C01B21/0766

TITANIUM COMPLEX, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING TITANIUM-CONTAINING THIN FILM
20230257404 · 2023-08-17 ·

A titanium complex useful for producing a titanium-containing thin film under low temperature deposition conditions without using an oxidative gas is provided. A titanium complex represented by the general formula (1) (wherein each of R.sub.1 and R.sub.2 is independently a C.sub.1-6 alkyl group which may be bonded with each other to form a ring, X is CR.sub.3 or a N atom, Y is CR.sub.4 or a N atom, Z is CR.sub.5 or a N atom, each of R.sub.3, R.sub.4 and R.sub.5 is independently a hydrogen atom or a C.sub.1-6 alkyl group, and n is an integer of from 1 to 3).

POWDER FOR FORMING BLACK LIGHT-SHIELDING FILM AND METHOD FOR MANUFACTURING SAME

The present invention provides a powder for forming a black light-shielding film having a specific surface area of 20 to 90 m.sup.2/g, which is measured by the BET method, comprising zirconium nitride as a main component, and containing magnesium and/or aluminum. If containing the magnesium, the content of the magnesium is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming a black light-shielding film, and if containing the aluminum, the content of the aluminum is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film.

Titanium complex, method for producing same, and method for producing titanium-containing thin film

A titanium complex useful for producing a titanium-containing thin film under low temperature deposition conditions without using an oxidative gas is provided. A titanium complex represented by the general formula (1) (wherein each of R.sub.1 and R.sub.2 is independently a C.sub.1-6 alkyl group which may be bonded with each other to form a ring, X is CR.sub.3 or a N atom, Y is CR.sub.4 or a N atom, Z is CR.sub.5 or a N atom, each of R.sub.3, R.sub.4 and R.sub.5 is independently a hydrogen atom or a C.sub.1-6 alkyl group, and n is an integer of from 1 to 3).