C01B2210/0098

Hydrogen and Power Production with Sorbent Enhanced Reactor Steam Reformer and Carbon Capture

An apparatus for generating hydrogen from solid carbonaceous feed stock for production of electricity, chemicals, or fuels using all-steam gasification includes a micronized char preparation system comprising a devolatilizer and an indirect all-steam gasifier generating syngas. A syngas cooler is configured to at least partial quench the syngas and can to produce steam. A syngas clean up system removes ash and residual carbon, a carbon-capture system includes a water gas shift system and CO.sub.2 removal system. A pressure swing absorber (PSA) generating tailgas. An oxygen-fueled burner receives tailgas from the PSA and provides heat to a sorbent enhanced reformer (SER) battery limit system. A hydrogen cooler receives tailgas from the PSA that provides heat to the SER battery limit system. A CO.sub.2 cooler receives tailgas from the PSA that providing heat to the sorbent enhanced reformer battery limit system.

PRODUCTION METHOD FOR HIGH-PURITY HYDROGEN CHLORIDE GAS

A method for producing a high-purity hydrogen chloride gas comprises performing a purification process that includes the steps 1) to 3) below on a byproduct hydrogen chloride gas: 1) a crude hydrochloric acid generation step of allowing water to absorb the byproduct hydrogen chloride gas; 2) a volatile organic impurity-removed hydrochloric acid generation step of bringing the crude hydrochloric acid obtained in the step 1) into contact with an inert gas at a liquid temperature of 20 to 45° C. to dissipate volatile organic impurities; and 3) a high-purity hydrogen chloride gas generation step of supplying the volatile organic impurity-removed hydrochloric acid obtained in the step 2) to a distillation column and performing distillation under conditions of a column bottom temperature of higher than 60° C. and 108° C. or lower and a column top temperature of 60° C. or lower to distill out a high-purity hydrogen chloride gas.

METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMINANT STREAM EXITING AN ETCH CHAMBER

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

NOVEL METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMINANT STREAM EXITING AN ETCH CHAMBER

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

COMBINED MEMBRANE-PRESSURE SWING ADSORPTION METHOD FOR RECOVERY OF HELIUM
20170320736 · 2017-11-09 ·

A method of obtaining helium from a process gas. The process gas is at a pressure less than 15 bar to a first membrane separation stage having a first membrane more readily permeable for helium than for at least one other component in the process gas. A first retentate stream is fed to a second membrane separation stage having a second membrane more readily permeable for helium than for at least one other component in the process gas. Helium is separated from a first helium-containing permeate stream using a pressure swing adsorption to obtain a helium-containing product stream. A second helium-containing permeate stream is recycled to the first membrane separation stage. A purge gas from the pressure swing adsorption is also recycled to the first membrane separation stage.

Gas recovering apparatus, semiconductor manufacturing system, and gas recovering method
11766635 · 2023-09-26 · ·

According to one embodiment, a gas recovering apparatus includes a casing and a tube. The casing is provided with an inlet through which a gas flows in, a first outlet for discharging a first gas containing a gas to be recovered of the gas, and a second outlet for discharging a second gas other than the first gas of the gas. The casing is evacuated via the first outlet. The tube is provided in the casing from the inlet to the second outlet, and has a high permeability to the first gas and a low permeability to the second gas.

GAS RECOVERING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND GAS RECOVERING METHOD
20220072473 · 2022-03-10 · ·

According to one embodiment, a gas recovering apparatus includes a casing and a tube. The casing is provided with an inlet through which a gas flows in, a first outlet for discharging a first gas containing a gas to be recovered of the gas, and a second outlet for discharging a second gas other than the first gas of the gas. The casing is evacuated via the first outlet. The tube is provided in the casing from the inlet to the second outlet, and has a high permeability to the first gas and a low permeability to the second gas.

Carbon, nitrogen and oxygen separator and method of use thereof
20210308620 · 2021-10-07 ·

An apparatus and a method for producing carbon, oxygen and optionally nitrogen from treated flue gases are provided. The apparatus provides a thermo-dielectric-electric field that splits molecules of carbon dioxide and carbon monoxide into carbon and oxygen and nitrogen oxides into nitrogen and oxygen. The carbon is recovered in a variety of solid forms, and oxygen and nitrogen are recovered as gases.

System and method for xenon recovery

Xenon is contained within articles of manufacture such as light bulbs. Described herein are an apparatus, system, a method to capture and collect the xenon contained in articles of manufacture such as defective light bulbs for recovery and/or reuse.