A method of forming an optical fiber preform includes the steps: igniting a burner having a fume tube assembly to produce a first spray size of silicon dioxide particles; depositing the silicon dioxide particles on a core cane to produce a soot blank; and adjusting an effective diameter of an aperture of the fume tube assembly to produce a second spray size of the silicon dioxide particles. The second spray size is larger than the first spray size.

A multiple tube burner for synthesizing a porous material includes three or more glass tubes are arranged coaxially with one another, the glass tubes having a substantially circular shape on a cross section perpendicular to a longitudinal direction. Out of the three or more glass tubes, a first glass tube and a second glass tube that is arranged on an outer side of the first glass tube are connected with each other on a gas introducing side, and a thickness near a joint portion of the second glass tube connected with the first glass tube is thicker than a thickness of the second glass tube on the gas spouting side.

To provide a fabrication method for a porous glass base material for optical fiber, the method including performing deposition of glass fine particles generated by using a burner for glass fine particle synthesis to form a porous glass base material, and heating this porous glass base material to be transformed into transparent glass to obtain a glass base material hardly containing any air bubbles. Provided is a fabrication method for a porous glass base material for optical fiber by depositing glass fine particles, which is generated in flame formed by ejecting a glass raw material gas and a combustible gas from a burner, on a rotating starting material, in which the burner continuously ejects inert gas for at least a predetermined period immediately after the end of the deposition of the glass fine particles.

A method of manufacturing synthetic quartz glass through an outside vapor deposition (OVD) process with improved deposition efficiency. When a hollow cylindrical synthetic quartz glass product is manufactured through an OVD method or the like, it is environmentally friendly in view of using a smaller amount of chlorine and is economical in view of requiring no separate treatment equipment, as compared to a conventional technique using silicon chloride (SiCl.sub.4). Also, the method, in which octamethylcyclotetrasiloxane is supplied to a deposition burner while being sprayed in the form of a droplet along with a high-pressure carrier gas and vaporized by the deposition burner, can effectively address the high-temperature heating and slow decomposition involved when octamethylcyclotetrasiloxane ([(CH.sub.3).sub.2SiO].sub.4) is used as a source for depositing silicon dioxide particles.

Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

Described is a method of producing synthetic fused silica in which the synthetic flame used in the method has a ratio of the Full Width at Half Maximum (FWHM.sub.vert) vertical luminous intensity to the Full Width at Half Maximum (FWHM.sub.hori) horizontal luminous intensity greater than 10 in a targetless state, the luminous intensities being measured in candela/mm.sup.2.

Described is a process for the production of synthetic fused silica in which the feedstock vapor is reacted from an organosilicon starting compound and any combustible burner auxiliary gases at an air number in the burner of less than or equal to 1.00. Furthermore, one embodiment relates to a corresponding apparatus.

The present invention provides an optical fiber with improved optical properties such as zero dispersion wavelength by suppressing the volatilization of dopant materials such as germanium dioxide and optimizing the refractive index distribution by adjusting the setting position of the core portion burner for deposition in a larger optical fiber preform. An optical fiber preform includes a core portion with a relatively high refractive index and a clad portion with a relatively low refractive index, wherein a position having a value of 45% of a refractive index difference between a center of the core portion and the clad portion is a boundary rcore (mm) between the core portion and the clad portion; and when a radius position r at which a refractive index difference with the clad portion being a maximum value is rside (mm), r.sub.side/rcore is 0.745 to 1.

Provided is a glass particulate deposit manufacturing method for manufacturing a glass particulate deposit comprising mounting a fixing jig on an outer periphery of an outermost pipe of a burner; inserting a burner cover from a tip end of the outermost pipe of the burner; and sandwiching and compressing a part of the fixing jig between the burner cover and the outermost pipe of the burner to fix the burner cover to the burner, wherein an outer diameter of a part of the fixing jig that is not compressed is greater than an inner diameter of a part of the burner cover inserted to the tip end of the outermost pipe of the burner.

A process for producing a glass body, the process including flowing oxygen gas from a burner in a furnace at a flow rate of greater than 12.0 standard liters per minute and flowing a precursor gas mixture from the burner. The process further including oxidizing the precursor gas mixture with the oxygen gas to form glass particles and depositing the glass particles on a collection cup to form the glass body.