The invention relates to a method and a device for producing a preform for glass fiber production. The method comprises the steps of providing a carrier gas with a desired, precisely adjusted temperature, loading the carrier gas with halide vapor, mixing the loaded carrier gas with additional gases, and producing the preform in a reaction chamber with substrate.

The porous glass base material manufacturing apparatus releases gas of organic siloxane raw materials into the flame of a group of burners that moves relative to a starting base material along the longitudinal direction of the starting base material rotating around a rotation axis along the longitudinal direction to form soot of porous glass particles on the surface of the starting base material. The porous glass base material manufacturing apparatus is equipped with a vaporizer that vaporizes liquid raw materials containing organic siloxane in a liquid state supplied from a raw material tank to make a raw material mixed gas mixed with raw material gas and carrier gas and a raw material gas pipe that supplies the raw material mixed gas to the burner. The raw material gas pipe is insulated and kept warm by double insulation.

A method for manufacturing a glass fine particle deposit includes: emitting a siloxane gas, a carrier gas, and a combustion gas from a burner; setting volume concentration of a supply volume amount of the siloxane gas per unit time with respect to the sum of the supply volume amount of the siloxane gas per unit time and a supply volume amount of the carrier gas per unit time (C1) to 10.6 volume %<C1<20.0 volume %; and setting volume concentration of the supply volume amount of the siloxane gas per unit time with respect to the sum of the supply volume amount of the siloxane gas per unit time, the supply volume amount of the carrier gas per unit time, and a supply volume amount of the seal gas per unit time (C2) to 5.8 volume %<C2<10.0 volume %.

When organic siloxane in a liquid state is used as a raw material for glass particles, the formation of polymerized substances is suppressed when the raw material is vaporized in a vaporizer. In the manufacturing method of porous glass base material according to the present invention, the liquid organic siloxane, which is the raw material, is mixed with a carrier gas in the vaporizer, vaporized by the heat generated from the inner wall of the vaporizer heated by a heater unit, and supplied to the burner as a gas raw material. The porous glass base material is manufactured by depositing the glass particles generated by the combustion of the gas raw material on the starting material. The heating output of the heater unit is controlled so that the maximum temperature of the inner wall of the vaporizer is 230° C. or lower.

This burner for producing a fine glass particle deposited body is provided with a metallic gas-feed pipe that forms a burner body, and a cover for covering the gas-feed pipe, wherein: the gas-feed pipe and the cover are integrally formed; the gas-feed pipe has connected thereto a piping through which material gas, oxyhydrogen gas, and seal gas are supplied; and the cover covers, in the axial direction of the burner over a prescribed length and in a given constant outer diameter, the gas-feed pipe and a connection part of the piping connected to a lateral surface of the gas-feed pipe.

Provided is a device for producing a fine glass particle deposited body by depositing fine glass particles on a starting rod disposed within a reaction vessel, the device being provided with: a burner for synthesizing fine glass particles by jetting out a source gas; a transfer mechanism to which the burner is disposed and which causes the burner to move backward in association with an increase in the diameter of a fine glass particle deposited body; a vaporizer which is disposed to the transfer mechanism so as to be moved backward integrally with the burner and which converts a liquid siloxane into a source gas through vaporization; piping through which the source gas is fed from the vaporizer to the burner; and a heating mechanism which heats up the piping with a heating temperature of at least 230° C.

The invention relates to a method and a device for producing a preform for glass fiber production. The method comprises the steps of providing a carrier gas with a desired, precisely adjusted temperature, loading the carrier gas with halide vapor, mixing the loaded carrier gas with additional gases, and producing the preform in a reaction chamber with substrate.

A flow rate fluctuation of the liquid raw material of the organic siloxane supplied to the vaporizer is suppressed and a deposition density of the silica fine particles is uniformizes. The method of manufacturing the porous glass base material according to the present invention, a liquid organic siloxane raw material stored in a raw material tank of internal pressure P.sub.1 is controlled by a mass flow controller at a predetermined flow rate and pumped through pipe of internal pressure P.sub.2 to a vaporizer, the liquid raw material is vaporized in the vaporizer and supplied as a gas raw material to a burner, and the silica fine particles formed by burning the gas raw material in the burner are deposited to form a porous glass base material. The present invention is characterized by the method of manufacture described above, wherein P.sub.1≤P.sub.2 is satisfied.

This burner for producing a fine glass particle deposited body is provided with a metallic gas-feed pipe that forms a burner body, and a cover for covering the gas-feed pipe, wherein: the gas-feed pipe and the cover are integrally formed; the gas-feed pipe has connected thereto a piping through which material gas, oxyhydrogen gas, and seal gas are supplied; and the cover covers, in the axial direction of the burner over a prescribed length and in a given constant outer diameter, the gas-feed pipe and a connection part of the piping connected to a lateral surface of the gas-feed pipe.

In a method of manufacturing porous glass base for optical fiber, a liquid organic siloxane raw material stored in a raw material tank of internal pressure P1 is controlled by a mass flow controller at a predetermined flow rate and pumped through pipe of internal pressure P2 to a vaporizer, the liquid raw material is vaporized in the vaporizer and supplied as a gas raw material to a burner, and the silica fine particles formed by burning the gas raw material in the burner are deposited to form a porous glass base material, where P1?P2 is satisfied.