Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A system and method for separating Kr gas from Xe gas utilizing natural clinoptilolite. The method includes separating Kr gas from Xe gas by selectively adsorbing Kr gas. The method includes providing a vessel comprising a Kr adsorbent bed comprising a natural clinoptilolite adsorbent. A feed gas comprising Kr gas and Xe gas is exposed to the Kr adsorbent bed for a residence time to selectively adsorb sufficient Kr gas from the feed gas to form a Xe enriched gas raffinate product. The Xe enriched gas raffinate product is removed from the vessel. Thereafter, the Kr adsorbent bed is regenerated to release a Kr enriched gas extract product.