Techniques, devices and systems are disclosed for implementing acoustically triggered propulsion of nano- and micro-scale structures. In one aspect, an ultrasound responsive propulsion device includes a tube that includes one or more layers including an inner layer having an electrostatic surface, and an ultrasound-responsive substance coupled to the inner layer and configured to form gaseous bubbles in a fluid in response to an ultrasound pulse, in which the bubbles exit the tube to propel the tube to move in the fluid.

An electronic device is disclosed. The electronic device includes: a first electrode disposed on a substrate and extending in a first direction; a second electrode disposed above the first electrode and extending in a second direction intersecting the first direction; and at least one switching particle disposed between the first electrode and the second electrode and bonded to the first electrode and the second electrode via van der Waals bond, wherein the switching particle controls flow of current between the first electrode and the second electrode, based on a difference of voltages of the first electrode and the second electrode applied thereto.

Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots’ movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.

The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat element in the first direction, the stop element extending from one of the flat elements being intended to be at the same potential as an opposite surface belonging to the other flat element, and the stop element and the electrodes further being designed for the stop element to come into contact with the opposite surface and to stop the two flat electrodes from moving towards each other in the first direction when under stress.

The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat element in the first direction, the stop element extending from one of the flat elements being intended to be at the same potential as an opposite surface belonging to the other flat element, and the stop element and the electrodes further being designed for the stop element to come into contact with the opposite surface and to stop the two flat electrodes from moving towards each other in the first direction when under stress.

An electronic device is disclosed. The electronic device includes: a first electrode disposed on a substrate and extending in a first direction; a second electrode disposed above the first electrode and extending in a second direction intersecting the first direction; and at least one switching particle disposed between the first electrode and the second electrode and bonded to the first electrode and the second electrode via van der Waals bond, wherein the switching particle controls flow of current between the first electrode and the second electrode, based on a difference of voltages of the first electrode and the second electrode applied thereto.

The present invention relates to a nucleic acid nanomotor. The present invention further relates to a system comprising a nanomotor and a control unit configured to generate an alternating current for rotating said nanomotor. The present invention also relates to a method of rotating a rotor of a nanomotor with respect to a stator of said nanomotor. Furthermore, the present invention relates to a use of a nanomotor or a system as a turbine, propulsion, fluid mixer, energy storing device, machine applying mechanical force e.g. on a system coupled to said nanomotor, and/or in chemical synthesis.

Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots' movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.