Embodiments disclosed are systems and methods for fabricating microchannels in metal. In an embodiments, a method includes providing a first metallic plate having a first surface with an elongated slot recessed therein, providing a second metallic plate having a second surface, interfacing the first surface of the first metallic plate with the second surface of the second metallic plate with the second surface covering the elongated slot to form a microchannel between the first metallic plate and the second metallic plate, thermal bonding the first metallic plate to the second metallic plate to form a metallic body having the microchannel extending therethrough, and infiltrating the metallic body with an infiltrant.

The present disclosure provides a microfluidic device comprising a set of micro-structured electrodes. The electrodes are made of a fusible alloy such as Field's Metal and are patterned on a layer of PDMS. The molten fusible alloy is poured over the patterned PDMA layer and a suction force is applied to ensure uniformity of flow of the molten metal. A second layer comprising a flow channel orthogonal to the direction of the micro-structured electrodes is disposed under the first layer to form the microfluidic device. The device shows enhanced sensitivity to RBC detection at high frequencies that are also bio-compatible (above 2 MHz). Multiple layers of the micro-structures electrodes can be sandwiched between layers of flow channels to provide a 3D microfluidic device.

This fluid handling device has a rotary member that is rotatable around the central axis. In the rotary member, a first protruding part for pressing and closing a valve of a flow channel chip and a recessed part for opening the valve without pressing the valve are disposed on the circumference of a first circle around the central axis. The rotary member further has a second protruding part for, when the recessed part is located at the valve in a state where the rotary member is rotated, pressing the valve so as not to open the valve.

Systems, methods, and devices for analyzing small volumes of fluidic samples, as a non-limiting example, less than twenty microliters are provided. The devices are configured to make a first sample reading, for example, measure an energy property of the fluid sample, for example, osmolality, make a second sample reading, for example, detecting the presence or concentration of one or more analytes in the fluid sample, or make both the first sample reading and the second sample reading, for example, measuring the energy property of the fluid sample as well as detecting the presence or concentration of one or more analytes in the fluid sample.

Disclosed are a MEMS chip and an electronic device. The chip can include a substrate having a back cavity, as well as a back electrode and an induction membrane both disposed on the substrate, wherein the back electrode and the induction membrane are located on the back cavity and constitute a capacitor structure, the induction membrane comprises an active area opposite to the back cavity, an inactive area disposed outside the active area, and an isolation area located between the active area and the inactive area, and the isolation area comprises two insulation loops connected to the active area and the inactive area respectively, and a buffer area connected between the two insulation loops, both of the insulation loops being disposed around the active area.

A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.

A method of manufacturing a microfluidic architecture having at least one channel disposed therein. Steps can include pouring an uncured polymeric material into a mould to produce a first layer; at least partially curing the first layer; and forming the at least one channel by disposing a support material on the first layer; pouring an uncured polymeric material onto the first layer to form a second layer to thereby encapsulate the support material; and at least partially curing the second layer such that the first layer and second layer together form the microfluidic architecture; wherein the support material undergoes a phase change during the process of forming the at least one channel. The phase change of the support material enables the material to be more easily disposed and/or removed after formation of the channel.

Micro gas chromatographic devices are provided having a microfluidic separation column and a plurality of capillaries where the capillaries have been independently configured in terms of the capillary length, capillary width, the packing density and packing geometry of the capillary using one or more micro pillars, the tortuosity of the capillary path, and the presence and identity of the stationary phase for use in micro gas chromatographic separation of complex mixtures of compounds. Through the plurality of capillaries, the devices are capable of discriminating between complex samples even in instances where complete separation of the components is not possible. Methods of fabrication and methods of use of the devices are also provided. The devices can be readily fabricated using known techniques. The devices can be used for the analysis of complex mixtures of compounds containing tens or hundreds of compounds in which just a few differ in presence or concentration.

Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A plurality of cavities are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a plurality of movable membranes, and where the movable membranes overlie the cavities, respectively. A plurality of fluid communication channels are disposed in the dielectric structure, where each of the fluid communication channels extend laterally between two neighboring cavities of the cavities, such that each of the cavities are in fluid communication with one another.

Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A plurality of cavities are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a plurality of movable membranes, and where the movable membranes overlie the cavities, respectively. A plurality of fluid communication channels are disposed in the dielectric structure, where each of the fluid communication channels extend laterally between two neighboring cavities of the cavities, such that each of the cavities are in fluid communication with one another.