One aspect relates to a process for the preparation of a quartz glass body, including providing a silicon dioxide granulate, wherein the silicon dioxide granulate was made from pyrogenic silicon dioxide powder and the silicon dioxide granulate has a BET surface area in a range from 20 to 40 m.sup.2/g, making a glass melt out of silicon dioxide granulate in an oven and making a quartz glass body out of at least part of the glass melt. The oven has at least a first and a further chamber connected to one another via a passage. The temperature in the first chamber is lower than the temperature in the further chambers. On aspect relates to a quartz glass body which is obtainable by this process. One aspect relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

The porous glass base material manufacturing apparatus releases gas of organic siloxane raw materials into the flame of a group of burners that moves relative to a starting base material along the longitudinal direction of the starting base material rotating around a rotation axis along the longitudinal direction to form soot of porous glass particles on the surface of the starting base material. The porous glass base material manufacturing apparatus is equipped with a vaporizer that vaporizes liquid raw materials containing organic siloxane in a liquid state supplied from a raw material tank to make a raw material mixed gas mixed with raw material gas and carrier gas and a raw material gas pipe that supplies the raw material mixed gas to the burner. The raw material gas pipe is insulated and kept warm by double insulation.

The invention provides a method for producing composite nanoparticles, the method using a first compound capable of transitioning from a monoclinic to a tetragonal rutile crystal state upon heating, and having the steps of subjecting the first compound to a hydrothermal synthesis to create anisotropic crystals of the compound; encapsulating the first compound with a second compound to create a core-shell construct; and annealing the construct as needed. Also provided is a device for continuously synthesizing composite nanoparticles, the device having a first precursor supply and a second precursor supply; a mixer to homogeneously combine the first precursor and second precursor to create a liquor; a first microreactor to subject the liquor to hydrothermic conditions to create an\isotropic particles in a continuous operation mode; and a second microreactor for coating the particles with a third precursor to create a core-shell construct.

A method for producing a blank from titanium-doped, highly silicic-acidic glass having a specified fluorine content for use in EUV lithography is described, in which the thermal expansion coefficient over the operating temperature remains at zero as stably as possible. The course of the thermal expansion coefficient of Ti-doped silica glass depends on a plurality of influencing factors. In addition to the absolute titanium content, the distribution of the titanium is of significant importance, as is the ratio and distribution of additional doping elements, such as fluorine. In the method, fluorine-doped TiO.sub.2—SiO.sub.2 soot particles are generated and processed further via consolidation and vitrifying into the blank, and, by flame hydrolysis of input substances containing silicon and titanium, TiO.sub.2—SiO.sub.2-soot particles are formed, exposed to a reagent containing fluorine in a moving powder bed, and converted to the fluorine-doped TiO.sub.2—SiO.sub.2-soot particles.

One aspect relates to a process for the preparation of a quartz glass body. The process includes providing a silicon dioxide granulate I prepared from a pyrogenically produced silicon dioxide powder, treating the silicon dioxide granulate I with a reactant at a temperature in a range from 1000 to 1300° C., and making a glass melt out of the silicon dioxide granulate. A quartz glass body is made out of at least a part of the glass melt. Furthermore, one aspect relates to a quartz glass body obtainable by this process. Furthermore, one aspect relates to a light guide, an illuminant, and a formed body, each of which is obtainable by further processing of the quartz glass body. One aspect additionally relates to a process for the preparation of a silicon dioxide granulate II.

A silica-titania glass substrate comprising: (i) a composition comprising 5 weight percent to 10 weight percent TiO.sub.2; (ii) a coefficient of thermal expansion (CTE) at 20° C. in a range from −45 ppb/K to +20 ppb/K; (iii) a crossover temperature (Tzc) in a range from 10° C. to 50° C.; (iv) a slope of CTE at 20° C. in a range from 1.20 ppb/K.sup.2 to 1.75 ppb/K.sup.2; (v) a refractive index variation of less than 140 ppm; and (vi) 600 ppm OH group concentration or greater. The substrate can have a mass of 1 kg or greater and less than 0.05 gas inclusions per cubic inch via a method comprising (i) forming the substrate from soot particles comprising SiO.sub.2 and TiO.sub.2, and (ii) subjecting the substrate to an environment having an elevated temperature and an elevated pressure for a period of time until the substrate comprises less than 0.05 gas inclusions per cubic inch.

A method of capturing soot includes the steps: combusting a first precursor in a burner to produce a soot stream, the soot stream comprising soot and exiting the burner at an outlet; and directing a capture medium to the soot stream, the capture medium contacting the soot in an impact region, the soot having a temperature greater than 50° C. in the impact region.

The present disclosure provides a system for generating fumed silica particles for manufacturing of an optical fiber preform. The system includes a generator and a plurality of inlets connected with the generator. The generator includes a plurality of burners. The plurality of inlets include a first inlet, a second inlet, a third inlet and a fourth inlet. The first inlet provides passage for flow of a precursor material to the generator. The second inlet provides passage for flow of a first gas to the generator. The third inlet provides passage for flow of a second gas to the generator. The fourth inlet provides passage for flow of a carrier gas to the generator. The plurality of burners enables a chemical reaction between the precursor material, the first gas and the second gas that facilitates the generation of the fumed silica particles.

One aspect relates to a process for the preparation of a quartz glass body, including providing a silicon dioxide granulate, wherein the silicon dioxide granulate was made from pyrogenic silicon dioxide powder and the silicon dioxide granulate has a BET surface area in a range from 20 to 40 m.sup.2/g, making a glass melt out of silicon dioxide granulate in an oven and making a quartz glass body out of at least part of the glass melt. The oven has at least a first and a further chamber connected to one another via a passage. The temperature in the first chamber is lower than the temperature in the further chambers. On aspect relates to a quartz glass body which is obtainable by this process. One aspect relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

A method of capturing soot includes the steps: combusting a first precursor in a burner to produce a soot stream, the soot stream comprising soot and exiting the burner at an outlet; and directing a capture medium to the soot stream, the capture medium contacting the soot in an impact region, the soot having a temperature greater than 50 C. in the impact region.