Processe and system for preparing a vehicle surface (e.g., an aircraft fuselage) for painting include a preparation booth (100) which is sized and configured to house the vehicle (F). At least one robotic assembly (200a, 200b) is reciprocally movable within the preparation booth (100) relative to a longitudinal axis of the vehicle (F), and is provided with a robotic hand (230) having at least one abrasive disc (242a) attached to an attachment pad (242) of the robotic hand (230), and at least one nozzle (252a, 252b, 252c) for discharging a stream of rinse fluid. Operation of the at least one robotic assembly (230) will cause the at least one abrasive disc (242a) of the robot hand (230) to abrade the surface of the vehicle (F). The robotic hand (230) may thereafter be maneuvered so that the at least one nozzle (252a, 252b, 252c) is directed toward the abraded vehicle surface (F). A stream of rinse fluid may then be discharged through the at least one nozzle (252a, 252b, 252c) and towards the abraded surface of the vehicle (F) so as to rinse the abraded surface of particulate matter.

Processe and system for preparing a vehicle surface (e.g., an aircraft fuselage) for painting include a preparation booth (100) which is sized and configured to house the vehicle (F). At least one robotic assembly (200a, 200b) is reciprocally movable within the preparation booth (100) relative to a longitudinal axis of the vehicle (F), and is provided with a robotic hand (230) having at least one abrasive disc (242a) attached to an attachment pad (242) of the robotic hand (230), and at least one nozzle (252a, 252b, 252c) for discharging a stream of rinse fluid. Operation of the at least one robotic assembly (230) will cause the at least one abrasive disc (242a) of the robot hand (230) to abrade the surface of the vehicle (F). The robotic hand (230) may thereafter be maneuvered so that the at least one nozzle (252a, 252b, 252c) is directed toward the abraded vehicle surface (F). A stream of rinse fluid may then be discharged through the at least one nozzle (252a, 252b, 252c) and towards the abraded surface of the vehicle (F) so as to rinse the abraded surface of particulate matter.

Apparatus are provided for automatic repositioning of fluid nozzles when operating on a workpiece with a tool. The apparatus includes a nozzle assembly configured to convey a fluid to a target zone defined on the workpiece and/or on the tool. The target zone has a location that varies over time. A spring applies a spring force to bias the nozzle assembly toward the target zone, and moves the nozzle assembly as the location of the target zone varies. The nozzle assembly moves to a position relative to the target zone by a combination of action of the spring force and of any hydrodynamic force of the fluid, when moving through the nozzle assembly.

Apparatus are provided for automatic repositioning of fluid nozzles when operating on a workpiece with a tool. The apparatus includes a nozzle assembly configured to convey a fluid to a target zone defined on the workpiece and/or on the tool. The target zone has a location that varies over time. A spring applies a spring force to bias the nozzle assembly toward the target zone, and moves the nozzle assembly as the location of the target zone varies. The nozzle assembly moves to a position relative to the target zone by a combination of action of the spring force and of any hydrodynamic force of the fluid, when moving through the nozzle assembly.

A processing apparatus used in processing a workpiece having a device in each of a plurality of regions that includes a chuck table holding the workpiece, positioning means positioning the workpiece before grinding, resin coating means including a rotatable spinner table for coating the workpiece with a resin, cleaning means, a grinding unit, and a transfer unit. The transfer unit includes a first transfer unit transferring the workpiece from the positioning means to the spinner table and from the spinner table to the chuck table, a second transfer unit transferring the workpiece from the chuck table to the cleaning means, and a front/back surface inversion transfer unit taking over the workpiece from the cleaning means to the second transfer unit.

A processing apparatus used in processing a workpiece having a device in each of a plurality of regions that includes a chuck table holding the workpiece, positioning means positioning the workpiece before grinding, resin coating means including a rotatable spinner table for coating the workpiece with a resin, cleaning means, a grinding unit, and a transfer unit. The transfer unit includes a first transfer unit transferring the workpiece from the positioning means to the spinner table and from the spinner table to the chuck table, a second transfer unit transferring the workpiece from the chuck table to the cleaning means, and a front/back surface inversion transfer unit taking over the workpiece from the cleaning means to the second transfer unit.

A conditioner of a chemical mechanical polishing (CMP) apparatus includes a disk to polish a polishing pad of the CMP apparatus, a driver to rotate the disk, a lifter to lift the driver, an arm to rotate the lifter, and a connector to connect the driver to the lifter, the driver being tiltable with respect to the lifter.

A creep feed grinding apparatus includes a chuck table, a grinding unit having a spindle and a grinding wheel mounted on a lower end of the spindle, the grinding wheel including a plurality of grindstones disposed in an annular array on a surface of an annular base, the grindstones following an annular track upon rotation of the spindle, a moving mechanism for moving the chuck table and the grinding unit relative to each other along a predetermined direction perpendicular to the longitudinal axis of the spindle, and a bottom surface state adjusting mechanism for adjusting states of bottom surfaces of the grindstones by cleaning and/or correcting the bottom surfaces of the grindstones. The bottom surface state adjusting mechanism is positioned outside of a relative movement area of the chick table in which the chuck table and the grinding unit are moved relative to each other by the moving mechanism.

A creep feed grinding apparatus includes a chuck table, a grinding unit having a spindle and a grinding wheel mounted on a lower end of the spindle, the grinding wheel including a plurality of grindstones disposed in an annular array on a surface of an annular base, the grindstones following an annular track upon rotation of the spindle, a moving mechanism for moving the chuck table and the grinding unit relative to each other along a predetermined direction perpendicular to the longitudinal axis of the spindle, and a bottom surface state adjusting mechanism for adjusting states of bottom surfaces of the grindstones by cleaning and/or correcting the bottom surfaces of the grindstones. The bottom surface state adjusting mechanism is positioned outside of a relative movement area of the chick table in which the chuck table and the grinding unit are moved relative to each other by the moving mechanism.

When decoating a glass panel (3), a decoating tool (6) with a circular-cylindrical grinding element (8) is used, which element is set to rotate around its axis. In the end face of the grinding element (8) that is used when the active face (9) is decoated, a hole (10) and at least one radial groove (11) are provided. The decoating tool (6) is placed at a spot (A) on the glass panel (3) in a movement (arrow 13) that is oriented at an acute angle to the plane of the glass panel (3), which lies between the ends (B) and (C) of the strip-shaped decoating area (14) and moves first to the one end (B) (arrow 15) and then to the other end (C) (arrow 16) in order to strip coating from the glass panel (3) in the decoating area (14).