A position adjustment device for adjusting the height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and configured to expand and contract in the height direction; an adjustment mechanism configured to adjust the position of the movable portion in the height direction relative to the fixed portion; and a metal member fixed to the fixed portion and the movable portion.

A machining device including a framework, a transmission shaft and a drive mechanism including a rotation member for driving the shaft in rotation about its axis, a drive member in helical connection with the shaft to drive the translation thereof along its axis with a feed movement, according to the relative rotational speed of the rotation and drive members. The drive member is mounted with the ability to effect translational movement with respect to the framework along the axis and is positioned between the rotation member and an end for coupling of the shaft to a cutting tool, while an electromechanical actuator is mounted in a fixed frame of reference associated with the framework in front of the drive member to which it can be coupled in order to cause it to oscillate translationally so as to superpose an axial oscillation component with the feed movement.

Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

A position adjustment device for adjusting a height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and having formed therein a plurality of cuts extending along a first direction that is orthogonal to the height direction; and an adjustment mechanism configured to adjust expansion and contraction of the expanding and contracting portion. The expanding and contracting portion has a crank shape in which a plurality of the cuts formed on one side in the first direction and a plurality of the cuts formed on the other side in the first direction are alternated along the height direction.

A position adjustment device for adjusting the height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and configured to expand and contract in the height direction; an adjustment mechanism configured to adjust the position of the movable portion in the height direction relative to the fixed portion; and a metal member fixed to the fixed portion and the movable portion.

The technology disclosed in the present disclosure is a method for correcting a yaw of an X-Y stage, including: moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the X-Y stage.

The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement jitter caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

A machining device including a framework, a transmission shaft and a drive mechanism including a rotation member for driving the shaft in rotation about its axis, a drive member in helical connection with the shaft to drive the translation thereof along its axis with a feed movement, according to the relative rotational speed of the rotation and drive members. The drive member is mounted with the ability to effect translational movement with respect to the framework along the axis and is positioned between the rotation member and an end for coupling of the shaft to a cutting tool, while an electromechanical actuator is mounted in a fixed frame of reference associated with the framework in front of the drive member to which it can be coupled in order to cause it to oscillate translationally so as to superpose an axial oscillation component with the feed movement.

Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.