In a method of manufacturing a highly stretchable three-dimensional (3D) percolated conductive nano-network structure, a 3D nano-structured porous elastomer including patterns distributed in a periodic network is formed. A surface of the 3D nano-structured porous elastomer is changed to a hydrophilic state. A polymeric material is conformally adhered on the surface of the 3D nano-structured porous elastomer. The surface of the 3D nano-structured porous elastomer is wet by infiltrating a conductive solution in which a conductive material is dispersed. A 3D percolated conductive nano-network coupled with the 3D nano-structured porous elastomer is formed by evaporating a solvent of the conductive solution and removing the polymeric material.

This present disclosure provides methods for utilizing such forces in when generating nanofibrillar constructs with engineered morphology from the nano- to macro-scales. Using for example, a biopolymer silk fibroin as a base material, patterns an intermediate hydrogel were generated within a deformable mold. Subsequently, mechanical tension was introduced via either hydrogel contraction or mold deformation, and finally a material is reentrapped in this transformed shape via beta-sheet crystallization and critical point drying. Topdown engineered anchorages, cables, and shapes act in concert to mediate precision changes in nanofiber alignment/orientation and a macroscale form of provided nanofibrillar structure. An ability of this technique to engineer large gradients of nano- and micro-scale order, manipulate mechanical properties (such as plasticity and thermal transport), and the in-situ generation of 2D and 3D, multi-tiered and doped, nanofibrillar constructs was demonstrated.

Disclosed is a flexible hydrogen sensor with ultra-high sensitivity and a wide range and a fabrication method therefor. The sensor includes a conductive electrode layer (4), a sensing layer and a flexible substrate layer (1) in sequence from top to bottom. The sensing layer includes a MO.sub.xfilm (2) and Pd nanoparticles (NPs) (3), and the Pd NPs (3) are covered on the MO.sub.x film (2). A traditional metal oxide type hydrogen sensor and a quantum conductance-based hydrogen sensor are combined on a flexible polymer substrate by means of an atomic layer deposition (ALD) technology and a cluster beam deposition (CBD) technology, so as to obtain a flexible hydrogen sensor with ultra-high sensitivity, a wide range and excellent selectivity and lower working temperature.

A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

In a method of manufacturing a highly stretchable three-dimensional (3D) percolated conductive nano-network structure, a 3D nano-structured porous elastomer including patterns distributed in a periodic network is formed. A surface of the 3D nano-structured porous elastomer is changed to a hydrophilic state. A polymeric material is conformally adhered on the surface of the 3D nano-structured porous elastomer. The surface of the 3D nano-structured porous elastomer is wet by infiltrating a conductive solution in which a conductive material is dispersed. A 3D percolated conductive nano-network coupled with the 3D nano-structured porous elastomer is formed by evaporating a solvent of the conductive solution and removing the polymeric material.

A selectively-absorbing material includes a silicone polymer and transition-metal oxide nanoparticles dispersed therein. Each of the transition-metal oxide nanoparticles includes manganese. A solar receiver includes (i) a metal substrate including an etched surface having a microroughness between 0.05 micrometers and two micrometers; (ii) a polymer matrix disposed on the etched surface; and (iii) transition-metal oxide nanoparticles dispersed within the polymer matrix. A method for producing transition-metal oxide nanoparticles includes recrystallizing a plurality of two-element nanoparticles at a temperature between 300 and 700° C. The plurality of two-element nanoparticles includes at least two of (i) copper oxide nanoparticles, (ii) manganese oxide nanoparticles, and (iii) iron oxide nanoparticles. A method for fabricating a selective-absorber includes etching a top surface of a metal substrate; depositing a polymer-matrix composite on the etched top surface; and interdiffusing the polymer-matrix composite and the metal substrate. The polymer-matrix composite includes transition-metal oxide nanoparticles dispersed therein.

A new technique, referred to as PSBEE, is disclosed and enables fabrication of freestanding nanomembranes. The PSBEE technique enables fabrication and synthesis of nanomembranes comprising 2D high entropy alloys and 2D metallic glasses and may be extended to ceramics and semiconductors, thereby enabling the fabrication of large-scale freestanding nanomembranes across a wide range of materials, including those deemed to have a great potential for future functional and structural use. To form nanomembranes using PSBEE, a plurality of membranes may be prepared and subjected to thermoplastic compression. Afterwards, one of the membranes may be removed and the remaining membranes may undergo additional thermoplastic compression in the presence of a Si substrate. Once a threshold level of smoothness is achieved, a coating or film may be applied and then separated from the final plate.

Disclosed is a flexible hydrogen sensor with ultra-high sensitivity and a wide range and a fabrication method therefor. The sensor includes a conductive electrode layer (4), a sensing layer and a flexible substrate layer (1) in sequence from top to bottom. The sensing layer includes a MO.sub.x film (2) and Pd nanoparticles (NPs) (3), and the Pd NPs (3) are covered on the MO.sub.x film (2). A traditional metal oxide type hydrogen sensor and a quantum conductance-based hydrogen sensor are combined on a flexible polymer substrate by means of an atomic layer deposition (ALD) technology and a cluster beam deposition (CBD) technology, so as to obtain a flexible hydrogen sensor with ultra-high sensitivity, a wide range and excellent selectivity and lower working temperature.

A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots’ movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.