A method for abrasive flow machining includes moving an abrasive media through a high-aspect passage of a workpiece. Local pressure of the abrasive media is increased at target abrasion surfaces of the high-aspect passage using a passage geometry that is configured to direct flow of the abrasive media into the target abrasion surfaces such that the target abrasion surfaces are preferentially polished by the abrasive media over other, non-targeted surfaces of the high-aspect passage at which the flow of the abrasive media is not directed into.

The invention relates to a method for the surface processing of a component by flow grinding, comprising the following steps: (a) providing a blank (1), (b) flooding at least one surface of the blank (1) with a fluid carrier material containing grinding particles,
wherein the blank (1) is rounded at positions at which, during flooding, the flow direction (25) of the fluid carrier material containing the grinding particles changes and, at positions at which a flow separation occurs on the finished component, additional material (5) is attached such that a flow separation at the beginning of the flooding operation is prevented.

The present disclosure is directed to a system and method for in-situ (e.g. on-wing) cleaning of gas turbine engine components. The method includes injecting a dry cleaning medium into the gas turbine engine at one or more locations. The dry cleaning medium includes a plurality of abrasive microparticles. Thus, the method also includes circulating the dry cleaning medium through at least a portion of the gas turbine engine such that the abrasive microparticles abrade a surface of the one or more components so as to clean the surface.

A controllable magnetic field-assisted finishing apparatus for an inner surface and a finishing method are provided. The apparatus includes a housing, ball screw mechanisms, a workpiece, a centering clamp, a connecting plate, a magnetic field generating device, a chuck clamp, a precise displacement platform and a base. The magnetic field generating device includes electromagnetic coils, coil connecting plates, a magnetic yoke, nuts, springs and bolts. The magnetic field generating device dynamically adjusts a distance from the magnetic yoke to the outer surface of the workpiece through the springs. The movement tracks of the magnetic finishing medium are controlled by the formed rotation of the magnetic field, the finishing action force dynamic-adjustment, the optimization of the machining form of the magnetic finishing medium in collaboration with the rotation of the chuck clamp and the feed movement of the precise displacement platform.

Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

An insert apparatus for protecting a curved inner surface within a passageway from abrasion during an abrasive machining operation is disclosed. In various embodiments, the insert apparatus includes a shield having a shell shaped to match a curved portion of the curved inner surface of the passageway and a shaft having a first end connected to the shell and a second end connected to a member configured to maintain the shaft within the passageway and the shell positioned against the curved inner surface during the abrasive machining operation.

A method for outer surface finishing of a workpiece may include coaxially placing the workpiece inside a vessel. The exemplary vessel may include at least one baffle that may radially extend from an inner wall of the vessel toward the outer surface of the workpiece. The exemplary method may further include pouring an abrasive medium inside the vessel, rotating the abrasive medium about the longitudinal axis in a first direction within the vessel relative to the outer surface of the workpiece by rotating the vessel about the longitudinal axis, and concurrently rotating the workpiece within the vessel about the longitudinal axis in a second direction, the second direction being opposite the first direction.

An impeller manufacturing method includes: integrally forming an impeller by an additive manufacturing method using a metal powder, the impeller including a disk which has a disk shape about an axis, a plurality of blades which are formed on a surface facing a first side in an axial direction of the disk with gaps therebetween in a circumferential direction about the axis, and a cover which covers the plurality of blades from the first side in the axial direction; processing the integrally formed impeller by a hot isostatic pressing; and causing a polishing fluid containing abrasive grains to flow through a flow path formed between the disk, the cover, and the blades in the impeller after the processing with the hot isostatic pressing and while pressurizing the polishing fluid to perform fluid polishing.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

Apparatus 10 and method for cleaning, rejuvenating or treating the internal surfaces of a timber barrel 28 with an abrasive, the apparatus 10 comprising a clamping arrangement that includes at least one clamp 21-24 for clamping the barrel 28. The clamp 21-24 being rotatable to rotate the barrel 28 about its axis and the clamping arrangement being operable to tilt the axis of the barrel 28 during rotation through at least about 20°, preferably 25-40%, to either side of horizontal.