In a method of manufacturing a highly stretchable three-dimensional (3D) percolated conductive nano-network structure, a 3D nano-structured porous elastomer including patterns distributed in a periodic network is formed. A surface of the 3D nano-structured porous elastomer is changed to a hydrophilic state. A polymeric material is conformally adhered on the surface of the 3D nano-structured porous elastomer. The surface of the 3D nano-structured porous elastomer is wet by infiltrating a conductive solution in which a conductive material is dispersed. A 3D percolated conductive nano-network coupled with the 3D nano-structured porous elastomer is formed by evaporating a solvent of the conductive solution and removing the polymeric material.

An apparatus comprising: a thermally-actuated microactuator configured to deflect a component in dependence on an applied stimulus; and an extender having a length configured to increase deflection of the component by the microactuator, wherein the extender comprises one or more voids.

A method of controlling a needle actuator to interact with a cell is provided, the method comprising: providing an actuator comprising a tower, a stage and a needle, wherein the needle is mounted on the stage; applying an electrostatic potential between the tower and the stage to retract the needle; moving the actuator towards the cell; reducing the potential so as to allow the stage and needle to move towards the cell; applying calibration data to detect when the needle has pierced the cell; and reducing the potential further once it has been detected that the needle has pierced the cell. The cell can be a biological cell. The needle can be a micro-needle and the stage can be a micro-stage.

A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

A frame (110) is rotatably coupled to a substrate (200) by way of a torsion spring element (100), wherein the frame (110) can be both twisted in relation to the substrate (200) and moved linearly in relation to said substrate (200). The torsion spring element (100) is made of a single piece and suitable for use in micro-electromechanical devices.

A platform includes first and second actuation layers. The first actuation layer includes first and second frames and a plurality of actuators connected between the first frame and the second frame, wherein the plurality of actuators are adapted to move the first and second frames with respect to each other in a first direction. The second actuation layer includes third and fourth frames and a plurality of actuators connected between the third frame and the fourth frame, wherein the plurality of actuators are adapted to move the third frame and the fourth frame with respect to each other in a second direction, different from the first direction. Thereby, the fourth frame of the second actuation layer and the second frame of the first actuation layer are mechanically connected to each other, such that the second actuation layer experiences the movement in the first direction induced by the first actuation layer.

The present disclosure provides an improved method of parking a microelectromechanical system (MEMS) mirror in an array of MEMS mirrors to protect against single high voltage channel failures in a driver. Two separate voltages are applied to each MEMS mirror to move and park the mirror out of a camera sensor field of view in a servo system. For example, a first voltage may be applied in a positive X direction and a second voltage may be applied in a positive Y direction which will move the mirror in a diagonal direction. If one of the high voltage channels fail, the mirror will still be parked and outside of the camera sensor field of view. If a high voltage channel fails, the servo system can park a mirror affected by the failure in an opposite corner. Moreover, if 2-axis parking is not feasible, the mirror can use single-voltage parking.

The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass. The three-axis accelerometer can realize high-precision acceleration detection on three axes with only one proof mass, and in particular, can provide a fully differential detection signal for the Z axis, thereby greatly improving detection precision.

A steerable laser transmitter pairs a MEMS MMA with an optical amplifier to provide a high-power steered laser beam over a wide FOR. A single MEMS MMA may be positioned downstream of the optical amplifier. In a two-stage architecture, a MEMS MMA provides continuous fine steer upstream of the optical amplifier and a beam steerer, another MEMS MMA or a QWP and stack of switchable PGs, provides discrete coarse steering downstream. In the two-stage architecture, the upstream MEMS MMA is configured to limit its steering range to the acceptance angle of the optical amplifier, at most ±2°×±2°. The MEMS MMA may include piston capability to shape the wavefront of the beam.

An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.