An active mode image sensor for optical non-uniformity correction (NUC) of an active mode sensor uses a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) having tilt, tip and piston mirror actuation to form and scan a laser spot that simultaneously performs the NUC and illuminates the scene so that the laser illumination is inversely proportional to the response of the imager at the scan position. The MEMS MMA also supports forming and scanning multiple laser spots to simultaneously interrogate the scene at the same or different wavelengths. The piston function can also be used to provide wavefront correction. The MEMS MMA may be configured to generate a plurality of fixed laser spots to perform an instantaneous NUC.

A method of controlling a needle actuator to interact with a cell is provided, the method comprising: providing an actuator comprising a tower, a stage and a needle, wherein the needle is mounted on the stage; applying an electrostatic potential between the tower and the stage to retract the needle; moving the actuator towards the cell; reducing the potential so as to allow the stage and needle to move towards the cell; applying calibration data to detect when the needle has pierced the cell; and reducing the potential further once it has been detected that the needle has pierced the cell. The cell can be a biological cell. The needle can be a micro-needle and the stage can be a micro-stage.

The invention relates to a miniature kinetic energy harvester (1) for generating electrical energy, comprising: —a support (2), —a first element (3) having walls (32-35) surrounding at least one cavity (31), —at least one spring (4) mounted between the first element (3) and the support (2), the spring (4) being arranged so that the first element (3) may be brought into oscillation relative to the support (2) according to at least one direction (X) of oscillation, —a transducer (5) arranged between the first element (3) and the support (2) for converting oscillation of the first element (3) relative to the support (2) into an electrical signal, —at least one second element (7) housed within the cavity (31) and mounted to freely move within the cavity (31) relative to the first element (3) so as to impact the walls (32-35) of the cavity (31) when the harvester (1) is subjected to vibrations.

Microelectromechanical sensor comprising a fixed part and a mobile part suspended from the fixed part such that the mobile part can move at least in an out-of-plane displacement direction, the fixed part comprising at least first electrodes extending parallel to the displacement direction of the mobile part, the mobile part comprising a seismic mass and at least second electrodes extending parallel to the out-of-plane displacement direction, the first electrodes and the second electrodes being located relative to each other so as to be interdigitated, in which the second electrodes are directly connected to the inertial mass and only part of the face of each mobile electrode is facing an electrode fixed at rest.

There is provided an angular velocity sensor including first and second mass bodies provided within a first frame, a first flexible connector system connecting the first and second mass bodies and the first frame and that includes at least one sensor to detect displacements of the first and second mass bodies, a second flexible connector system connecting the first frame to a second frame provided separate from the first frame and that includes a driver to drive movement of the first frame relative to the second frame, so angular velocities can be measured based on the first and second mass bodies being enabled to rotate in a first axis direction and translated in a second axis direction, and based on the first frame being flexibly connected to the second frame so that a rotation displacement of the first frame is made in a third axis direction.

Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.

The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.