The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO.sub.2, 5-15 mol % of Al.sub.2O.sub.3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF.sub.2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index K.sub.H is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.

The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO.sub.2, 5-15 mol % of Al.sub.2O.sub.3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF.sub.2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index K.sub.H is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.

An improved slot down-draw process for forming glass sheets having a thickness less than 200 μm from glass formulations that have melting points near or above 1200° C. is provided. The improvements allow easier maintenance of the slot assembly and better management of the thermal expansions experienced by some components of the slot down-draw system.

A method of reducing bubble lifetime on the free surface of a volume of molten glass contained within or flowing through a vessel including a free volume above the free surface, thereby, minimizing re-entrainment of the bubbles back into the volume of molten glass and reducing the occurrence of blisters in finished glass products.

A manufacturing method for a glass article includes a supply step of supplying a glass raw material onto a surface of a molten glass accommodated in a melting chamber of a glass melting furnace from a supply unit mounted to a front wall of the melting chamber, and a melting step of melting the supplied glass raw material through heating with an electrode immersed in the molten glass in the melting chamber. The method also includes an outflow step of causing the molten glass to flow outside the melting chamber from an outflow port provided at a rear wall of the melting chamber, wherein 60% to 95% of an area of the surface of the molten glass in the melting chamber is covered with the glass raw material supplied in the supply step.

A manufacturing method for a glass article includes a supply step of supplying a glass raw material onto a surface of a molten glass accommodated in a melting chamber of a glass melting furnace from a supply unit mounted to a front wall of the melting chamber, and a melting step of melting the supplied glass raw material through heating with an electrode immersed in the molten glass in the melting chamber. The method also includes an outflow step of causing the molten glass to flow outside the melting chamber from an outflow port provided at a rear wall of the melting chamber, wherein 60% to 95% of an area of the surface of the molten glass in the melting chamber is covered with the glass raw material supplied in the supply step.

A method for producing glass by removing coloring ions through reduction is described, as are products obtained by this method.

An apparatus and method for manufacturing a glass article includes a conduit of precious metal or precious metal alloy hat encloses molten glass. The apparatus and method also includes a channel positioned inside or proximate the conduit that flows a defect inhibiting fluid therethrough. The channel includes at least one orifice positioned proximate a free surface of the molten glass from which flows the defect inhibiting fluid.

A glass comprising at least one oxide of Si and a di- or higher-valent metal element, the glass containing no bubbles with diameters of more than 0.1 mm, wherein an occupied area fraction of bubbles with diameters of 0.1 mm or less is 0.05% or less. A. semiconductor production apparatus and a liquid crystal production apparatus comprising a glass member comprising this glass. A method for producing a glass, comprising the steps of (1) placing raw material powders for at least one oxide of Si and a di- or higher-valent metal element in a container, mixing the raw material powders together and then melting the mixture by heating under reduced pressure to obtain a melt; (2-1) pressurizing the melt in a He gas atmosphere, or (2-2) heating the melt in an inert gas atmosphere other than a He gas atmosphere and then pressurizing the melt in the inert gas atmosphere; and (3) cooling the melt.

A glass melting furnace and method for introducing batch feed material into a glass melter tank of the glass melting furnace are disclosed. The glass melting furnace comprises the glass melter tank, a feeder tank, and at least one conduit. The glass melter tank defines at least one melter tank inlet, a molten glass outlet, and an exhaust gas outlet, and the feeder tank, which is separate from the glass melter tank, defines a batch feed inlet and a feeder tank outlet. The at least one conduit is in fluid communication with the feeder tank outlet and the melter tank inlet. Moreover, the melter tank inlet is defined below a melt level of a glass melt contained within the glass melter tank and at least partially filling the at least one conduit.