A machining unit for a machine tool includes a carrier head base, which on its rear side includes a carriage. The carriage can be coupled to axis guides and is longitudinally displaceable. The machining unit further includes a spindle carrier head held pivotably on the carrier head base. The spindle carrier head has a spindle with a tool holder. The carrier head base is provided with a damping unit. The disclosed machining unit provides increased precision of a machine tool. The machining unit may be incorporated in a machine tool.

A machining accuracy diagnosing device includes a diagnosing information acquiring, an opening time setting unit, a cutting time setting unit, and a machining accuracy influence amount predicting unit. The diagnosing information acquiring unit acquires at least one of a room temperature inside the plant, a set temperature of a temperature regulating device, an air temperature outside the plant, a wind speed outside the plant, an opening degree of the door or the shutter, and a machine body temperature. The opening time setting unit sets an opening time of the door or the shutter. The machining accuracy influence amount predicting unit predicts an influence amount of opening of the door or the shutter on the machining accuracy based on the acquired information for diagnosis, the set opening time of the door or the shutter, and a set scheduled machining start time and a set scheduled machining end time.

Provided is a machine tool (1) which is capable of measuring machining accuracy of a workpiece (W) with high accuracy and enables the time required from machining to measurement of machining accuracy to be greatly reduced. The machine tool (1) machining a workpiece (W) while moving a tool and the workpiece (W) relative to each other includes a cover (2) separating from outside a machining area for machining the workpiece (W) therein, and temperature adjusting means (30) used in machining of the workpiece (W) to adjust an ambient temperature of the machining area.

A cutting fluid supplying device for a machine tool includes a machine tool having a structure body including a bed, a column disposed on the bed, and a spindle head disposed to the column and at least one of the ejection ports for ejecting a cutting fluid. The cutting fluid supplying device for a machine tool further includes a storage tank for storing the cutting fluid to be supplied to the machine tool, at least one of the cutting fluid flow passages for connecting the storage tank and the at least one of the ejection ports, and at least one of the pumps for applying pressure to the cutting fluid to supply the cutting fluid stored in the storage tank to the at least one of the cutting fluid flow passages. The at least one of the cutting fluid flow passages is disposed to penetrate through or disposed on an outer surface of the structure body so as to allow heat exchange between the cutting fluid and the structure body.

The present invention provides a method and system for controlling the temperature of an electric motor by adjusting the electric losses in the motor. In an embodiment, the required load on the motor is determined and a first motor voltage is provided to meet the required load. A predetermined temperature set point for the motor is compared against the temperature of the motor and based on the temperature of the motor and the predetermined temperature set point, a secondary motor voltage is determined. The motor voltage may then be adjusted based on the calculated voltage and the motor load measurement adjusted based on the measured motor speed and actual motor voltage.

An electrostatic chuck apparatus is provided that is capable of effectively reducing temperature imbalance of a wafer substrate that is heated to a high temperature. The electrostatic chuck apparatus includes a base including a cooling flow path through which a refrigerant may flow, an adiabatic layer on the base, a uniform heating plate on the adiabatic layer, a heating element between the adiabatic layer and the uniform heating plate, an insulating layer on the uniform heating plate and including a ceramic, a conductive layer on the insulating layer and having an area smaller than an area of the insulating layer, and a dielectric layer on the conductive layer and including a ceramic.

A regeneration device for regenerating a coolant dispersion with phase change material includes: a redispersion unit for redispersing the coolant dispersion, the redispersion unit including a restrictor; and a recooling unit that enables freezing of a phase change material by dissipating heat stored in the coolant dispersion. The recooling unit is arranged so that dissipated heat is at least partially recuperated in order to heat up the coolant dispersion to an inlet temperature.

The present invention provides a method and system for controlling the temperature of an electric motor by adjusting the electric losses in the motor. In an embodiment, the required load on the motor is determined and a first motor voltage is provided to meet the required load. A predetermined temperature set point for the motor is compared against the temperature of the motor and based on the temperature of the motor and the predetermined temperature set point, a secondary motor voltage is determined. The motor voltage may then be adjusted based on the calculated voltage and the motor load measurement adjusted based on the measured motor speed and actual motor voltage.

A machine tool comprises a structure in which at least one component (12) of this structure is thermally insulated from the external environment and in which this component (12) is sealed so as to prevent fluid communication between the inside (18) and the outside of the component (12) of the structure.

Provided are a silicon ingot slicing apparatus capable of slicing silicon ingots in various forms such as blocks or wafers using microbubbles and wire electric discharge machining.