The present invention provides a cold plasma ozone generator, comprising: an inlet gas port; at least one in-electrode, said in-electrode having a plurality of holes substantially at a perimeter of the same; said plurality of perimeter holes are in fluid communication with said inlet gas port, said plurality of perimeter holes configured to allow said dry gas to pass therethrough; at least one out-electrode, said out-electrode having at least one hole at the center of the same, said at least one hole configured to allow gas to pass therethrough; said in-electrode and said out-electrode configured to maintain said high voltage AC therebetween; at least one spacer between said in-electrode and said out-electrode, said spacer configured to maintain a constant-width gap between said in-electrode and said out-electrode; an outlet port.

An ozone generating apparatus includes a first flow channel provided with a humidifying section that imparts moisture to oxygen gas and configured to discharge oxygen gas that has passed through the humidifying section, a second flow channel configured to discharge oxygen gas having a moisture content of 10 ppb or less, a confluence channel in which the oxygen gas discharged via the first flow channel and the oxygen gas discharged via the second flow channel join together, an ozone generator configured to generate ozone gas using, as a material, mixed oxygen gas of the oxygen gases that have joined in the confluence channel, and a flow rate ratio adjustment section configured to adjust a ratio between respective flow rates of the oxygen gas discharged from the first flow channel to the confluence channel and the oxygen gas discharged from the second flow channel to the confluence channel.

An ozone generator includes a discharge chamber; an inlet opening for feeding air into the discharge chamber; an outlet opening for removing ozone from the discharge chamber; and at least two cylindrical electrode sets in the discharge chamber. Each electrode set includes a ground electrode; a high voltage electrode; a dielectric between the ground electrode and the high voltage electrode; the dielectric separated from the ground electrode by a first discharge gap, and the dielectric separated from the high voltage electrode by a second discharge gap. A high voltage power supply provides a voltage impulse to the high voltage electrode of at least 2 kV (at least 5 kV is most cases), and a peak current of at least 1 ampere (at least 4 amperes in most cases). The high voltage power supply provides a dU/dt of the voltage impulse of between 5 kV/sec and 50 kV/sec.

An ozone generator includes a discharge chamber; an inlet opening for feeding air into the discharge chamber; an outlet opening for removing ozone from the discharge chamber; and at least two cylindrical electrode sets in the discharge chamber. Each electrode set includes a ground electrode; a high voltage electrode; a dielectric between the ground electrode and the high voltage electrode; the dielectric separated from the ground electrode by a first discharge gap, and the dielectric separated from the high voltage electrode by a second discharge gap. A high voltage power supply provides a voltage impulse to the high voltage electrode of at least 2 kV (at least 5 kV is most cases), and a peak current of at least 1 ampere (at least 4 amperes in most cases). The high voltage power supply provides a dU/dt of the voltage impulse of between 5 kV/sec and 50 kV/sec.

The present invention provides a cold plasma ozone generator, comprising: an inlet gas port; at least one in-electrode, said in-electrode having a plurality of holes substantially at a perimeter of the same; said plurality of perimeter holes are in fluid communication with said inlet gas port, said plurality of perimeter holes configured to allow said dry gas to pass therethrough; at least one out-electrode, said out-electrode having at least one hole at the center of the same, said at least one hole configured to allow gas to pass therethrough; said in-electrode and said out-electrode configured to maintain said high voltage AC therebetween; at least one spacer between said in-electrode and said out-electrode, said spacer configured to maintain a constant-width gap between said in-electrode and said out-electrode; an outlet port.