A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

Methods of performing a plurality of operations within a region of a part utilizing an end effector of a robot and robots that perform the methods are disclosed herein. The methods include collecting a spatial representation of the part and aligning a predetermined raster scan pattern for movement of the end effector relative to the part with the spatial representation of the part. The methods also include defining a plurality of normality vectors for the part at a plurality of predetermined operation locations for operation of the end effector. The methods further include moving the end effector relative to the part and along the predetermined raster scan pattern. The methods also include orienting the end effector such that an operation device of the end effector faces toward each operation location along a corresponding normality vector and executing a corresponding operation of the plurality of operations with the operation device.

A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

An apparatus including a drive having motors and at least two coaxial drive shafts; an arm connected to the drive, where the arm is configured to support at least one substrate thereon; and a transmission connected between the drive and the arm, where the transmission includes an eccentric bearing and a linkage, where the linkage is connected between a first one of the coaxial drive shafts and the arm, where the eccentric bearing is connected to a second one of the coaxial drive shafts, where the arm comprises an aperture, where the eccentric bearing is located in the aperture, and where the eccentric bearing is configured to contact the arm in the aperture.

A substrate cleaning line and a substrate cleaning system including the same are disclosed. The substrate cleaning line may include a chamber portion including a plurality of cleaning chambers to clean a substrate, and a first return robot to load, unload, or transfer the substrate from or to the plurality of cleaning chambers, wherein the cleaning chambers may be stacked on each other in a vertical direction.

A collar fastening system that includes a collar fastening tool, and a collar loading assembly coupled to the collar fastening tool. The collar loading assembly includes a loading arm that rotates into multiple positions and a holding member coupled to the loading arm. The loading arm positions the holding member between a loading position and an unloading position. The holding member includes an arcuate side wall and a vacuum opening defined in the arcuate side wall. The holding member receives a collar when at the loading position, and selectively holds the collar against the arcuate side wall with a retaining force provided by a vacuum applied via the vacuum opening. The loading arm provides the collar to the collar fastening tool when at the unloading position.

A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

An example test head manipulator includes a tower having a base and a track, where the track is vertical relative to the base, and arms to enable support for the test head. The arms are connected to the track to move the test head vertically relative to the tower, and the arms are configured to control rotation of the test head. Each of the arms includes a cam that is rotatable, and at least one plunger in contact with the cam and that is configured to contact the test head. Rotation of the cam is controllable to move the at least one plunger to offset an uncontrolled rotation the test head.

A gripper capable of lifting a work piece includes: a body including a sliding direction and a lifting axis defining a first angle relative to the sliding direction; a plurality of sliding blocks slidably mounted on the body and located at two sides of the lifting axis to move in the sliding direction toward or away from each other, wherein the sliding blocks each include a receiving hole at a second angle relative to the sliding direction; and a plurality of fingers slidably disposed in the receiving holes, and each including: a nose portion disposed in the receiving holes, and a finger portion to grip the work piece. When the sliding blocks are in the lifting position, the fingers are retracted into the receiving holes to make the finger portions move up along the lifting axis toward the body by a certain distance while clamping the work piece.

Provided is a remotely operated manipulator which can be applied to a space which is wider on a back side than at an opening part, which has a simple structure, high stiffness, and high reliability. The remotely operated manipulator of the present invention includes: a circular base fixed to a wall surface; a beam which rotates on the circular base; a trolley which moves on the beam; and a mast which is raised and lowered with respect to the trolley and is mounted with a tool unit at a tip. Stiffness is improved by directly fixing the beam to the wall surface by a beam fixing device. Further, a work region is expanded by mounting a bending mast on the tip of the mast.