Process and apparatus for producing helium, neon, or argon product gas using an adsorption separation unit having minimal dead end volumes. A purification unit receives a stream enriched in helium, neon, or argon, and a stream is recycled from the purification unit back to the adsorption separation unit in a controlled manner to maintain the concentration of the helium, neon, or argon in the feed to the separation unit within a targeted range.

Device and method for purifying a gas mixture to produce a concentrated gas, notably neon, starting from a mixture comprising neon, said device including, in a cold box housing a cryogenic purification circuit comprising, in series, at least one unit for purifying the mixture by cryogenic adsorption at a temperature between 65K and 100K and notably 65K, then a unit for cooling the mixture to a temperature between 25 and 65 K and then a unit for cryogenic distillation of the mixture to produce the concentrated liquid at the outlet of the cryogenic distillation unit, characterized in that the unit for cooling the mixture to a temperature between 25 and 65 K comprises at least one cryocooler that extracts thermal power from the mixture via a heat exchanger.

A neon recovering/purifying system including: a recovery vessel that is arranged on an exhaust gas route and stores exhaust gas, the exhaust gas route being branched and extending from a discharge line; a compressor that increases a pressure of the exhaust gas sent out from the recovery vessel, to a third pressure; an exhaust gas flow rate regulating unit that regulates a flow rate of the exhaust gas whose pressure has been increased by the compressor; a first impurity removing unit that removes a first impurity from the exhaust gas; a second impurity removing unit that removes a second impurity from the exhaust gas from which the first impurity has been removed; a pressure increasing vessel that stores purified gas that has been processed by the first impurity removing unit and the second impurity removing unit; a pressure reducing valve that reduces a pressure of the purified gas sent out from the pressure increasing vessel, to the first pressure; and a purified gas flow rate regulating unit that regulates a flow rate of the purified gas supplied to a supply line of a manufacturing system.

Process and apparatus for producing helium, neon, or argon product gas using an adsorption separation unit having minimal dead end volumes. A second separation unit receives a stream enriched in helium, neon, or argon, and a stream is recycled from the second separation unit back to the adsorption separation unit in a controlled manner to maintain the concentration of the helium, neon, or argon in the feed to the separation unit within a targeted range.

Process and apparatus for producing helium, neon, or argon product gas using an adsorption separation unit having minimal dead end volumes. A purification unit receives a stream enriched in helium, neon, or argon, and a stream is recycled from the purification unit back to the adsorption separation unit in a controlled manner to maintain the concentration of the helium, neon, or argon in the feed to the separation unit within a targeted range.

Process and apparatus for producing helium, neon, or argon product gas using an adsorption separation unit having minimal dead end volumes. A second separation unit receives a stream enriched in helium, neon, or argon, and a stream is recycled from the second separation unit back to the adsorption separation unit in a controlled manner to maintain the concentration of the helium, neon, or argon in the feed to the separation unit within a targeted range.

Systems for recovering neon from used neon are provided. The systems can include a pretreatment component operatively coupled to receive used neon gas from a system for producing UV light using neon, and a capture component operatively coupled to the pretreatment component. Methods for recovering neon from used neon are also provided.

A neon recovering/purifying system including: a recovery vessel that is arranged on an exhaust gas route and stores exhaust gas, the exhaust gas route being branched and extending from a discharge line; a compressor that increases a pressure of the exhaust gas sent out from the recovery vessel, to a third pressure; an exhaust gas flow rate regulating unit that regulates a flow rate of the exhaust gas whose pressure has been increased by the compressor; a first impurity removing unit that removes a first impurity from the exhaust gas; a second impurity removing unit that removes a second impurity from the exhaust gas from which the first impurity has been removed; a pressure increasing vessel that stores purified gas that has been processed by the first impurity removing unit and the second impurity removing unit; a pressure reducing valve that reduces a pressure of the purified gas sent out from the pressure increasing vessel, to the first pressure; and a purified gas flow rate regulating unit that regulates a flow rate of the purified gas supplied to a supply line of a manufacturing system.

Device and method for purifying a gas mixture to produce a concentrated gas, notably neon, starting from a mixture comprising neon, said device including, in a cold box housing a cryogenic purification circuit comprising, in series, at least one unit for purifying the mixture by cryogenic adsorption at a temperature between 65K and 100K and notably 65K, then a unit for cooling the mixture to a temperature between 25 and 65 K and then a unit for cryogenic distillation of the mixture to produce the concentrated liquid at the outlet of the cryogenic distillation unit, characterized in that the unit for cooling the mixture to a temperature between 25 and 65 K comprises at least one cryocooler that extracts thermal power from the mixture via a heat exchanger.