A plane polishing machine polishing one surface of a workpiece flat, the plane polishing machine comprises a stick-on disk decentering jig of a circular plate shape mounted on a rotating polishing surface plate, a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig, a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig, and a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.

A plane polishing machine polishing one surface of a workpiece flat, the plane polishing machine comprises a stick-on disk decentering jig of a circular plate shape mounted on a rotating polishing surface plate, a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig, a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig, and a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.

A variety of scissors gear assemblies are disclosed that utilize integral parts or common tools to align teeth of the scissors gear assembly. Methods of use are also disclosed.

A CMP tool including a polisher head has a floating head assembly configured to be driven around a rotational axis an upper head assembly disposed within the upper head assembly. An over-rotation limiting pin projects between the floating head assembly and the upper head assembly. A restrictor/lifter receptacle is located to receive the over-rotation limiting pin, the restrictor/lifter receptacle having opposing vertical sidewalls with different length, and a sloped top sidewall.

A CMP tool including a polisher head has a floating head assembly configured to be driven around a rotational axis an upper head assembly disposed within the upper head assembly. An over-rotation limiting pin projects between the floating head assembly and the upper head assembly. A restrictor/lifter receptacle is located to receive the over-rotation limiting pin, the restrictor/lifter receptacle having opposing vertical sidewalls with different length, and a sloped top sidewall.

A plane polishing machine polishing one surface of a workpiece flat, the plane polishing machine comprises a stick-on disk decentering jig of a circular plate shape mounted on a rotating polishing surface plate, a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig, a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig, and a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.

A plane polishing machine polishing one surface of a workpiece flat, the plane polishing machine comprises a stick-on disk decentering jig of a circular plate shape mounted on a rotating polishing surface plate, a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig, a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig, and a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.