A blood pressure detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a gas-pressure-sensing element, a driving-chip element, an encapsulation layer and a valve layer. The substrate includes inlet apertures. The microelectromechanical element and the gas-pressure-sensing element are stacked and integrally formed on the substrate. The encapsulation layer is encapsulated and positioned on the substrate. A flowing-channel space is formed above the microelectromechanical element and the gas-pressure-sensing element. The encapsulation layer includes an outlet aperture in communication with an airbag. The driving-chip element controls the microelectromechanical element, the gas-pressure-sensing element and valve units to transport gas. The gas is introduced into the flowing-channel space through the inlet apertures and transported into the airbag through the outlet aperture, to inflate the airbag for blood pressure measurement, and a detection datum of blood pressure outputted by the gas-pressure-sensing element is transmitted to the microprocessor to calculate.

A fluidic device includes a first circulation flow path and a second circulation flow path which circulate a solution containing a sample material, the first circulation flow path and the second circulation flow path share at least a part of the flow path, and at least one selected from the group consisting of a capture unit which captures the sample material, a detection unit which detects the sample material, a valve, and a pump is provided on the shared flow path.

A device is described for protecting components, housings and the like against liquids and for ventilating the same, including at least one first layer, the first layer being configured as a diaphragm and this has a first area in such a way that the first area is configured as gas-permeable and liquid-tight below a first liquid pressure, and at least one second layer, the second layer being connected pressure-tight at least in part to the first layer, and having a second area that is configured in such a way that the first area and the second area interact for sealing against a liquid at a liquid pressure greater than or equal to the first liquid pressure.

A passive microfluidic valve includes a first manifold portion having a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet. The valve also includes a second manifold portion in fluid communication with the first chamber via a channel. The second manifold portion includes a second chamber fluidly coupled to the first chamber and the second inlet. The valve further includes a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow.

A passive microfluidic valve includes a first manifold portion having a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet. The valve also includes a second manifold portion in fluid communication with the first chamber via a channel. The second manifold portion includes a second chamber fluidly coupled to the first chamber and the second inlet. The valve further includes a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow.

A showerhead for a processing chamber includes a faceplate with a plurality of openings. A plurality of compartments are recessed into a top surface of the faceplate. The showerhead includes a plurality of MEMS devices. Each MEMS device is disposed in a corresponding compartment of the plurality of compartments. A printed circuit board including a plurality of ports therethrough is coupled to each MEMS device. Each MEMS device is configured to regulate a gas flow into each corresponding compartment through a corresponding port of the plurality of ports in the printed circuit board.

The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

Described is an electrically actuated, pneumatic driven motor. The pneumatic driven motor includes a body having first and second surfaces, the body having a chamber defined by an interior wall, a displacement cavity, and a passage that fluidly couples the displacement cavity to the chamber, a bleeder port and a bleeder port passage that fluidly couples the bleeder port to the chamber, a valve disposed in the passage between the displacement cavity and the chamber, an annular pushrod mechanism coupled to the valve, the annular pushrod mechanism having a pair of pawls that protrude from an inner surface of the annular pushrod mechanism, an axle disposed in the chamber; and a motor gear disposed about the axle, the motor gear having a plurality of teeth that selectively engage with the pawls on the pushrod mechanism according to displacement of the annular pushrod mechanism.

The present invention relates to a microfluidic chip and valve, production process and uses thereof according to the independent claims.