A method of forming micro-channels in a plastic surface using a pressing device includes structuring a micro-channel forming tool for the pressing device to include a press end including a press surface that extends along a plane and a micro-channel detail positioned on the press end and extending beyond the plane of the press surface. The micro-channel detail includes a non-critical portion and a critical portion supported by the non-critical portion. The press end of the micro-channel forming tool is driven into the plastic surface at a predetermined force using a pressing device. Ultrasonic vibrations are applied to the micro-channel forming tool for a predetermined amount of time to melt portions of the plastic surface in contact with the pressing surface. The ultrasonic vibrations are removed after the predetermined amount of time has elapsed and the press end is retracted from the plastic surface.

A device includes a base substrate (700) with a micro component (702) attached thereto. Suitably it is provided with routing elements (704) for conducting signals to and from the component (702). It also includes spacer members (706) which also can act as conducting structures for routing signals vertically. There is a capping structure (708) of a glass material, provided above the base substrate (700), bonded via the spacer members (706), preferably by eutectic bonding, wherein the capping structure (708) includes vias (710) including metal for providing electrical connection through the capping structure. The vias can be made by a stamping/pressing method entailing pressing needles under heating to soften the glass and applying pressure, to a predetermined depth in the glass. However, other methods are possible, e-g- drilling, etching, blasting.

A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided by the embodiments of the present disclosure. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; and a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, and the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, and an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate.

The subject disclosure is directed to antimicrobial bandages with nanostructures, formation thereof, and usage thereof to facilitate wound healing. In one embodiment, a bandage apparatus that facilitates healing a wound is provided. The bandage apparatus comprises a substrate comprising an attachment mechanism that facilitates removably attaching the substrate to a part of a body comprising the wound. The bandage apparatus further comprises a nanostructure film provided on a surface of the substrate and configured to contact the wound when the substrate is attached to the part of the body comprising the wound, wherein the nanostructure film comprises a plurality of nanostructures.

[Problem] It is possible to produce hollow microneedles using workpiece containing macromolecules as a major component.

[Solution] A method of producing microneedles in the present invention includes a molding step of passing a thin pillar array member through through-holes to be used for positioning, and determining the shape of microneedles in the state where the pillar array member penetrates a liquid macromolecular compound in a liquid and semi-liquid state, a solidification step of solidifying the macromolecular compound, and a pull-out step of pulling out the pillar array member.

A method of making microstructures having re-entrant or doubly re-entrant topology includes forming a mold defining the negative surface features of the re-entrant or doubly re-entrant topology that is to be formed. In one embodiment, a soft or flowable material is formed on a first substrate and the mold is contacted with the same to form a solid, now positive surface having the re-entrant or doubly re-entrant topology. The mold is then released from the first substrate. The microstructures are secured to a second, different substrate, and the first substrate is removed. Any residual microstructure material located between adjacent microstructures may be removed to form the separate microstructures on the second substrate. The second substrate may be thin and flexible any manipulated into useful or desired shapes having the microstructures on one side thereof.

Bandage apparatus, methods, and antimicrobial bandages for facilitating wound healing by providing an antimicrobial functionality. A bandage apparatus includes a substrate with a first surface and a second surface opposing the first surface. An attachment mechanism and a nanostructure film are provided on the first surface. The attachment mechanism facilitates removably attaching the substrate to a part of a body comprising a wound. The nanostructure film includes a plurality of nanostructures that contact the wound without puncturing the wound when the substrate is attached to the part of the body comprising the wound.

In a method of generating a microelectromechanical system, MEMS, device, a MEMS substrate including a movable element is provided. A glass cover member including a glass cover is formed by hot embossing. The glass cover member is bonded to the MEMS substrate so as to hermetically seal by the glass cover a cavity in which the movable element is arranged.

A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate. The micro-nano channels have a high resolution or an ultra-high resolution, and have different sizes and shapes.

One or more embodiments include antimicrobial bandages with nanostructures, formation thereof, and usage thereof to facilitate wound healing. In one embodiment, a bandage apparatus that facilitates healing a wound is provided. The bandage apparatus includes a substrate having an attachment mechanism that facilitates removably attaching the substrate to a part of a body having the wound. The bandage apparatus also includes a nanostructure film provided on a surface of the substrate and configured to contact the wound when the substrate is attached to the part of the body having the wound, wherein the nanostructure film includes a plurality of nanostructures.