A metal-containing film can be formed with high continuity with respect to a base when forming the metal-containing film on the base by CVD or ALD. A film forming method of forming, by ALD or CVD, a Ti-containing film on a base film of a processing target object having a SiO.sub.2 film as the base film includes performing a surface processing of accelerating formation of a silanol group on a surface of the SiO.sub.2 film by bringing a fluid containing O and H into contact with the surface of the SiO.sub.2 film; and performing a film forming processing of forming the Ti-containing film on the SiO.sub.2 film, on which the surface processing is performed, by the ALD or the CVD with a Ti source gas which reacts with the silanol group.

Method and apparatus for preparing at least one metal chloride from metal oxide containing material comprising calcining the metal oxide containing material under temperature conditions sufficient to obtain a calcined product comprising at least one metal oxide; and selectively chlorinating the calcined product to form at least one metal chloride.

The present invention provides a process for recovering transition metal tetrahalides from a waste stream coming from a catalyst manufacturing process by (a) establishing a mixed stream comprising transition metal tetrahalide and transition metal alkoxyhalides; (b) forming a falling liquid film from the mixed stream of step (a) at a temperature of from 25 to 85 C. and an absolute pressure of from 0.05 to 0.6 bar; and (c) establishing from the film of step (b) a first vapor stream containing from 90 to 100% of recoverable components and a second liquid stream containing about 10 to 80% of titanium haloalkoxides.

Provided are high purity tungsten pentachloride, and a method for obtaining such high purity tungsten pentachloride at a high yield and in an efficient manner. Tungsten pentachloride in which a total content of metal impurities excluding Sb, Ti, and As is less than 10 wtppm is obtained by uniformly mixing one or more types of reducing agents selected from Sb, Ti, and As and tungsten hexachloride at a molar ratio of 1.0:2.0 to 1.0:5.0 (reducing agent/WCl.sub.6 ratio) in an inert atmosphere to obtain a mixture, heating and reducing the mixture for 1 to 100 hours in a temperature range in which a chloride of tungsten and the reducing agent becomes a liquid phase to obtain a reduced product, heating the reduced product for 1 to 100 hours at 100 Pa or less and in a temperature range of 90 to 130 C., and performing reduced-pressure distillation thereto to obtain a reduced-pressure distilled product, heating and sublimating the reduced-pressure distilled product for 1 to 100 hours at 100 Pa or less and in a temperature range of 130 to 170 C., and performing sublimation purification of achieving precipitation at 70 to 120 C.

A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

Titanium-containing film forming compositions comprising titanium halide-containing precursors are disclosed. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Titanium-containing films on one or more substrates via vapor deposition processes.

A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

This disclosure relates to a fluidized bed reaction system and method for continuous production of titanium tetrachloride from titanium-bearing materials containing high concentrations of alkaline earth metal impurities. Agglomerated heavy particles in a reaction are taken out continuously from a chlorination reactor without clogging and stopping. The reactors and related methods disclosed apply to the chlorination of titanium slag containing high content of alkaline earth metal oxides of up to 15% by weight.

Method and apparatus for preparing at least one metal chloride from metal oxide containing material comprising calcining the metal oxide containing material under temperature conditions sufficient to obtain a calcined product comprising at least one metal oxide; and selectively chlorinating the calcined product to form at least one metal chloride.

This disclosure relates to a fluidized bed reaction system and method for continuous production of titanium tetrachloride from titanium-bearing materials containing high concentrations of alkaline earth metal impurities. Agglomerated heavy particles in a reaction are taken out continuously from a chlorination reactor without clogging and stopping. The reactors and related methods disclosed apply to the chlorination of titanium slag containing high content of alkaline earth metal oxides of up to 15% by weight.