fluid balancer includes: a shaft; a cylinder; a base member which includes a through hole through which a shaft is inserted; a spacer which is provided between the shaft and the base member, and includes a plurality of grooves which are formed in a surface opposed to the shaft in the circumferential direction of the shaft at intervals and extend along the axial direction of the shaft and elastic support portion which supports the spacer with respect to the base member.

A processing machine includes: a static pressure bearing configured to support a drive shaft; a fluid feeder configured to output a fluid to be supplied to the static pressure bearing, in accordance with rotation of a servomotor; a sensor configured to detect a physical quantity of the fluid output from the fluid feeder; and a control unit configured to control the rotation speed of the servomotor according to the physical quantity of the fluid.

A processing machine includes: a static pressure bearing configured to support a drive shaft; a fluid feeder configured to output a fluid to be supplied to the static pressure bearing, in accordance with rotation of a servomotor; a sensor configured to detect a physical quantity of the fluid output from the fluid feeder; and a control unit configured to control the rotation speed of the servomotor according to the physical quantity of the fluid.

Provided for the purposes of further improved precision of a high-precision machine tool (100) are at least one linear drive- and guide-bearing (1) having at least one linear motor (27), which has at least one magnet (15) arranged on one of the machine components (5) and at least one coil (25) arranged on the other machine component (10) and operatively connected to the at least one magnet (15), wherein the at least one magnet (15) and the at least one coil (25) are configured to exert an opposing attractive force and to perform an at least temporarily relative movement in relation to one another; at least one hydrostatic fluid bearing (30-1, 30-3) arranged on one of the two machine components (10) and operatively connected to the other machine component (5), wherein the hydrostatic fluid bearing (30-1, 30-3) exerts a repulsive force opposite to the attractive force; and a first bearing gap (H1), formed between the two machine components (5, 10), the height of which is greater than 0 μm and less than or equal to 10 μm.

Provided for the purposes of further improved precision of a high-precision machine tool (100) are at least one linear drive- and guide-bearing (1) having at least one linear motor (27), which has at least one magnet (15) arranged on one of the machine components (5) and at least one coil (25) arranged on the other machine component (10) and operatively connected to the at least one magnet (15), wherein the at least one magnet (15) and the at least one coil (25) are configured to exert an opposing attractive force and to perform an at least temporarily relative movement in relation to one another; at least one hydrostatic fluid bearing (30-1, 30-3) arranged on one of the two machine components (10) and operatively connected to the other machine component (5), wherein the hydrostatic fluid bearing (30-1, 30-3) exerts a repulsive force opposite to the attractive force; and a first bearing gap (H1), formed between the two machine components (5, 10), the height of which is greater than 0 μm and less than or equal to 10 μm.

A machine tool includes a rotation table unit (25) including a rotation table (39) configured to rotate with respect to a first axis. The rotation table unit (25) is configured to move along a second axis that is orthogonal to the first axis. The machine tool includes a spindle unit (26) including a spindle (58) configured to rotate with respect to a third axis that is orthogonal to the first axis and the second axis. The spindle unit (26) is configured to move along the third axis. The machine tool includes a bed (22) that supports the rotation table unit (25) and the spindle unit (26). A front part of an upper surface of the bed (22) includes a recess (232) in which the rotation table unit (25) is arranged. The spindle unit (26) is located at a rear part of the upper surface of the bed (22).

A support structure includes: a support frame as a shaft support member for supporting two shafts; a bush provided on each of the two shafts in a slidable manner; a cover support member connected to the multiple bushes and configured to support the cover; a first connection member for connecting one end of each of the two shafts to the support frame in a manner that the relative position between the shaft and the support frame will not change; and a second connection member for connecting the other end of each of the two shafts to the support frame in a manner that the relative position between the shaft and the support frame can change.

A guide mechanism for a machine tool includes a movement member and a guide member in a form of first and second rails the movement member and the guide member relatively movable to each other. A hydrostatic pressure guide mechanism and a sliding guide mechanism are formed between the movement member and the first and second rails. The hydrostatic pressure guide mechanism includes a static pressure chamber, a seal portion sealing a periphery of the static pressure chamber, and a supply passage configured to supply a lubricating oil into the static pressure chamber.

A guide mechanism for a machine tool includes a movement member and a guide member in a form of first and second rails the movement member and the guide member relatively movable to each other. A hydrostatic pressure guide mechanism and a sliding guide mechanism are formed between the movement member and the first and second rails. The hydrostatic pressure guide mechanism includes a static pressure chamber, a seal portion sealing a periphery of the static pressure chamber, and a supply passage configured to supply a lubricating oil into the static pressure chamber.