To provide a fabrication method for a porous glass base material for optical fiber, the method including performing deposition of glass fine particles generated by using a burner for glass fine particle synthesis to form a porous glass base material, and heating this porous glass base material to be transformed into transparent glass to obtain a glass base material hardly containing any air bubbles. Provided is a fabrication method for a porous glass base material for optical fiber by depositing glass fine particles, which is generated in flame formed by ejecting a glass raw material gas and a combustible gas from a burner, on a rotating starting material, in which the burner continuously ejects inert gas for at least a predetermined period immediately after the end of the deposition of the glass fine particles.

Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

A method of producing soot, including: combusting a first fuel stream and a first oxidizer at a burner face; combusting a second fuel stream and a second oxidizer at the burner face, wherein the second fuel stream and the second oxidizer are premixed in advance of the burner face and a second equivalence ratio of the second fuel stream and the second oxidizer is less than about 1; and combusting a silicon-containing fuel into a plurality of soot particles, wherein the second fuel stream and the second oxidizer are combusted between the first fuel stream and the silicon-containing fuel. Applying this method of producing soot to deposit a preform suitable for the manufacture of optical fibers.

Described is a process for the production of synthetic fused silica in which the feedstock vapor is reacted from an organosilicon starting compound and any combustible burner auxiliary gases at an air number in the burner of less than or equal to 1.00. Furthermore, one embodiment relates to a corresponding apparatus.

A method of producing soot, including: combusting a first fuel stream and a first oxidizer at a burner face; combusting a second fuel stream and a second oxidizer at the burner face, wherein the second fuel stream and the second oxidizer are premixed in advance of the burner face and a second equivalence ratio of the second fuel stream and the second oxidizer is less than about 1; and combusting a silicon-containing fuel into a plurality of soot particles, wherein the second fuel stream and the second oxidizer are combusted between the first fuel stream and the silicon-containing fuel. Applying this method of producing soot to deposit a preform suitable for the manufacture of optical fibers.

This burner for producing a fine glass particle deposited body is provided with a metallic gas-feed pipe that forms a burner body, and a cover for covering the gas-feed pipe, wherein: the gas-feed pipe and the cover are integrally formed; the gas-feed pipe has connected thereto a piping through which material gas, oxyhydrogen gas, and seal gas are supplied; and the cover covers, in the axial direction of the burner over a prescribed length and in a given constant outer diameter, the gas-feed pipe and a connection part of the piping connected to a lateral surface of the gas-feed pipe.

A manufacturing method of a porous glass base material for optical fiber includes: supplying an organic siloxane raw material supplied from a raw material tank is fed to a vaporizer; mixing and vaporizing the raw material and carrier gas in the vaporizer; and externally depositing SiO.sub.2 fine particles through combustion reaction by supplying the mixed gas of raw the material and the carrier gas to the burner in the manufacturing apparatus of porous glass base material for optical fiber. Before starting to supply the raw material to a raw material gas supply pipe of the burner, the burner and the inside of a manufacturing apparatus of porous glass base material for optical fiber are pre-heated by flowing purge gas of 60° C. or higher into the raw material gas supply pipe and supplying combustible gas and combustion supporting gas to the burner.

Disclosed herein are methods for forming an optical fiber preform using organic silica and germania precursors. The method includes depositing soot composed of germanium dioxide and silica on a substrate, removing the substrate, conducting a dehydration step and one or more heating steps under an oxygen-containing atmosphere to form the preform. Also disclosed are optical fibers drawn from the preforms produced herein.

A torch for fabricating optical fiber preforms may include a body having a surface and two or more slit-shaped orifices oriented parallel or substantially parallel to each other along the surface. The torch body may further include two or more conduits connected to corresponding orifices. The torch may be used by orienting it relative to a preform substrate, and simultaneously emitting two or more gases from corresponding orifices toward the surface of the preform substrate, such that the gases are involved in a reaction to form a soot.

To provide a fabrication method for a porous glass base material for optical fiber, the method including performing deposition of glass fine particles generated by using a burner for glass fine particle synthesis to form a porous glass base material, and heating this porous glass base material to be transformed into transparent glass to obtain a glass base material hardly containing any air bubbles. Provided is a fabrication method for a porous glass base material for optical fiber by depositing glass fine particles, which is generated in flame formed by ejecting a glass raw material gas and a combustible gas from a burner, on a rotating starting material, in which the burner continuously ejects inert gas for at least a predetermined period immediately after the end of the deposition of the glass fine particles.