Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.

Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.

A service platform, container handling carrier and method of arranging electrical drive control elements. The platform (8) comprises one or more mounting space between a top and bottom surfaces (15, 19). The mounting spaces may receive electrical components (29).

A service platform, container handling carrier and method of arranging electrical drive control elements. The platform (8) comprises one or more mounting space between a top and bottom surfaces (15, 19). The mounting spaces may receive electrical components (29).

A substrate transfer device that transfers a substrate, includes: a transfer arm including a substrate support and an arm; a cooler configured to distribute and supply a cooling fluid from a fluid supply source to each of cooling target regions of the arm; a measuring part configured to measure a temperature of each of the cooling target regions; and a controller. The controller is configured to: calculate a thermal index for each of the cooling target regions based on the amount of change of the temperature of the cooling target region measured by the measuring part from a reference temperature and a degree of influence of the temperature of the cooling target region affecting a movement accuracy of the substrate support; and determine a distribution ratio of the cooling fluid from the fluid supply source by the cooler based on the thermal index.

A substrate transfer device that transfers a substrate, includes: a transfer arm including a substrate support and an arm; a cooler configured to distribute and supply a cooling fluid from a fluid supply source to each of cooling target regions of the arm; a measuring part configured to measure a temperature of each of the cooling target regions; and a controller. The controller is configured to: calculate a thermal index for each of the cooling target regions based on the amount of change of the temperature of the cooling target region measured by the measuring part from a reference temperature and a degree of influence of the temperature of the cooling target region affecting a movement accuracy of the substrate support; and determine a distribution ratio of the cooling fluid from the fluid supply source by the cooler based on the thermal index.

The invention relates to a light barrier system, comprising at least two reflection light barrier devices, each of which is configured to emit a light beam and to detect a reflected light beam, wherein the light barrier system comprises a reflection body, which is configured to reflect back light beams emitted from at least two different directions in parallel, which are spaced apart at an angle of at least 20°, wherein the at least two reflective light barrier devices are arranged in such a way that they emit light beams from different directions onto the same reflection body in order to monitor at least two spatially different areas. In a further aspect, the invention relates to the use of a reflection body.

The invention relates to a light barrier system, comprising at least two reflection light barrier devices, each of which is configured to emit a light beam and to detect a reflected light beam, wherein the light barrier system comprises a reflection body, which is configured to reflect back light beams emitted from at least two different directions in parallel, which are spaced apart at an angle of at least 20°, wherein the at least two reflective light barrier devices are arranged in such a way that they emit light beams from different directions onto the same reflection body in order to monitor at least two spatially different areas. In a further aspect, the invention relates to the use of a reflection body.

An air conditioner includes a blower unit to blow air at a predetermined amount, a cooling unit arranged downstream of the blower unit in an air flowing direction, a compressor which is operated at a variable operating frequency so that a revolving speed thereof is adjustable, a condenser, and a cooling coil connected in this order by pipes to circulate a heating medium to cool blown air with a heating unit arranged on a downstream side of the cooling unit in the air flowing direction in which the blown air is heated by a heater, and a control unit controls the operating frequency of the compressor and includes a compressor control part which adjusts the revolving speed of the compressor such that the operating frequency of the compressor is decreased by a predetermined frequency when an output of the heating unit exceeds a first threshold value.

An air conditioner includes a blower unit to blow air at a predetermined amount, a cooling unit arranged downstream of the blower unit in an air flowing direction, a compressor which is operated at a variable operating frequency so that a revolving speed thereof is adjustable, a condenser, and a cooling coil connected in this order by pipes to circulate a heating medium to cool blown air with a heating unit arranged on a downstream side of the cooling unit in the air flowing direction in which the blown air is heated by a heater, and a control unit controls the operating frequency of the compressor and includes a compressor control part which adjusts the revolving speed of the compressor such that the operating frequency of the compressor is decreased by a predetermined frequency when an output of the heating unit exceeds a first threshold value.